JPS6186935U - - Google Patents

Info

Publication number
JPS6186935U
JPS6186935U JP17037984U JP17037984U JPS6186935U JP S6186935 U JPS6186935 U JP S6186935U JP 17037984 U JP17037984 U JP 17037984U JP 17037984 U JP17037984 U JP 17037984U JP S6186935 U JPS6186935 U JP S6186935U
Authority
JP
Japan
Prior art keywords
lamp
shaped
wafer
rod
lamp unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17037984U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17037984U priority Critical patent/JPS6186935U/ja
Publication of JPS6186935U publication Critical patent/JPS6186935U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の一実施例の要部の断面図、第
２図はその一部を截断した正面図を示す。 １…ベル・ジヤー、２…基台、３…加熱室、４
…支持棒、５…半導体ウエハ、６…反射板、７…
ランプ熱源、８…リング状端面部、９…赤外線ラ
ンプ、１０…リフレクタ、１１…ランプハウス、
１２…ガイドシヤフト、１３…揺動台、１４…モ
ータ、１５…カム、１７…不活性ガス吸入孔、１
８…ガイドウオール、１９…ケーシング、２０…
間隙、２１…冷却空気吸入孔。

Claims (1)

    【実用新案登録請求の範囲】
  1. 等間隔に配列された複数個の棒状ランプと該各
    棒状ランプの対向面が断面放物線の一部を形成す
    るリフレクタから成るランプユニツトを具備し、
    該ランプユニツトを加熱されるウエハの面に対し
    て平行に且つ棒状ランプのピツチ間隔を振幅とし
    て一定速度で揺動させるように構成したことを特
    徴とするウエハを均一に加熱するランプ熱源。
JP17037984U 1984-11-12 1984-11-12 Pending JPS6186935U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17037984U JPS6186935U (ja) 1984-11-12 1984-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17037984U JPS6186935U (ja) 1984-11-12 1984-11-12

Publications (1)

Publication Number Publication Date
JPS6186935U true JPS6186935U (ja) 1986-06-07

Family

ID=30728086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17037984U Pending JPS6186935U (ja) 1984-11-12 1984-11-12

Country Status (1)

Country Link
JP (1) JPS6186935U (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010010410A (ja) * 2008-06-27 2010-01-14 Ulvac Japan Ltd 熱処理装置
JP2010010409A (ja) * 2008-06-27 2010-01-14 Ulvac Japan Ltd 熱処理装置
JP2015174775A (ja) * 2014-03-12 2015-10-05 ヤマハ株式会社 カーボンナノチューブの製造装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178718A (ja) * 1983-03-29 1984-10-11 Sony Corp 半導体基体の処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178718A (ja) * 1983-03-29 1984-10-11 Sony Corp 半導体基体の処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010010410A (ja) * 2008-06-27 2010-01-14 Ulvac Japan Ltd 熱処理装置
JP2010010409A (ja) * 2008-06-27 2010-01-14 Ulvac Japan Ltd 熱処理装置
JP2015174775A (ja) * 2014-03-12 2015-10-05 ヤマハ株式会社 カーボンナノチューブの製造装置

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