JPS6186924U - - Google Patents
Info
- Publication number
- JPS6186924U JPS6186924U JP17130384U JP17130384U JPS6186924U JP S6186924 U JPS6186924 U JP S6186924U JP 17130384 U JP17130384 U JP 17130384U JP 17130384 U JP17130384 U JP 17130384U JP S6186924 U JPS6186924 U JP S6186924U
- Authority
- JP
- Japan
- Prior art keywords
- paddle
- wafer
- boat
- tip
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000011261 inert gas Substances 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 1
- 230000007723 transport mechanism Effects 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17130384U JPS6186924U (de) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17130384U JPS6186924U (de) | 1984-11-12 | 1984-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6186924U true JPS6186924U (de) | 1986-06-07 |
Family
ID=30728995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17130384U Pending JPS6186924U (de) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6186924U (de) |
-
1984
- 1984-11-12 JP JP17130384U patent/JPS6186924U/ja active Pending
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