JPS6186174A - 研磨装置 - Google Patents

研磨装置

Info

Publication number
JPS6186174A
JPS6186174A JP59204098A JP20409884A JPS6186174A JP S6186174 A JPS6186174 A JP S6186174A JP 59204098 A JP59204098 A JP 59204098A JP 20409884 A JP20409884 A JP 20409884A JP S6186174 A JPS6186174 A JP S6186174A
Authority
JP
Japan
Prior art keywords
workpiece
grindstone
section
polishing
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59204098A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0126822B2 (enrdf_load_stackoverflow
Inventor
Junji Nakada
順二 中田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59204098A priority Critical patent/JPS6186174A/ja
Publication of JPS6186174A publication Critical patent/JPS6186174A/ja
Publication of JPH0126822B2 publication Critical patent/JPH0126822B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
JP59204098A 1984-10-01 1984-10-01 研磨装置 Granted JPS6186174A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59204098A JPS6186174A (ja) 1984-10-01 1984-10-01 研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59204098A JPS6186174A (ja) 1984-10-01 1984-10-01 研磨装置

Publications (2)

Publication Number Publication Date
JPS6186174A true JPS6186174A (ja) 1986-05-01
JPH0126822B2 JPH0126822B2 (enrdf_load_stackoverflow) 1989-05-25

Family

ID=16484757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59204098A Granted JPS6186174A (ja) 1984-10-01 1984-10-01 研磨装置

Country Status (1)

Country Link
JP (1) JPS6186174A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0126822B2 (enrdf_load_stackoverflow) 1989-05-25

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