JPS6186174A - 研磨装置 - Google Patents
研磨装置Info
- Publication number
- JPS6186174A JPS6186174A JP59204098A JP20409884A JPS6186174A JP S6186174 A JPS6186174 A JP S6186174A JP 59204098 A JP59204098 A JP 59204098A JP 20409884 A JP20409884 A JP 20409884A JP S6186174 A JPS6186174 A JP S6186174A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- grindstone
- section
- polishing
- flatness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 24
- 238000001514 detection method Methods 0.000 claims abstract description 12
- 238000012545 processing Methods 0.000 claims description 23
- 238000006073 displacement reaction Methods 0.000 claims description 18
- 238000005259 measurement Methods 0.000 claims description 14
- 230000032258 transport Effects 0.000 claims description 7
- 238000003754 machining Methods 0.000 abstract description 14
- 230000003028 elevating effect Effects 0.000 abstract 1
- 238000012546 transfer Methods 0.000 description 9
- 239000007788 liquid Substances 0.000 description 5
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 238000012937 correction Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 240000005979 Hordeum vulgare Species 0.000 description 1
- 235000007340 Hordeum vulgare Nutrition 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- WYROLENTHWJFLR-ACLDMZEESA-N queuine Chemical compound C1=2C(=O)NC(N)=NC=2NC=C1CN[C@H]1C=C[C@H](O)[C@@H]1O WYROLENTHWJFLR-ACLDMZEESA-N 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59204098A JPS6186174A (ja) | 1984-10-01 | 1984-10-01 | 研磨装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59204098A JPS6186174A (ja) | 1984-10-01 | 1984-10-01 | 研磨装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6186174A true JPS6186174A (ja) | 1986-05-01 |
| JPH0126822B2 JPH0126822B2 (enrdf_load_stackoverflow) | 1989-05-25 |
Family
ID=16484757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59204098A Granted JPS6186174A (ja) | 1984-10-01 | 1984-10-01 | 研磨装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6186174A (enrdf_load_stackoverflow) |
-
1984
- 1984-10-01 JP JP59204098A patent/JPS6186174A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0126822B2 (enrdf_load_stackoverflow) | 1989-05-25 |
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