JPS6185441U - - Google Patents
Info
- Publication number
- JPS6185441U JPS6185441U JP17179384U JP17179384U JPS6185441U JP S6185441 U JPS6185441 U JP S6185441U JP 17179384 U JP17179384 U JP 17179384U JP 17179384 U JP17179384 U JP 17179384U JP S6185441 U JPS6185441 U JP S6185441U
- Authority
- JP
- Japan
- Prior art keywords
- heating resistor
- electrode
- thin film
- thermal head
- film thermal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims 1
- 238000001259 photo etching Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Description
第１図Ａは本考案の実施例を示す斜視図、第１
図ＢはＡ−Ａ′に沿つた断面図、第２図は本考案
の実施例においてエツチング後の状態を示す斜視
図、第３図Ａは従来の方法の例を示す斜視図、第
３図ＢはＢ−Ｂ′に沿つた断面図、第４図は従来
の例におけるエツチング後の状態を示す斜視図で
ある。
１……発熱抵抗体、２……電極薄膜、３……フ
オトレジスト層、４……段差部、５……電極、６
……接合部、７……発熱抵抗体端部。
FIG. 1A is a perspective view showing an embodiment of the present invention;
Figure B is a sectional view taken along line A-A', Figure 2 is a perspective view showing the state after etching in the embodiment of the present invention, Figure 3A is a perspective view showing an example of the conventional method, and Figure 3 B is a sectional view taken along line B-B', and FIG. 4 is a perspective view showing the state after etching in a conventional example. DESCRIPTION OF SYMBOLS 1... Heating resistor, 2... Electrode thin film, 3... Photoresist layer, 4... Step portion, 5... Electrode, 6
. . . Junction, 7 . . . End of heating resistor.
Claims (1)
かる後、該発熱抵抗体と電気的に接続されるべき
電極をフオトエツチングによつてパターン形成す
る工程とから成る薄膜サーマルヘツドにおいて、
該発熱抵抗体と該電極との接合部における該発熱
抵抗体の厚みが該発熱抵抗体の該電極伸長側の端
部に向かつて徐々に薄くなつていることを特徴と
する薄膜サーマルヘツド。 A thin film thermal head comprising the steps of forming a heating resistor on an insulating substrate, and then patterning an electrode to be electrically connected to the heating resistor by photo-etching,
A thin film thermal head characterized in that the thickness of the heating resistor at the joint between the heating resistor and the electrode gradually becomes thinner toward the end of the heating resistor on the electrode extension side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17179384U JPS6185441U (en) | 1984-11-13 | 1984-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17179384U JPS6185441U (en) | 1984-11-13 | 1984-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185441U true JPS6185441U (en) | 1986-06-05 |
Family
ID=30729473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17179384U Pending JPS6185441U (en) | 1984-11-13 | 1984-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185441U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5489645A (en) * | 1977-12-26 | 1979-07-16 | Matsushita Electric Ind Co Ltd | Heat recording printing head |
| JPS55150387A (en) * | 1979-05-14 | 1980-11-22 | Ricoh Co Ltd | Thermosensitive recording head |
| JPS56131992A (en) * | 1980-03-19 | 1981-10-15 | Tokyo Shibaura Electric Co | Glazed board |
-
1984
- 1984-11-13 JP JP17179384U patent/JPS6185441U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5489645A (en) * | 1977-12-26 | 1979-07-16 | Matsushita Electric Ind Co Ltd | Heat recording printing head |
| JPS55150387A (en) * | 1979-05-14 | 1980-11-22 | Ricoh Co Ltd | Thermosensitive recording head |
| JPS56131992A (en) * | 1980-03-19 | 1981-10-15 | Tokyo Shibaura Electric Co | Glazed board |