JPS6184369A - イオン化装置 - Google Patents
イオン化装置Info
- Publication number
- JPS6184369A JPS6184369A JP20408184A JP20408184A JPS6184369A JP S6184369 A JPS6184369 A JP S6184369A JP 20408184 A JP20408184 A JP 20408184A JP 20408184 A JP20408184 A JP 20408184A JP S6184369 A JPS6184369 A JP S6184369A
- Authority
- JP
- Japan
- Prior art keywords
- ionization
- filaments
- filament
- electron
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 claims abstract description 22
- 230000008020 evaporation Effects 0.000 claims description 20
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 abstract description 39
- 239000000758 substrate Substances 0.000 abstract description 23
- 238000010276 construction Methods 0.000 abstract 2
- 230000001133 acceleration Effects 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 230000005672 electromagnetic field Effects 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 241000196324 Embryophyta Species 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 244000175448 Citrus madurensis Species 0.000 description 1
- 235000017317 Fortunella Nutrition 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20408184A JPS6184369A (ja) | 1984-10-01 | 1984-10-01 | イオン化装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20408184A JPS6184369A (ja) | 1984-10-01 | 1984-10-01 | イオン化装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6184369A true JPS6184369A (ja) | 1986-04-28 |
| JPS6338429B2 JPS6338429B2 (enrdf_load_stackoverflow) | 1988-07-29 |
Family
ID=16484462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20408184A Granted JPS6184369A (ja) | 1984-10-01 | 1984-10-01 | イオン化装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6184369A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63125672A (ja) * | 1986-11-13 | 1988-05-28 | Mitsubishi Electric Corp | 薄膜形成装置 |
| JPH01307211A (ja) * | 1988-06-06 | 1989-12-12 | Agency Of Ind Science & Technol | 薄膜形成装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01318434A (ja) * | 1988-06-20 | 1989-12-22 | Nec Corp | マイクロ波受信装置 |
-
1984
- 1984-10-01 JP JP20408184A patent/JPS6184369A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63125672A (ja) * | 1986-11-13 | 1988-05-28 | Mitsubishi Electric Corp | 薄膜形成装置 |
| JPH01307211A (ja) * | 1988-06-06 | 1989-12-12 | Agency Of Ind Science & Technol | 薄膜形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6338429B2 (enrdf_load_stackoverflow) | 1988-07-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4559901A (en) | Ion beam deposition apparatus | |
| US4419203A (en) | Apparatus and method for neutralizing ion beams | |
| JPH01501353A (ja) | 動電子放出装置 | |
| JP2501828B2 (ja) | 薄膜蒸着装置 | |
| JPS6184369A (ja) | イオン化装置 | |
| US7075096B2 (en) | Injection pinch discharge extreme ultraviolet source | |
| US3304718A (en) | Double optic system for ion engine | |
| JPS61157676A (ja) | イオン化機構 | |
| US4076993A (en) | Ion source for high intensity ion beam | |
| Gilleo et al. | Propulsion by composite beams of negative and positive ions | |
| JPS6365067A (ja) | 薄膜形成法 | |
| JPS63472A (ja) | 真空成膜装置 | |
| Sattler | Clusters in beams | |
| JPH05339720A (ja) | 薄膜形成装置 | |
| US3119232A (en) | Rocket engine | |
| JPS60125368A (ja) | 薄膜蒸着装置 | |
| JPH01177364A (ja) | 負イオン源 | |
| JPS6280263A (ja) | 薄膜形成装置 | |
| JPS6272110A (ja) | 薄膜形成装置 | |
| JPH089777B2 (ja) | イオンビーム発生装置および発生方法 | |
| JPS63216967A (ja) | 薄膜形成装置 | |
| JPH07116600B2 (ja) | スパッタリング装置 | |
| JPS63282257A (ja) | イオンプレ−ティング装置 | |
| JPS63179060A (ja) | 薄膜形成装置 | |
| JPS602666A (ja) | イオンクラスタ−ビ−ム蒸着装置のイオン化装置 |