JPS6183449U - - Google Patents
Info
- Publication number
- JPS6183449U JPS6183449U JP16862084U JP16862084U JPS6183449U JP S6183449 U JPS6183449 U JP S6183449U JP 16862084 U JP16862084 U JP 16862084U JP 16862084 U JP16862084 U JP 16862084U JP S6183449 U JPS6183449 U JP S6183449U
- Authority
- JP
- Japan
- Prior art keywords
- microwave
- plasma
- plasma processing
- plasma generation
- oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 claims 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16862084U JPH029895Y2 (cg-RX-API-DMAC10.html) | 1984-11-08 | 1984-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16862084U JPH029895Y2 (cg-RX-API-DMAC10.html) | 1984-11-08 | 1984-11-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6183449U true JPS6183449U (cg-RX-API-DMAC10.html) | 1986-06-02 |
| JPH029895Y2 JPH029895Y2 (cg-RX-API-DMAC10.html) | 1990-03-12 |
Family
ID=30726385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16862084U Expired JPH029895Y2 (cg-RX-API-DMAC10.html) | 1984-11-08 | 1984-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH029895Y2 (cg-RX-API-DMAC10.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021049493A (ja) * | 2019-09-25 | 2021-04-01 | 芝浦機械株式会社 | 表面処理装置 |
| WO2021060160A1 (ja) * | 2019-09-25 | 2021-04-01 | 芝浦機械株式会社 | 表面処理装置 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014026125A1 (en) | 2012-08-10 | 2014-02-13 | Incyte Corporation | Pyrazine derivatives as fgfr inhibitors |
| US9266892B2 (en) | 2012-12-19 | 2016-02-23 | Incyte Holdings Corporation | Fused pyrazoles as FGFR inhibitors |
| LT2986610T (lt) | 2013-04-19 | 2018-04-10 | Incyte Holdings Corporation | Bicikliniai heterociklai, kaip fgfr inhibitoriai |
| US9580423B2 (en) | 2015-02-20 | 2017-02-28 | Incyte Corporation | Bicyclic heterocycles as FGFR4 inhibitors |
| US11591329B2 (en) | 2019-07-09 | 2023-02-28 | Incyte Corporation | Bicyclic heterocycles as FGFR inhibitors |
| WO2021076728A1 (en) | 2019-10-16 | 2021-04-22 | Incyte Corporation | Bicyclic heterocycles as fgfr inhibitors |
-
1984
- 1984-11-08 JP JP16862084U patent/JPH029895Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021049493A (ja) * | 2019-09-25 | 2021-04-01 | 芝浦機械株式会社 | 表面処理装置 |
| WO2021060160A1 (ja) * | 2019-09-25 | 2021-04-01 | 芝浦機械株式会社 | 表面処理装置 |
| US12522912B2 (en) | 2019-09-25 | 2026-01-13 | Shibaura Machine Co., Ltd. | Surface treatment device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH029895Y2 (cg-RX-API-DMAC10.html) | 1990-03-12 |
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