JPS6183145U - - Google Patents

Info

Publication number
JPS6183145U
JPS6183145U JP16754084U JP16754084U JPS6183145U JP S6183145 U JPS6183145 U JP S6183145U JP 16754084 U JP16754084 U JP 16754084U JP 16754084 U JP16754084 U JP 16754084U JP S6183145 U JPS6183145 U JP S6183145U
Authority
JP
Japan
Prior art keywords
arm
cam
rotary cam
cam groove
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16754084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH042435Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16754084U priority Critical patent/JPH042435Y2/ja
Publication of JPS6183145U publication Critical patent/JPS6183145U/ja
Application granted granted Critical
Publication of JPH042435Y2 publication Critical patent/JPH042435Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Transmission Devices (AREA)
JP16754084U 1984-11-05 1984-11-05 Expired JPH042435Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16754084U JPH042435Y2 (de) 1984-11-05 1984-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16754084U JPH042435Y2 (de) 1984-11-05 1984-11-05

Publications (2)

Publication Number Publication Date
JPS6183145U true JPS6183145U (de) 1986-06-02
JPH042435Y2 JPH042435Y2 (de) 1992-01-28

Family

ID=30725333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16754084U Expired JPH042435Y2 (de) 1984-11-05 1984-11-05

Country Status (1)

Country Link
JP (1) JPH042435Y2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005515620A (ja) * 2002-01-15 2005-05-26 エンテグリス・インコーポレーテッド ウエハ搬送装置の扉および掛止機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005515620A (ja) * 2002-01-15 2005-05-26 エンテグリス・インコーポレーテッド ウエハ搬送装置の扉および掛止機構

Also Published As

Publication number Publication date
JPH042435Y2 (de) 1992-01-28

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