JPS6183145U - - Google Patents
Info
- Publication number
- JPS6183145U JPS6183145U JP16754084U JP16754084U JPS6183145U JP S6183145 U JPS6183145 U JP S6183145U JP 16754084 U JP16754084 U JP 16754084U JP 16754084 U JP16754084 U JP 16754084U JP S6183145 U JPS6183145 U JP S6183145U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- cam
- rotary cam
- cam groove
- rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Transmission Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16754084U JPH042435Y2 (de) | 1984-11-05 | 1984-11-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16754084U JPH042435Y2 (de) | 1984-11-05 | 1984-11-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6183145U true JPS6183145U (de) | 1986-06-02 |
JPH042435Y2 JPH042435Y2 (de) | 1992-01-28 |
Family
ID=30725333
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16754084U Expired JPH042435Y2 (de) | 1984-11-05 | 1984-11-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH042435Y2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005515620A (ja) * | 2002-01-15 | 2005-05-26 | エンテグリス・インコーポレーテッド | ウエハ搬送装置の扉および掛止機構 |
-
1984
- 1984-11-05 JP JP16754084U patent/JPH042435Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005515620A (ja) * | 2002-01-15 | 2005-05-26 | エンテグリス・インコーポレーテッド | ウエハ搬送装置の扉および掛止機構 |
Also Published As
Publication number | Publication date |
---|---|
JPH042435Y2 (de) | 1992-01-28 |
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