JPS6181082U - - Google Patents

Info

Publication number
JPS6181082U
JPS6181082U JP16396384U JP16396384U JPS6181082U JP S6181082 U JPS6181082 U JP S6181082U JP 16396384 U JP16396384 U JP 16396384U JP 16396384 U JP16396384 U JP 16396384U JP S6181082 U JPS6181082 U JP S6181082U
Authority
JP
Japan
Prior art keywords
valve
valve body
vacuum
piston rod
closing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16396384U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16396384U priority Critical patent/JPS6181082U/ja
Publication of JPS6181082U publication Critical patent/JPS6181082U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Mechanically-Actuated Valves (AREA)
  • Details Of Valves (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例の一部截断正面図、第
２図は第１図の−線截断側面図、第３図はエ
アシリンダの拡大断面図である。 １……真空排気通路、２……真空バルブ、３…
…弁体、４……本体、６……エアシリンダ、７…
…ピストンロツド、１５……制御ピストン。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空排気通路へ出没自在に設けた弁体を有する
    真空バルブに於て、該弁体を該バルブの本体に併
    設したエアシリンダのピストンロツドに連結して
    該弁体に開閉作動を行なわせ、該エアシリンダ内
    に該ピストンロツドの該弁体を閉弁する方向への
    ストロークを制限する往復動自在の制御ピストン
    を設けて成る真空バルブ開閉調整装置。
JP16396384U 1984-10-31 1984-10-31 Pending JPS6181082U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16396384U JPS6181082U (ja) 1984-10-31 1984-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16396384U JPS6181082U (ja) 1984-10-31 1984-10-31

Publications (1)

Publication Number Publication Date
JPS6181082U true JPS6181082U (ja) 1986-05-29

Family

ID=30721827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16396384U Pending JPS6181082U (ja) 1984-10-31 1984-10-31

Country Status (1)

Country Link
JP (1) JPS6181082U (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012121410A1 (ja) * 2011-03-10 2012-09-13 株式会社アルバック 仕切弁及びスライド弁
JP2012229753A (ja) * 2011-04-26 2012-11-22 Ulvac Japan Ltd スライド弁
JP2012251624A (ja) * 2011-06-03 2012-12-20 Ulvac Japan Ltd スライド弁

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56663A (en) * 1979-06-15 1981-01-07 Hitachi Ltd Random logic circuit inspecting unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56663A (en) * 1979-06-15 1981-01-07 Hitachi Ltd Random logic circuit inspecting unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012121410A1 (ja) * 2011-03-10 2012-09-13 株式会社アルバック 仕切弁及びスライド弁
JP2012229753A (ja) * 2011-04-26 2012-11-22 Ulvac Japan Ltd スライド弁
JP2012251624A (ja) * 2011-06-03 2012-12-20 Ulvac Japan Ltd スライド弁

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