JPS618003B2 - - Google Patents
Info
- Publication number
- JPS618003B2 JPS618003B2 JP20201282A JP20201282A JPS618003B2 JP S618003 B2 JPS618003 B2 JP S618003B2 JP 20201282 A JP20201282 A JP 20201282A JP 20201282 A JP20201282 A JP 20201282A JP S618003 B2 JPS618003 B2 JP S618003B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20201282A JPS5992906A (ja) | 1982-11-19 | 1982-11-19 | 窒化ケイ素の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20201282A JPS5992906A (ja) | 1982-11-19 | 1982-11-19 | 窒化ケイ素の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5992906A JPS5992906A (ja) | 1984-05-29 |
| JPS618003B2 true JPS618003B2 (Direct) | 1986-03-11 |
Family
ID=16450455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20201282A Granted JPS5992906A (ja) | 1982-11-19 | 1982-11-19 | 窒化ケイ素の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5992906A (Direct) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69401994T2 (de) * | 1993-06-11 | 1997-07-31 | Shinetsu Chemical Co | Verfahren zur Herstellung von Siliciumnitridpulver hohem Alpha-Gehalt |
| EP1294639A1 (de) * | 2000-06-17 | 2003-03-26 | Kunkel, Klaus | Verfahren zur gewinnung von siliciumnitrid |
-
1982
- 1982-11-19 JP JP20201282A patent/JPS5992906A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5992906A (ja) | 1984-05-29 |