JPS6179536U - - Google Patents
Info
- Publication number
- JPS6179536U JPS6179536U JP16528584U JP16528584U JPS6179536U JP S6179536 U JPS6179536 U JP S6179536U JP 16528584 U JP16528584 U JP 16528584U JP 16528584 U JP16528584 U JP 16528584U JP S6179536 U JPS6179536 U JP S6179536U
- Authority
- JP
- Japan
- Prior art keywords
- plating
- semiconductor wafer
- cylinder
- electrode disposed
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000000630 rising effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Electroplating Methods And Accessories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16528584U JPS6179536U (enExample) | 1984-10-30 | 1984-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16528584U JPS6179536U (enExample) | 1984-10-30 | 1984-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6179536U true JPS6179536U (enExample) | 1986-05-27 |
Family
ID=30723140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16528584U Pending JPS6179536U (enExample) | 1984-10-30 | 1984-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6179536U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001316887A (ja) * | 2000-05-08 | 2001-11-16 | Tokyo Electron Ltd | メッキ処理装置 |
-
1984
- 1984-10-30 JP JP16528584U patent/JPS6179536U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001316887A (ja) * | 2000-05-08 | 2001-11-16 | Tokyo Electron Ltd | メッキ処理装置 |