JPS6176957U

JPS6176957U -

Info

Publication number: JPS6176957U
Application number: JP16193084U
Authority: JP
Priority date: 1984-10-26
Filing date: 1984-10-26
Publication date: 1986-05-23

Description

[Brief explanation of the drawing]

第１図は本考案の第一の実施例の支持棒、固定
台を示す図であり、同図ａは回転軸に連結具を介
して取り付けた２本の支持棒を示す斜視図、同図
ｂ，ｃはそれぞれ前記支持棒の平面図及び正面図
、同図ｄは固定台の拡大斜視図、同図ｅは固定台
の拡大図（平面図、正面図、側面図）及び同図ｆ
は固定台に設けられた貫通孔に挿入するためのピ
ンを示す斜視図である。第２図ｂは、基板を第一
の実施例の支持具に載置した状態の平面図、同図
ｂは同図ａのＹ−Ｙ拡大断面図、同図ｃは同図ａ
のＸ−Ｘ拡大断面図である。第３図は従来のスプ
レー装置を示し、同図ａは全体構造、同図ｂは支
持具に基板を設置した状態の平面図及び同図ｃは
支持具の平面図である。第４図は第二の実施例を
示す図であり、同図ａは第二の実施例の固定台の
拡大斜視図、同図ｂはこの実施例の固定台の拡大
図（平面図、正面図、側面図）であり、第５図は
前記固定台を取り付けたスプレー装置を示す図で
あり、同図ａは平面図、同図ｂは同図ａのＸ−Ｘ
断面図、同図ｃは同図ａのＹ−Ｙ拡大断面図であ
る。第６図は円形の基板のときに使用される固定
台を示す拡大斜視図である。１３……チヤンバー、１４……噴出孔、１５…
…噴出液、１７，１８……支持棒、２１〜２３，
２５〜２７……穴、２４，２８……凹部、２９，
３７，３９……固定台、３０……当接部、３０ａ
……当接面、３０ｂ……当接稜、３１……載置部
、３１ａ……載置面、３２……溝、３５……ピン
、３８……一体ピン。 FIG. 1 is a diagram showing a support rod and a fixing base of the first embodiment of the present invention, and FIG. b and c are respectively a plan view and a front view of the support rod, d is an enlarged perspective view of the fixing base, e is an enlarged view (plan view, front view, side view) of the fixing base, and f is the same figure.
FIG. 2 is a perspective view showing a pin to be inserted into a through hole provided in a fixing base. FIG. 2b is a plan view of the substrate placed on the support of the first embodiment, FIG. 2b is an enlarged YY cross-sectional view of FIG. 2a, and FIG.
It is an XX enlarged sectional view of. FIG. 3 shows a conventional spray device, in which FIG. 3A is the overall structure, FIG. 3B is a plan view of a state in which a substrate is installed on a support, and FIG. FIG. 4 is a diagram showing the second embodiment; FIG. 4a is an enlarged perspective view of the fixing base of the second embodiment, and FIG. FIG. 5 is a view showing the spray device with the fixing base attached, and FIG. 5 is a plan view, and FIG.
The sectional view (c) is an enlarged YY sectional view of the figure (a). FIG. 6 is an enlarged perspective view showing a fixing base used for a circular substrate. 13...Chamber, 14...Blowout hole, 15...
...Gushing liquid, 17, 18...Support rod, 21-23,
25-27...hole, 24, 28...recess, 29,
37, 39... Fixed base, 30... Contact part, 30a
...Abutting surface, 30b...Abutting edge, 31...Placement portion, 31a...Placement surface, 32...Groove, 35...Pin, 38...Integrated pin.

Claims

[Claims for Utility Model Registration] (1) A spray device in which a substrate is installed on a support in a chamber, and a spray liquid is ejected from an ejection hole provided in the chamber toward the substrate,
The support tool is composed of two support rods that intersect with each other, and four fixing bases that contact the end surface portions of the substrate in the intersecting direction and on which the bottom surface portions near the end surfaces are placed, and the support rods and the fixing base are fitted together to form the support tool, and the support rod is further provided with a plurality of pairs of holes centered at the intersecting points according to the size of the substrate. A spray device featuring: (2) A groove is formed in the abutting portion of at least the end face portion of the substrate of the fixing base, the groove penetrating the abutting portion in substantially the same direction as the longitudinal direction of the support rod. Scope of claim for utility model registration No. 1
) The spray device described in item ).