JPS6176515U - - Google Patents

Info

Publication number
JPS6176515U
JPS6176515U JP16219184U JP16219184U JPS6176515U JP S6176515 U JPS6176515 U JP S6176515U JP 16219184 U JP16219184 U JP 16219184U JP 16219184 U JP16219184 U JP 16219184U JP S6176515 U JPS6176515 U JP S6176515U
Authority
JP
Japan
Prior art keywords
cleaning
cleaned
tank
carrier
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16219184U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0422411Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984162191U priority Critical patent/JPH0422411Y2/ja
Publication of JPS6176515U publication Critical patent/JPS6176515U/ja
Application granted granted Critical
Publication of JPH0422411Y2 publication Critical patent/JPH0422411Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP1984162191U 1984-10-26 1984-10-26 Expired JPH0422411Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984162191U JPH0422411Y2 (enExample) 1984-10-26 1984-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984162191U JPH0422411Y2 (enExample) 1984-10-26 1984-10-26

Publications (2)

Publication Number Publication Date
JPS6176515U true JPS6176515U (enExample) 1986-05-23
JPH0422411Y2 JPH0422411Y2 (enExample) 1992-05-22

Family

ID=30720079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984162191U Expired JPH0422411Y2 (enExample) 1984-10-26 1984-10-26

Country Status (1)

Country Link
JP (1) JPH0422411Y2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62154391A (ja) * 1985-12-27 1987-07-09 Hitachi Plant Eng & Constr Co Ltd デイスク群の洗浄装置
JPS62291773A (ja) * 1986-06-11 1987-12-18 Speedfam Co Ltd デイスク洗浄装置
JPH0660371A (ja) * 1992-08-05 1994-03-04 Hitachi Electron Eng Co Ltd 超音波洗浄装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106540895B (zh) * 2015-09-16 2019-06-04 泰科电子(上海)有限公司 清洗系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618734A (ja) * 1984-06-21 1986-01-16 Mitsubishi Chem Ind Ltd ワ−ク洗浄装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618734A (ja) * 1984-06-21 1986-01-16 Mitsubishi Chem Ind Ltd ワ−ク洗浄装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62154391A (ja) * 1985-12-27 1987-07-09 Hitachi Plant Eng & Constr Co Ltd デイスク群の洗浄装置
JPS62291773A (ja) * 1986-06-11 1987-12-18 Speedfam Co Ltd デイスク洗浄装置
JPH0660371A (ja) * 1992-08-05 1994-03-04 Hitachi Electron Eng Co Ltd 超音波洗浄装置

Also Published As

Publication number Publication date
JPH0422411Y2 (enExample) 1992-05-22

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