JPS6175629U

JPS6175629U -

Info

Publication number: JPS6175629U
Application number: JP15996484U
Authority: JP
Priority date: 1984-10-23
Filing date: 1984-10-23
Publication date: 1986-05-21

Description

[Brief explanation of drawings]

第１図ａは本考案の圧電振動子の平面図、同図
ｂは同断面図、第２図は従来の圧電振動子の図、
第３図ａは励振電極を形成した水晶片の断面図、
第３図ｂは従来の蒸着マスクの図、第３図ｃは同
図ｂの蒸着マスクを水晶片に被せた図、第３図ｄ
は従来の調整用金属膜を蒸着した理想的な水晶片
の図、第４図ａは従来の調整用金属膜を蒸着した
一般的な水晶片の断面図、同図ｂは同平面図、第
５図ｂは従来の調整用金属膜を蒸着した断面図、
第６図ａは励振電極を蒸着したＭＣＦの平面図、
同図ｂは同断面図、同図ｃは同図ａ，ｂのＭＣＦ
に調整用金属膜を蒸着した従来のＭＣＦの平面図
、第７図は本考案の蒸着マスクの図、第８図ａ，
ｂは本考案の蒸着マスクにより調整用金属膜を蒸
着した平面図、第９図ａは本考案の他の実施例を
示す水晶振動子の平面図、同図ｂは同断面図、第
１０図ａは本考案の他の実施例を示すＭＣＦの平
面図、同図ｂは同断面図。１２……調整用金属膜、１３……単位金属膜、
１４……孔、１５……透過部、１６……蒸着マス
ク。 FIG. 1a is a plan view of the piezoelectric vibrator of the present invention, FIG. 1b is a cross-sectional view of the same, and FIG. 2 is a diagram of a conventional piezoelectric vibrator.
Figure 3a is a cross-sectional view of a crystal piece forming an excitation electrode;
Figure 3b is a diagram of a conventional evaporation mask, Figure 3c is a diagram of the evaporation mask shown in Figure 3b placed over a crystal piece, and Figure 3d is a diagram of a conventional vapor deposition mask.
4 is a diagram of an ideal crystal blank on which a conventional adjustment metal film is deposited, FIG. Figure 5b is a cross-sectional view of a conventional adjustment metal film deposited;
Figure 6a is a plan view of the MCF with the excitation electrode deposited;
Figure b is the same sectional view, Figure c is the MCF of Figures a and b.
FIG. 7 is a plan view of a conventional MCF in which a metal film for adjustment is deposited, FIG. 7 is a diagram of the vapor deposition mask of the present invention, and FIG.
9b is a plan view of a metal film for adjustment deposited by the vapor deposition mask of the present invention; FIG. 9a is a plan view of a crystal resonator showing another embodiment of the present invention; FIG. 9b is a sectional view of the same; FIG. FIG. 3A is a plan view of an MCF showing another embodiment of the present invention, and FIG. 3B is a sectional view thereof. 12...Adjustment metal film, 13...Unit metal film,
14...hole, 15...transmission part, 16...evaporation mask.

補正昭６０．３．２２図面の簡単な説明を次のように補正する。明細書中第１１頁第７行目の「第５図ｂは」を
「第５図は」に訂正する。Amendment March 22, 1980 The brief description of the drawing is amended as follows. "Fig. 5 b" on page 11, line 7 of the specification is corrected to "Fig. 5 b".

Claims

[Scope of utility model registration request]

a piezoelectric plate on which thickness-based vibrations are excited; an excitation electrode formed on both main plate surfaces in an area smaller than the plate surface diameter of the piezoelectric plate; and an excitation electrode formed on at least one main plate surface side of the piezoelectric plate. A piezoelectric vibrator characterized by comprising: a metal film for frequency adjustment, which is mainly vapor-deposited at multiple locations.