JPS617556A - 二次イオン質量分析計 - Google Patents

二次イオン質量分析計

Info

Publication number
JPS617556A
JPS617556A JP60115303A JP11530385A JPS617556A JP S617556 A JPS617556 A JP S617556A JP 60115303 A JP60115303 A JP 60115303A JP 11530385 A JP11530385 A JP 11530385A JP S617556 A JPS617556 A JP S617556A
Authority
JP
Japan
Prior art keywords
mass spectrometer
secondary ion
ion
ions
ion mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60115303A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0351253B2 (enrdf_load_stackoverflow
Inventor
Hideki Kanbara
秀記 神原
Hiroshi Hirose
広瀬　博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60115303A priority Critical patent/JPS617556A/ja
Publication of JPS617556A publication Critical patent/JPS617556A/ja
Publication of JPH0351253B2 publication Critical patent/JPH0351253B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP60115303A 1985-05-30 1985-05-30 二次イオン質量分析計 Granted JPS617556A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60115303A JPS617556A (ja) 1985-05-30 1985-05-30 二次イオン質量分析計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60115303A JPS617556A (ja) 1985-05-30 1985-05-30 二次イオン質量分析計

Publications (2)

Publication Number Publication Date
JPS617556A true JPS617556A (ja) 1986-01-14
JPH0351253B2 JPH0351253B2 (enrdf_load_stackoverflow) 1991-08-06

Family

ID=14659289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60115303A Granted JPS617556A (ja) 1985-05-30 1985-05-30 二次イオン質量分析計

Country Status (1)

Country Link
JP (1) JPS617556A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987001452A1 (fr) * 1985-08-29 1987-03-12 Hitachi, Ltd. Spectroscope de masse
JPH01255146A (ja) * 1988-04-02 1989-10-12 Kokuritsu Kogai Kenkyusho 高圧質量分析法のためのイオン化方法及び装置
JPH01255147A (ja) * 1988-04-02 1989-10-12 Kokuritsu Kogai Kenkyusho 高圧質量分析法のためのイオン化法
WO2007139425A1 (fr) * 2006-05-29 2007-12-06 Blashenkov Nikolai Mikhailovic Ioniseur à bande d'une source d'ions d'un spectromètre en masse

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364089A (en) * 1976-11-19 1978-06-08 Hitachi Ltd Solid ion source

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364089A (en) * 1976-11-19 1978-06-08 Hitachi Ltd Solid ion source

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987001452A1 (fr) * 1985-08-29 1987-03-12 Hitachi, Ltd. Spectroscope de masse
JPH01255146A (ja) * 1988-04-02 1989-10-12 Kokuritsu Kogai Kenkyusho 高圧質量分析法のためのイオン化方法及び装置
JPH01255147A (ja) * 1988-04-02 1989-10-12 Kokuritsu Kogai Kenkyusho 高圧質量分析法のためのイオン化法
WO2007139425A1 (fr) * 2006-05-29 2007-12-06 Blashenkov Nikolai Mikhailovic Ioniseur à bande d'une source d'ions d'un spectromètre en masse

Also Published As

Publication number Publication date
JPH0351253B2 (enrdf_load_stackoverflow) 1991-08-06

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