JPS6173670U - - Google Patents
Info
- Publication number
- JPS6173670U JPS6173670U JP15547184U JP15547184U JPS6173670U JP S6173670 U JPS6173670 U JP S6173670U JP 15547184 U JP15547184 U JP 15547184U JP 15547184 U JP15547184 U JP 15547184U JP S6173670 U JPS6173670 U JP S6173670U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- tubular body
- reaction
- semiconductor substrate
- rolling elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012495 reaction gas Substances 0.000 claims 2
- 238000005096 rolling process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15547184U JPH0220213Y2 (is) | 1984-10-15 | 1984-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15547184U JPH0220213Y2 (is) | 1984-10-15 | 1984-10-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6173670U true JPS6173670U (is) | 1986-05-19 |
| JPH0220213Y2 JPH0220213Y2 (is) | 1990-06-01 |
Family
ID=30713482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15547184U Expired JPH0220213Y2 (is) | 1984-10-15 | 1984-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220213Y2 (is) |
-
1984
- 1984-10-15 JP JP15547184U patent/JPH0220213Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0220213Y2 (is) | 1990-06-01 |