JPS63193830U - - Google Patents
Info
- Publication number
- JPS63193830U JPS63193830U JP8320087U JP8320087U JPS63193830U JP S63193830 U JPS63193830 U JP S63193830U JP 8320087 U JP8320087 U JP 8320087U JP 8320087 U JP8320087 U JP 8320087U JP S63193830 U JPS63193830 U JP S63193830U
- Authority
- JP
- Japan
- Prior art keywords
- container
- susceptor
- vapor phase
- phase growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001947 vapour-phase growth Methods 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8320087U JPH0614476Y2 (ja) | 1987-06-01 | 1987-06-01 | 気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8320087U JPH0614476Y2 (ja) | 1987-06-01 | 1987-06-01 | 気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63193830U true JPS63193830U (is) | 1988-12-14 |
| JPH0614476Y2 JPH0614476Y2 (ja) | 1994-04-13 |
Family
ID=30936569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8320087U Expired - Lifetime JPH0614476Y2 (ja) | 1987-06-01 | 1987-06-01 | 気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0614476Y2 (is) |
-
1987
- 1987-06-01 JP JP8320087U patent/JPH0614476Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0614476Y2 (ja) | 1994-04-13 |