JPS6173012U - - Google Patents

Info

Publication number
JPS6173012U
JPS6173012U JP15786684U JP15786684U JPS6173012U JP S6173012 U JPS6173012 U JP S6173012U JP 15786684 U JP15786684 U JP 15786684U JP 15786684 U JP15786684 U JP 15786684U JP S6173012 U JPS6173012 U JP S6173012U
Authority
JP
Japan
Prior art keywords
exhaust gas
seal
inorganic material
purification device
gas purification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15786684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH029056Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15786684U priority Critical patent/JPH029056Y2/ja
Publication of JPS6173012U publication Critical patent/JPS6173012U/ja
Application granted granted Critical
Publication of JPH029056Y2 publication Critical patent/JPH029056Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exhaust Gas After Treatment (AREA)
JP15786684U 1984-10-18 1984-10-18 Expired JPH029056Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15786684U JPH029056Y2 (ko) 1984-10-18 1984-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15786684U JPH029056Y2 (ko) 1984-10-18 1984-10-18

Publications (2)

Publication Number Publication Date
JPS6173012U true JPS6173012U (ko) 1986-05-17
JPH029056Y2 JPH029056Y2 (ko) 1990-03-06

Family

ID=30715856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15786684U Expired JPH029056Y2 (ko) 1984-10-18 1984-10-18

Country Status (1)

Country Link
JP (1) JPH029056Y2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01236814A (ja) * 1988-03-17 1989-09-21 Tokyo Electron Ltd 位相比較方式

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01236814A (ja) * 1988-03-17 1989-09-21 Tokyo Electron Ltd 位相比較方式

Also Published As

Publication number Publication date
JPH029056Y2 (ko) 1990-03-06

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