JPS6170447A - Gas detecting element - Google Patents

Gas detecting element

Info

Publication number
JPS6170447A
JPS6170447A JP19210484A JP19210484A JPS6170447A JP S6170447 A JPS6170447 A JP S6170447A JP 19210484 A JP19210484 A JP 19210484A JP 19210484 A JP19210484 A JP 19210484A JP S6170447 A JPS6170447 A JP S6170447A
Authority
JP
Japan
Prior art keywords
gas
sensitivity
change
detecting element
gas detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19210484A
Other languages
Japanese (ja)
Inventor
Toru Nobetani
延谷 徹
Shigekazu Kusanagi
草薙 繁量
Toru Fujioka
藤岡 透
Kazuhisa Fujii
和久 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP19210484A priority Critical patent/JPS6170447A/en
Publication of JPS6170447A publication Critical patent/JPS6170447A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To obviate the change in the sensitivity of a gas detecting element of a metallic oxide semiconductor, etc. with time by aging the gas detecting element in an atmosphere of sulfide. CONSTITUTION:The metallic oxide semiconductor such as SnO2 or Fe2O3 or the catalyst element deposited with Pd, Pt, etc. on a carrier such as Al2O3 is used as the gas detecting element. Such gas detecting element is poisoned by the sulfide SO2, (CH3)2S, etc. and the sensitivity thereof decreases in an initial period but the sensitivity does not change with time thereafter. The gas detecting element is thereupon aged and poisoned in the atmosphere of the sulfide such as SO2 and (CH3)2S. The resulted gas detecting element is subjected to the initial change with time where the change is significant to decrease the subsequent change with time and therefore the element is capable of detecting LPG and city gas, etc. with good accuracy.

Description

【発明の詳細な説明】 [技術分野] 本発明はが人検知素子、主として金属酸化物半導体を用
いるか、もしくは燃焼触媒を担持して構rIi、された
ガス検知素子に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a human detection element, and a gas detection element mainly using a metal oxide semiconductor or supporting a combustion catalyst.

[背景技術1 一般にこの種のガス検知素子としては、51102、F
e、O,、ZnO等の金属酸化物半導体を用いた半導本
素子と、A I 20 h、S i 02 等(’) 
担体ニP d、 PL等の燃焼触媒を担持した触媒燃焼
素子とか提供さ汽ている。半導体素子は可燃性ガスが素
子のガス検知面に吸着されることにより、素子の導電性
が変化する特性を利用してガスの検知を行なうらのであ
り、また触媒燃焼素子はlIf燃性〃入が素子に接触し
て燃焼したときに素子温度が変化することにより素子の
導電性が変化することを利用してガスの検出を行なって
いるものである。これらのガス検知素子の検知対象とな
るが又は主としてLPG(主成分はプロパン、メタン)
と都市ガス(主成分は水素、メタン、−酸化炭素)であ
るか、上述のように可燃性がスの吸着、あるいは燃焼に
よって可燃性ガスの存在を検出するものであるから、検
知対象となる可燃性ガス以外の可燃性〃又や有機溶媒な
どの揮発ガスにもよく感応し、ガス漏れ警報器に上記素
子を使用した場合に誤報を生しることがある。特に、厨
房において調理を行なう際には、肉、魚、野菜、調味料
、食用油等から一時的にアルコールや煙が多量に発生し
、これらの気体によって誤報を生じることがある。また
、地下の食堂街のように、調理量や調理時間が一般家庭
に比べて通かに多く、かつ換気の悪い場所では、調理時
に誤報が生じるのは勿論、検知素子の感度が経時的に変
化し、誤報が生じ易くなったり、瞥報を送出すべきとき
に警報が出力されなかったりする。例乏ば、半導体素子
においてはガス分子の吸着によってガスの検出を行なう
ものであるから、ガス分子に長く接触しているとガス分
子が吸着され、次第に感度が高くなり誤報を生じ易くな
るのであり、一方触媒燃焼素子においては表面の汚染に
よって経時的に触媒としての機能が低下し、主としてメ
タンに対する感度が低下し、ガス漏れ時に警報が出力さ
れないことがある。
[Background technology 1 Generally, this type of gas detection element includes 51102, F
Semiconductor devices using metal oxide semiconductors such as e, O, ZnO, etc., and A I 20 h, S i 02 etc. (')
Catalytic combustion elements having a combustion catalyst supported on a carrier such as Pd or PL are available. Semiconductor elements detect gas by utilizing the property that the conductivity of the element changes when combustible gas is adsorbed on the gas detection surface of the element, and catalytic combustion elements detect lIf flammability. Gas is detected by utilizing the fact that when gas comes into contact with the element and burns, the temperature of the element changes and the conductivity of the element changes. The detection target of these gas detection elements is mainly LPG (main components are propane and methane).
and city gas (main components are hydrogen, methane, and carbon oxides), or as mentioned above, the presence of flammable gas is detected by adsorption or combustion of flammable gas, so it is a detection target. It is sensitive to volatile gases such as combustible gases and organic solvents other than combustible gases, and may cause false alarms when the above-mentioned element is used in a gas leak alarm. In particular, when cooking in a kitchen, large amounts of alcohol and smoke are temporarily generated from meat, fish, vegetables, seasonings, cooking oil, etc., and these gases can sometimes cause false alarms. In addition, in places such as underground cafeterias, where the amount of cooking and cooking time is higher than in a typical home, and where ventilation is poor, false alarms may occur during cooking, and the sensitivity of the detection element may deteriorate over time. As a result, false alarms are more likely to occur, or warnings may not be output when they should be sent. For example, in semiconductor devices, gas is detected by adsorption of gas molecules, so if the device is in contact with gas molecules for a long time, the gas molecules will be adsorbed, and the sensitivity will gradually increase, making false alarms more likely. On the other hand, in a catalytic combustion element, its function as a catalyst deteriorates over time due to surface contamination, and its sensitivity mainly to methane decreases, so that an alarm may not be output in the event of a gas leak.

このように検知素子に経時的変化をもたらす原因につい
ては種々検討されているが、今までに明らかにはされて
いないものであった。したがって、従来は検知対象とな
る気体を選択し、不要な気体に対して感応しないように
するために、検知素子のガス検知面を選択フィルタで覆
い、これにより検知対象となる気体のみが検知素子のガ
ス検知面に接触するようにしたものがある。こうした選
択フィルタは不要な気体を吸着する吸着型フィルタと、
不要な気体を触媒によって燃焼させる燃焼型フィルタと
が知られており、吸着型フィルタとしてはゼオライト、
珪藻土、ンリカデノ呟活性アルミナ、活性炭等が用いら
れ、また燃焼型フィルタとしては白金、パラノユーム、
ロノエームのような燃焼触媒か担持されたものがある。
Although various studies have been conducted on the causes of such changes over time in the sensing element, the causes have not been clarified until now. Therefore, in the past, in order to select the gas to be detected and avoid sensitivity to unnecessary gases, the gas detection surface of the sensing element was covered with a selective filter, which allowed only the gas to be detected to pass through the sensing element. There is one that comes into contact with the gas detection surface of the sensor. These selective filters are adsorption filters that adsorb unnecessary gases,
Combustion-type filters that burn unnecessary gases using catalysts are known, and adsorption-type filters include zeolite,
Diatomaceous earth, activated alumina, activated carbon, etc. are used, and as combustion type filters, platinum, paranoyum,
There are supported combustion catalysts such as Ronoame.

しかしながら、ガス検知素子に感度の経時的変化をもた
らす原因については、年までに明らかにされていないも
のであったから、こうした選択フィルタを一時的に発生
するアルコールや煙をVA去するよう1こは設定できる
ものの、経時的な感度の変化に対してその原因となる成
分の除去をするようには設定できず、経時的変化を免れ
ることができながっjこ。
However, since the cause of the change in sensitivity of gas detection elements over time had not been clarified until 2007, it was necessary to use these selective filters to remove temporarily generated alcohol and smoke from the VA. Although it can be set, it cannot be set to remove components that cause changes in sensitivity over time, making it impossible to avoid changes over time.

[発明の目的1 本発明は上述の点に鑑みて為されrこちのであって、そ
の主な目的とするところは、経時的な感度の変化を防止
したガス検知素子を提供することにある。
[Objective of the Invention 1] The present invention has been made in view of the above-mentioned points, and its main object is to provide a gas sensing element that prevents changes in sensitivity over time.

[発明の開示1 本発明においては、硫化物による感度変化がなくなるま
で硫化物の雰囲気中でエーノングしたことにより、予め
経時変化をさせて、その後の使用における経時変化を少
なくしたガス検知素子が開示される。
[Disclosure of the Invention 1 The present invention discloses a gas sensing element that has been subjected to aeoning in a sulfide atmosphere until there is no change in sensitivity due to sulfide, thereby allowing the element to change over time in advance, thereby reducing the change over time during subsequent use. be done.

まず、従来不明であった経時変化の原因を把握すること
が必要であるから、本発明者等は地下食堂街における〃
大成分の分析を行なうとともに、各ガスが検知素子に対
して経時変化を引き起こすかどうかについて実験を行な
った。その結果、経時変化の第1位の原因がSO2であ
り、第2位の原因が(CH,)、Sであるという知見が
得られた。
First, it is necessary to understand the causes of changes over time, which were previously unknown.
In addition to analyzing the major components, we also conducted experiments to determine whether each gas causes changes in the sensing element over time. As a result, it was found that the primary cause of change over time was SO2, and the secondary causes were (CH,) and S.

次に、これらの硫化物(SO2+(CH,)2S)を混
合した雰囲気中において、検知素子を放置(以下vL@
エーノングと呼称する)したところ、初期1こおいて経
時変化が着しいが、被毒エージングを短期間行なった後
の検知素子においては、以後殆ど経時変化がないことが
判明した。
Next, the sensing element was left in an atmosphere containing a mixture of these sulfides (SO2+(CH,)2S) (hereinafter vL@
(referred to as Ehnong), it was found that although there was a slight change over time in the initial period, there was almost no change over time in the sensing element after a short period of poison aging.

上述の実験に基づいて各種条件下で被毒エージングを行
なった実施例を以下に詳述する。なお、以下の実施例に
おいてはガス検知素子として松下電子部品(株)製の都
市ガス用半導体素子を使用した。まrこ経時的な感度の
変化があったかどうかについては以下の測定法によって
測定しrこ。
Examples in which poison aging was performed under various conditions based on the above experiments will be described in detail below. In the following examples, a city gas semiconductor element manufactured by Matsushita Electronic Components Co., Ltd. was used as a gas detection element. The following measurement method was used to determine whether there was a change in sensitivity over time.

(測定法) ガス検知素子について、DP13°Cの精製空気中でメ
タンと水素とに対する感度を測定した後、容H2(1の
がラスチャンバー内に収納して通電し、SO2と(CH
,)2Sとがともにlpp…の濃度となるように1日1
回の割合でガラスチャ/バー内にがスを入れ、これを毎
日繰り返す、、1週間後にD’P13°Cの精製空気中
で再度メタンと水素とに対する感度測定を行なう。この
上うにして1週間毎に感度測定を行ない、これを3週間
続けた。
(Measurement method) After measuring the sensitivity of the gas detection element to methane and hydrogen in purified air at a DP of 13°C, the gas detection element was housed in a lath chamber and energized to detect SO2 and (CH
,) 1 a day so that both 2S and 2S have a concentration of lpp...
Gas was poured into the glass chamber/bar at a rate of 1.5 times, and this was repeated every day.One week later, the sensitivity to methane and hydrogen was measured again in purified air at a D'P of 13°C. In this way, sensitivity measurements were carried out every week, and this continued for three weeks.

(実施例1) 通常の空気雰囲気中で4日間の通電を行ない、その後S
O,と(CH,)、Sとがともに10ppmの濃度であ
る雰囲気を形成した120.のガラスチャンバー内にお
いて3日間の被毒エージングを行なった。
(Example 1) Electricity was applied for 4 days in a normal air atmosphere, and then S
120. An atmosphere was formed in which O, (CH,), and S each had a concentration of 10 ppm. Poison aging was performed for 3 days in a glass chamber.

このガス検知素子を上述の測定法−二よって経時的な感
度の変化を測定したところ、第1図に示すように、殆ど
経時的変化がないという結果が得られな。ここで文線は
空気に対する抵抗III、破線はツタ/に対する抵抗値
、一点鎖線は水素ガスに対する抵抗値を示す。主た、1
回の測定について3点プロ、トシであるのは、それぞれ
上からガスの濃度を500 ppm、I S 00pp
+o、  4500ppI11とした状態を示している
。以下の図においてら同様の表記をした。
When the sensitivity change over time of this gas detection element was measured using the above-mentioned measurement method-2, as shown in FIG. 1, the result was that there was almost no change over time. Here, the open line shows resistance III to air, the broken line shows resistance to ivy, and the one-dot chain line shows resistance to hydrogen gas. Lord, 1
Regarding the measurement, the three points are 500 ppm and 100 ppm, respectively, from the top.
+o, 4500 ppI11 is shown. Similar notations are used in the figures below.

(実施例2) 通常の空気雰囲気中で4日間の通電を行ない、その後S
O2と(c Hx ) 2 Sとがともに51)pmノ
濃度である雰囲×を形成した12αのがラスチャンバー
内において3日間の被毒エーiングを行なった。
(Example 2) Electricity was applied for 4 days in a normal air atmosphere, and then S
Poisoning was carried out for 3 days in a 12α gas chamber in which an atmosphere was formed in which O2 and (c Hx ) 2 S were both at a concentration of 51) pm.

本実施例においても、第2図に示すように、経時的な感
度の変化が殆ど認められなかった。
Also in this example, as shown in FIG. 2, almost no change in sensitivity over time was observed.

(実施例3) S02と(C)I、)2Sとがとらi二10ppmのl
rA度である雰囲気中で1日間の被毒エーiングを行な
った。
(Example 3) S02 and (C)I,)2S and 10 ppm of
Poisoning aging was carried out for one day in an atmosphere of rA degree.

本実施例においてら、第3図に示すように経時j   
        的な感度変化は殆どなかった。
In this example, as shown in FIG.
There was almost no change in sensitivity.

(比較例1) 実施例に対する比較のため、通常の空気雰囲気中で4日
間の通電を行ない、その後SO,のみの濃度10ppm
の雰囲気中で3日間の被毒エーiングを行なった。
(Comparative Example 1) For comparison with the example, electricity was applied for 4 days in a normal air atmosphere, and then the concentration of only SO was 10 ppm.
Poisoning was carried out for 3 days in an atmosphere of

測定の結果、tA4図に示すように、援やかな経時的な
感度の変化が認められた。これは、(C1−1,>28
についての被毒エーiングを行なわなかったことが原因
であると考えられる。
As a result of the measurement, as shown in the tA4 diagram, a slight change in sensitivity over time was observed. This is (C1-1,>28
This is thought to be due to the fact that no poisoning treatment was carried out.

(比較例2) さらに比較例2として被毒エーiングを全く行なわずに
、測定をおこなっrこところ、第5図に示すように、経
時的に太き(感度が変化することが認められた。
(Comparative Example 2) Furthermore, as Comparative Example 2, measurements were performed without any poisoning aging, and as shown in Figure 5, it was observed that the thickness (change in sensitivity was observed) Ta.

以上の結果から明らかなように、2%体(So、、(C
H,)2S)の両方について被毒エーiングを行なった
検知素子はその後、経時な感度の変化が殆どなく、これ
によって経時的な感度変化が防止できるという結論が得
られた。
As is clear from the above results, 2% bodies (So, (C
The detection element subjected to poisoning aging for both H, )2S) shows almost no change in sensitivity over time, and it was concluded that this can prevent changes in sensitivity over time.

[発明の効果1 本発明は上述のように、硫化物による感度変化がなくな
るまで硫化物の雰12Il×中でエーiングしtこので
、変化の茗しい初期の経時変化を終了させて、その後の
経時変化を防止できるしのであり、その結果、経時的に
感度の安定しtこガス検知素子が得られるという利点を
有するものである。したがって、この〃人検知素子を(
重用したガス検知器は誤報を生じることがなく、長期に
亘って安定して1史用できるらのである。
[Effect of the Invention 1] As described above, the present invention performs aging in a sulfide atmosphere until the sensitivity change due to sulfide disappears, thereby ending the slow initial change over time. This has the advantage that subsequent changes over time can be prevented, and as a result, a gas detection element with stable sensitivity over time can be obtained. Therefore, this human detection element (
Gas detectors that are heavily used do not generate false alarms and can be used stably for a long period of time.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図ないし第3図はそれぞれ本発明の実施例1ないし
実施例3の測定結果を示す動作説明図、第4図は比較例
1の測定結果を示す動作説明図、第5図は比較例2の測
定結果を示す動作説明図である。 代理人 弁理士 石 1)長 七 111図1r2rIJ J+寺間(日)                  
   B令聞(日)第3図       s4図 *NI(B)        M間CB)第5図 手続補正書(自発) 昭和59年 12月27日 昭和59年特許願第1 ’72104号2、発 明 の
名称 ガス検知素子 3、補正をする者 事件との関係      特許出願人 性  所  大阪府門真市大字門真1048番地名 称
 (583)松下電工株式会社 代表者小 林  郁 4、代理人
1 to 3 are operation explanatory diagrams showing the measurement results of Examples 1 to 3 of the present invention, respectively. FIG. 4 is an operation explanatory diagram showing the measurement results of Comparative Example 1. FIG. 5 is an operation explanatory diagram showing the measurement results of Comparative Example 1. FIG. 2 is an operation explanatory diagram showing measurement results of No. 2; Agent Patent Attorney Ishi 1) Long 7111 Figure 1r2rIJ J+Terama (Japanese)
B (Japanese) Figure 3 Figure s4 *NI (B) M CB) Figure 5 Procedural amendment (voluntary) December 27, 1981 Patent Application No. 1 '72104 2, Invention Name of Gas Detection Element 3, Relationship with the person making the amendment Patent applicant Location 1048 Oaza Kadoma, Kadoma City, Osaka Name Name (583) Matsushita Electric Works Co., Ltd. Representative Iku Kobayashi 4, Agent

Claims (1)

【特許請求の範囲】[Claims] (1)硫化物による感度変化がなくなるまで硫化物の雰
囲気中でエージングして成ることを特徴とするガス検知
素子。
(1) A gas detection element characterized in that it is aged in a sulfide atmosphere until sensitivity changes due to sulfides disappear.
JP19210484A 1984-09-13 1984-09-13 Gas detecting element Pending JPS6170447A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19210484A JPS6170447A (en) 1984-09-13 1984-09-13 Gas detecting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19210484A JPS6170447A (en) 1984-09-13 1984-09-13 Gas detecting element

Publications (1)

Publication Number Publication Date
JPS6170447A true JPS6170447A (en) 1986-04-11

Family

ID=16285720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19210484A Pending JPS6170447A (en) 1984-09-13 1984-09-13 Gas detecting element

Country Status (1)

Country Link
JP (1) JPS6170447A (en)

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