JPS6082953A - Carbon monoxide sensing element - Google Patents

Carbon monoxide sensing element

Info

Publication number
JPS6082953A
JPS6082953A JP19089683A JP19089683A JPS6082953A JP S6082953 A JPS6082953 A JP S6082953A JP 19089683 A JP19089683 A JP 19089683A JP 19089683 A JP19089683 A JP 19089683A JP S6082953 A JPS6082953 A JP S6082953A
Authority
JP
Japan
Prior art keywords
gas
oxide
electrode
sensitivity
carbon monoxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19089683A
Other languages
Japanese (ja)
Inventor
Hideo Arima
有馬 英夫
Masami Kaneyasu
昌美 兼安
Shinji Suzuki
伸次 鈴木
Akira Ikegami
昭 池上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP19089683A priority Critical patent/JPS6082953A/en
Publication of JPS6082953A publication Critical patent/JPS6082953A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Abstract

PURPOSE:To improve sensitivity for carbon monoxide of a gas sensing element comprising a metal oxide semiconductor inserted between upper and lower two electrodes by using ruthenium oxide for the electrode material. CONSTITUTION:A lower electrode 3 is printed on the surface of an alumina substrate 2 with ruthenium oxide paste which is calcined to complete the lower electrode 3. A gas sensing layer 4 comprising a metal oxide semiconductor is formed on the electrode 3, further, an upper electrode 5 is formed with the same paste to prepare thus a gas sensing element. The gas sensing element prepd. by this process has improved sensitivity for gaseous CO, but low sensitivity for gaseous hydrogen, and ethanol vapor.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、−酸化炭素の感度特性を向上した、−酸化炭
素ガス検出素子に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a -carbon oxide gas detection element with improved sensitivity characteristics for -carbon oxide.

〔発明の背景〕[Background of the invention]

一酸化炭素ガス検出素子は、ホテル等の火災警報とか一
般家庭等の一酸化炭素中毒防止警報などに使用される。
Carbon monoxide gas detection elements are used for fire alarms in hotels, etc., carbon monoxide poisoning prevention alarms in general homes, etc.

これら警報に使用される一酸化炭素ガス検出素子は、他
のガスによる外乱がなく、−酸化炭素ガスのみに感知し
、誤警報がないのが必要である。
The carbon monoxide gas detection element used for these alarms must be able to detect only -carbon oxide gas without being disturbed by other gases, and must not cause false alarms.

他えば、他のガスの外乱によって誤警報が置型なると、
これが慣習となって実除に一酸化炭素ガスが発生してい
て警報がでていても気にも止めず、大事故に至ることに
なる。
On the other hand, if a false alarm is caused by other gas disturbances,
This has become a common practice, and even when carbon monoxide gas is being generated and a warning is issued, people do not pay attention to it, leading to a major accident.

従来の一酸化炭素ガス検出素子としては、白金電極を使
用した酸化スズ(SaO2)セラミックス焼結体が主に
用いられてきた。
As a conventional carbon monoxide gas detection element, a tin oxide (SaO2) ceramic sintered body using a platinum electrode has been mainly used.

この−酸化炭素ガス検出素子において、これまでに−酸
化炭素のみに高感度を示す各種の添加剤が検討されてき
たが、−酸化炭素ガスよりも水素ガスやエタノールガス
に対する感度の方が高くて誤警報が免れず、−酸化炭素
ガスに対し高感度を示す検出素子の開発を急がれている
のが実情である。
For this carbon oxide gas detection element, various additives that are highly sensitive only to carbon oxide have been studied, but the sensitivity to hydrogen gas and ethanol gas is higher than to carbon oxide gas. The reality is that false alarms are inevitable, and there is an urgent need to develop a detection element that is highly sensitive to carbon oxide gas.

〔発明の目的〕[Purpose of the invention]

本発明は、上記実情に鑑みてなされたものであp、−酸
化炭素ガスに対して高感度を示す一酸化炭素ガス検出素
子を提供せんとするものである。
The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a carbon monoxide gas detection element that exhibits high sensitivity to p, -carbon oxide gas.

〔発明の概要〕[Summary of the invention]

即ち本発明は、上部電極と下部電極に酸化ルテニウムを
使用することによシ、−酸化炭素ガスに対する感度を向
上し、一方において水素ガスとエタノールガスに対する
感度を大巾に減少させたことを特徴とする。
That is, the present invention is characterized in that by using ruthenium oxide for the upper electrode and the lower electrode, the sensitivity to carbon oxide gas is improved, while the sensitivity to hydrogen gas and ethanol gas is greatly reduced. shall be.

〔発明の実施例〕[Embodiments of the invention]

以下本発明の一実施例について詳細に説明する。 An embodiment of the present invention will be described in detail below.

先ず、発明者らは、−酸化炭素ガスの感度を向上させる
ために、各種の酸化物牛導体材料、添加剤。
First, the inventors developed various oxide conductor materials and additives to improve the sensitivity of carbon oxide gas.

及び電極材料について検討した。and electrode materials were investigated.

その結果、電極材料に酸化ルテニウムを使用したところ
、−酸化炭素ガスに対する感度が向上し、且つ水素ガス
とエタノールガスに対する感度が大巾に減少することを
見い出した。
As a result, it was found that when ruthenium oxide was used as an electrode material, the sensitivity to -carbon oxide gas was improved, and the sensitivity to hydrogen gas and ethanol gas was significantly reduced.

又この電極材料の効果を最大限生かすためには、ガスが
電極に接触しやすいサンドインチ構造が最適であること
も見い出した。
We have also discovered that in order to make the most of the effects of this electrode material, a sandwich structure is optimal because it allows gas to easily come into contact with the electrode.

更に、酸化物半導体としては、酸化スズ(Sn02)。Furthermore, the oxide semiconductor is tin oxide (Sn02).

酸化タングステン(wo、) 、 酸化クロム(Cr2
0う)。
Tungsten oxide (WO,), chromium oxide (Cr2
0).

酸化亜鉛(ZnO) 、酸化インジウム(In20う)
の場合に、酸化ルテニウムを電極に用いた上記効果が高
いことを見い出した。
Zinc oxide (ZnO), indium oxide (In20)
It has been found that the above-mentioned effects of using ruthenium oxide as an electrode are high in this case.

以下一実施例を示し、その詳細を説明する。An example will be shown below and its details will be explained.

試験用素子として、従来の白金電極を用いた素子と、本
実施例の酸化ルテニウムを用いた電極の二種類を作成し
比較した。
Two types of test elements were prepared and compared: an element using a conventional platinum electrode and an electrode using ruthenium oxide of this example.

この素子は、−辺5咽の正方形のアルミナ基板を用いて
、図に示すように、サンドインチ状に作った。その作成
要領は次の通pである。
This element was made in the shape of a sandwich, as shown in the figure, using a square alumina substrate with -5 sides. The procedure for creating it is as follows.

先ず、アルミナ基板2の裏面に、白金ペーストを用いて
ジグザグ状の白金ヒータ1を印刷する。
First, a zigzag-shaped platinum heater 1 is printed on the back surface of an alumina substrate 2 using platinum paste.

これを乾燥後、電気ヒータを用いて1200℃2時間で
、ヒータを焼付けた。
After drying this, the heater was baked at 1200° C. for 2 hours using an electric heater.

次にアルミナ基板2の表面に、白金ペースト又は酸化ル
テニウムペーストを用いて下部電極3を印刷し、これを
乾燥後、ベルト炉を用いて最高900℃で10分間保持
し、下部電極3を焼付けた。
Next, a lower electrode 3 was printed on the surface of the alumina substrate 2 using platinum paste or ruthenium oxide paste, and after drying, it was held at a maximum of 900° C. for 10 minutes using a belt furnace to bake the lower electrode 3. .

この下部電極3の上に、所定の酸化物半導体粉末に、ホ
ウケイ酸亜鉛系のバインダガラスを10%wtチ添加し
たペーストを用いて、感ガス層4を印刷した。この感ガ
ス層4を乾燥後、その上に下部電極3と同一のペースト
を用いて、上部電極5を印刷し、乾燥後ベルト炉を用い
て最高900℃で10分間保持して素子を作った。
On this lower electrode 3, a gas-sensitive layer 4 was printed using a paste prepared by adding 10% wt of zinc borosilicate binder glass to a predetermined oxide semiconductor powder. After drying this gas-sensitive layer 4, an upper electrode 5 was printed on it using the same paste as the lower electrode 3, and after drying, it was held at a maximum temperature of 900° C. for 10 minutes using a belt furnace to produce an element. .

このようにして、白金電極と酸化ルテニウム電極を有す
る二種類の素子についてその特性を測定し、その結果を
表−1にまとめた。
In this way, the characteristics of two types of elements having platinum electrodes and ruthenium oxide electrodes were measured, and the results are summarized in Table-1.

素子温度は400℃とした。ガス濃度は、それぞれ10
00 ppmである。感度とは、ガスに接触する直前の
素子の抵抗値を、ガス接触後の素子の抵抗値で除した値
である。表−1より、酸化物半導体Cr203(A5 
、6 )以外のものに対して、白金(pt)電極とルテ
ニウム(Ru02)電極との比較において、ルテニウム
電極の方が、−酸化炭素ガスに対して感度が向上し、水
素ガス及びエタノールガスに対しては大巾に減少してい
ることが解る。
The element temperature was 400°C. The gas concentration is 10
00 ppm. Sensitivity is the value obtained by dividing the resistance value of the element immediately before contact with gas by the resistance value of the element after contact with gas. From Table-1, oxide semiconductor Cr203 (A5
, 6), when comparing a platinum (pt) electrode and a ruthenium (Ru02) electrode, the ruthenium electrode has better sensitivity to -carbon oxide gas and better sensitivity to hydrogen gas and ethanol gas. It can be seen that there has been a significant decrease in contrast.

例えば、酸化物半導体SnSn02(、2)についてみ
ると、水素ガスに対しては2.4分の1に、又エタノー
ルガスに対しては7.7分の1に減少している。
For example, when looking at the oxide semiconductor SnSn02 (, 2), it is reduced to 1/2.4 for hydrogen gas and 1/7.7 for ethanol gas.

又表−1から明らかな通シ、酸化物半導体の種類によっ
て、ルテニウム電極の感度特性に影響することが解る。
Furthermore, it is clear from Table 1 that the sensitivity characteristics of the ruthenium electrode are influenced by the type of oxide semiconductor.

酸化物半導体としては、 5n02が最もよく、次いで
WO3、ZnO、In2O5、Cr2O5の順によいこ
とが解る。
It can be seen that 5n02 is the best oxide semiconductor, followed by WO3, ZnO, In2O5, and Cr2O5 in that order.

なお、本実施例は、印刷法を用いて作成した素子につい
て説明したが、蒸着法等を用いた薄膜においても同様効
果が得られる。
Although this embodiment has been described with respect to an element created using a printing method, similar effects can be obtained with a thin film using a vapor deposition method or the like.

又酸化物半導体に数wt%の添加剤を加えても、上記効
果には影響しない。
Furthermore, even if several wt % of additives are added to the oxide semiconductor, the above effects are not affected.

〔発明の効果〕〔Effect of the invention〕

以上詳述した通シ本発明によれば、上部及び下部電極に
ルテニウムを使用して、この電極間に酸化物半導体を挾
んだ素子としたので、−酸化炭素ガスの感度を向上する
と共に水素ガスやエタノールガスの感度を大巾に減少さ
せることができた。
According to the present invention as described in detail above, ruthenium is used for the upper and lower electrodes, and an oxide semiconductor is sandwiched between the electrodes, so that the sensitivity to carbon oxide gas is improved and the sensitivity to hydrogen gas is improved. The sensitivity to gas and ethanol gas could be greatly reduced.

その結果、−酸化炭素ガスに対する誤警報がなくな9、
−酸化炭素ガス検知の精度と信頼性を大巾に向上するこ
とができた。
As a result, - there are no false alarms for carbon oxide gas9;
-We were able to greatly improve the accuracy and reliability of carbon oxide gas detection.

【図面の簡単な説明】[Brief explanation of the drawing]

添付図面は、−酸化炭素ガス検出用素子の試験を行うた
めに作成しfc素子の斜視図である。 1・・・ヒータ、2・・・ナルミナ基板、3・・・下部
電極、4・・・感ガス層、5・・・上部電極。 代理人 弁理士 秋 本 正 実
The attached drawing is a perspective view of an FC element prepared for testing a carbon oxide gas detection element. DESCRIPTION OF SYMBOLS 1... Heater, 2... Narumina substrate, 3... Lower electrode, 4... Gas-sensitive layer, 5... Upper electrode. Agent Patent Attorney Masami Akimoto

Claims (1)

【特許請求の範囲】 1、 上部電極と下部電極との間に感ガス層をサンドイ
ンチ状に介在して成る一酸化炭素ガス検出素子において
、上記上部電極と下部電極に酸化ルテニウムを使用した
ことを特徴とする一酸化炭素ガス検出素子。 2、特許請求範囲第1項記載の感ガス層において、酸化
スズ(Sn02) +酸化タングステン(WO5)。 酸化りa ム(Cr205) *酸化亜鉛(ZnO) 
、酸化インジウム(In203)のうちいずれかを使用
することを特徴とする一酸化炭素ガス検出素子。
[Scope of Claims] 1. In a carbon monoxide gas detection element having a sandwich-like gas-sensitive layer interposed between an upper electrode and a lower electrode, ruthenium oxide is used for the upper electrode and the lower electrode. A carbon monoxide gas detection element featuring: 2. In the gas-sensitive layer according to claim 1, tin oxide (Sn02) + tungsten oxide (WO5). Rimu oxide (Cr205) *Zinc oxide (ZnO)
, or indium oxide (In203).
JP19089683A 1983-10-14 1983-10-14 Carbon monoxide sensing element Pending JPS6082953A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19089683A JPS6082953A (en) 1983-10-14 1983-10-14 Carbon monoxide sensing element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19089683A JPS6082953A (en) 1983-10-14 1983-10-14 Carbon monoxide sensing element

Publications (1)

Publication Number Publication Date
JPS6082953A true JPS6082953A (en) 1985-05-11

Family

ID=16265524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19089683A Pending JPS6082953A (en) 1983-10-14 1983-10-14 Carbon monoxide sensing element

Country Status (1)

Country Link
JP (1) JPS6082953A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005085821A1 (en) * 2004-03-05 2005-09-15 Mikuni Corporation Detecting element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005085821A1 (en) * 2004-03-05 2005-09-15 Mikuni Corporation Detecting element
JPWO2005085821A1 (en) * 2004-03-05 2008-01-24 株式会社ミクニ Detection element

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