JPS6169282U - - Google Patents

Info

Publication number

JPS6169282U

JPS6169282U JP15113784U JP15113784U JPS6169282U JP S6169282 U JPS6169282 U JP S6169282U JP 15113784 U JP15113784 U JP 15113784U JP 15113784 U JP15113784 U JP 15113784U JP S6169282 U JPS6169282 U JP S6169282U

Authority

JP

Japan

Prior art keywords

reaction tube

generated gas

quartz nozzle

nitride film

ring

Prior art date

1984-10-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 4
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
• 239000002184 metal Substances 0.000 claims description 2
• 150000004767 nitrides Chemical class 0.000 claims description 2
• 235000012431 wafers Nutrition 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
• 229910018540 Si C Inorganic materials 0.000 description 1
• 229910052799 carbon Inorganic materials 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1