JPS6169264U - - Google Patents
Info
- Publication number
- JPS6169264U JPS6169264U JP15298084U JP15298084U JPS6169264U JP S6169264 U JPS6169264 U JP S6169264U JP 15298084 U JP15298084 U JP 15298084U JP 15298084 U JP15298084 U JP 15298084U JP S6169264 U JPS6169264 U JP S6169264U
- Authority
- JP
- Japan
- Prior art keywords
- metal
- electron gun
- heating evaporation
- deflecting
- evaporated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 2
Landscapes
- Manufacture And Refinement Of Metals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15298084U JPS6169264U (en:Method) | 1984-10-09 | 1984-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15298084U JPS6169264U (en:Method) | 1984-10-09 | 1984-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6169264U true JPS6169264U (en:Method) | 1986-05-12 |
Family
ID=30711017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15298084U Pending JPS6169264U (en:Method) | 1984-10-09 | 1984-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6169264U (en:Method) |
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1984
- 1984-10-09 JP JP15298084U patent/JPS6169264U/ja active Pending