JPS6169235U - - Google Patents
Info
- Publication number
- JPS6169235U JPS6169235U JP14959284U JP14959284U JPS6169235U JP S6169235 U JPS6169235 U JP S6169235U JP 14959284 U JP14959284 U JP 14959284U JP 14959284 U JP14959284 U JP 14959284U JP S6169235 U JPS6169235 U JP S6169235U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- tube burner
- hood
- steam generation
- generation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 150000003377 silicon compounds Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
第1図は本考案を実施するための装置の全体を
示す概略説明図であり、第2図は本考案の装置の
水蒸気発生源部分の概略の一例を示す説明図であ
る。
図中、1は水素ボンベ、2は酸素ボンベ、5は
バーナー、6は四塩化珪素タンク、9はパイレツ
クス製の反応器、10は回転引上げ種棒、11は
石英シリカ多孔質母材、14はフード、15は外
筒、16は水蒸気発生源、17は水供給口を示す
。
FIG. 1 is a schematic explanatory diagram showing the entirety of an apparatus for implementing the present invention, and FIG. 2 is an explanatory diagram schematically showing an example of a steam generation source portion of the apparatus of the present invention. In the figure, 1 is a hydrogen cylinder, 2 is an oxygen cylinder, 5 is a burner, 6 is a silicon tetrachloride tank, 9 is a Pyrex reactor, 10 is a rotating seed rod, 11 is a quartz silica porous base material, and 14 is a A hood, 15 is an outer cylinder, 16 is a steam generation source, and 17 is a water supply port.
Claims (1)
ナーと、該多重管バーナーに酸素、水素、不活性
ガスおよび珪素化合物を送入する手段と、前記反
応室内の上部に挿入された種棒とを備えた多孔質
石英ガラス母材の製造装置において、前記多重管
バーナーの最外周部にフードを装着し、該フード
の外周部に水蒸気発生源を設けたことを特徴とす
る多孔質石英ガラス母材の製造装置。 a reaction chamber, a multi-tube burner provided in the reaction chamber, a means for feeding oxygen, hydrogen, an inert gas and a silicon compound to the multi-tube burner, and a seed rod inserted into the upper part of the reaction chamber; A porous quartz glass preform manufacturing apparatus comprising: a hood attached to the outermost periphery of the multi-tube burner; and a steam generation source provided on the outer periphery of the hood. Material manufacturing equipment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14959284U JPS6169235U (en) | 1984-10-04 | 1984-10-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14959284U JPS6169235U (en) | 1984-10-04 | 1984-10-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6169235U true JPS6169235U (en) | 1986-05-12 |
Family
ID=30707765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14959284U Pending JPS6169235U (en) | 1984-10-04 | 1984-10-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6169235U (en) |
-
1984
- 1984-10-04 JP JP14959284U patent/JPS6169235U/ja active Pending
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