JPH0133627Y2 - - Google Patents
Info
- Publication number
- JPH0133627Y2 JPH0133627Y2 JP3512084U JP3512084U JPH0133627Y2 JP H0133627 Y2 JPH0133627 Y2 JP H0133627Y2 JP 3512084 U JP3512084 U JP 3512084U JP 3512084 U JP3512084 U JP 3512084U JP H0133627 Y2 JPH0133627 Y2 JP H0133627Y2
- Authority
- JP
- Japan
- Prior art keywords
- target holder
- gas
- glass plate
- core tube
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 239000010453 quartz Substances 0.000 claims description 18
- 239000011521 glass Substances 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 11
- 229910052799 carbon Inorganic materials 0.000 claims description 11
- 239000013307 optical fiber Substances 0.000 claims description 9
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 239000012808 vapor phase Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000000460 chlorine Substances 0.000 description 8
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 229910005793 GeO 2 Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
Landscapes
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
【考案の詳細な説明】
〔考案の背景と目的〕
本考案は、光フアイバ母材製造用加熱炉に関す
るものである。[Detailed Description of the Invention] [Background and Purpose of the Invention] The present invention relates to a heating furnace for producing an optical fiber base material.
気相軸付法により製造された多孔質母材を脱水
透明ガラス化するには、加熱炉最内層に設置され
た石英ガラス炉芯管内に、He（ヘリウム）ガスと
Cl2（塩素ガス）などのハロゲンガスとを炉芯管周
辺の圧力より高くして流し多孔質母材を加熱する
と共に回転させながら引き上げ引き下げを繰り返
して行つている。 In order to dehydrate and turn a porous base material manufactured by the vapor phase axial method into transparent glass, He (helium) gas and
A halogen gas such as Cl 2 (chlorine gas) is flowed at a pressure higher than the pressure around the furnace core tube to heat the porous base material, and the porous base material is repeatedly raised and lowered while rotating.
第１図は従来の加熱炉の上端部の要部断面図で
ある。図において、１はターゲツトホルダで下端
には多孔質母材（図示せず）が固着されている。
２はガラス板で加熱炉石英炉芯管３の上端にガラ
ス板押え金具４を介し固定され、ターゲツトホル
ダ１が上下方向に挿通されている。５はガラス板
２の下部に石英炉芯管３に開口された排気口であ
る。 FIG. 1 is a sectional view of the main part of the upper end of a conventional heating furnace. In the figure, reference numeral 1 denotes a target holder, and a porous base material (not shown) is fixed to the lower end of the target holder.
A glass plate 2 is fixed to the upper end of a quartz furnace core tube 3 of the heating furnace via a glass plate holding fitting 4, and a target holder 1 is inserted therethrough in the vertical direction. Reference numeral 5 denotes an exhaust port opened to the quartz furnace core tube 3 at the bottom of the glass plate 2.
そして、周辺よりやや高圧にされた石英炉芯管
３の内圧による、石英炉芯管３から出る熱によつ
て不純物が出ないようにするため、ターゲツトホ
ルダ１が石英炉芯管３から出入する所に、ターゲ
ツトホルダ１の外径よりわずかに大径の穴を有す
るガラス板２の穴にターゲツトホルダ１を通し気
密性を保つていた。そのため、透明ガラス化に必
要なHeガス流量の数倍ものガスを流すため多孔
質母材が振動し落下したり、Heガスが不経済で
あつた。 The target holder 1 moves in and out of the quartz furnace tube 3 in order to prevent impurities from coming out due to the heat emitted from the quartz furnace tube 3 due to the internal pressure of the quartz furnace tube 3, which has a slightly higher pressure than the surrounding area. Then, the target holder 1 was passed through a hole in a glass plate 2 having a hole slightly larger than the outer diameter of the target holder 1 to maintain airtightness. As a result, the porous base material vibrates and falls due to the flow of He gas several times the flow rate required for transparent vitrification, making He gas uneconomical.
本考案は上記の状況に鑑みなされたものであり
Heガスの消費量を減少できると共にCl2ガスの漏
洩を防止できる光フアイバ母材製造用加熱炉を提
供することを目的としたものである。 This idea was created in view of the above situation.
The object of the present invention is to provide a heating furnace for producing an optical fiber base material that can reduce the consumption of He gas and prevent leakage of Cl 2 gas.
本考案の光フアイバ母材製造用加熱炉は、気相
軸付法により製造された多孔質母材が下端に固着
されるターゲツトホルダが加熱炉石英炉芯管上端
に取り付けられたガラス板を上下方向に貫通して
取り付けられ、塩素ガスなどのハロゲンガス及び
ヘリウムガスが周辺圧力よりやや高圧で下方から
流動され上記ガラス板下部の上記石英炉芯管に開
口された排気口から排出され上記ターゲツトホル
ダが回転されながら上下方向に移動されて上記多
孔質母材が透明化されるように形成されてなり、
自己潤滑性を有し複数枚積層され上記ターゲツト
ホルダの外径と同径の穴が形成されたカーボンシ
ートの該穴に挿通される上記ターゲツトホルダ
と、上記ガラス板と共に上記炉芯管に固定された
上記カーボンシートとを設けたものである。
In the heating furnace for producing optical fiber preforms of the present invention, a target holder to which a porous preform manufactured by the vapor phase axial method is fixed at the lower end moves the glass plate attached to the upper end of the quartz furnace core tube up and down. A halogen gas such as chlorine gas and helium gas are flowed from below at a pressure slightly higher than the surrounding pressure and are discharged from an exhaust port opened in the quartz furnace core tube at the bottom of the glass plate to the target holder. is rotated and moved vertically to make the porous base material transparent;
The target holder is inserted into the hole of a carbon sheet having self-lubricating properties and is laminated with a plurality of sheets and has a hole having the same diameter as the outer diameter of the target holder, and the target holder is fixed to the furnace core tube together with the glass plate. The above-mentioned carbon sheet is provided.
以下本考案の光フアイバ母材製造用加熱炉を実
施例を用い従来と同部品は同符号で示し同部分の
構造の説明は省略し第２図により説明する。図に
おいて、６は自己潤滑性を有する厚さ0.2mmの高
純度のカーボンシートで複数枚（10枚）重ねら
れ、ガラス板２の下面にガラス板２と共にガラス
板押え金具４を介し石英炉芯管３に固定されてい
る。カーボンシート６には、外径15mmの石英ガラ
ス製で表面が平滑に形成されたターゲツトホルダ
１の外径と同径の15mmφの穴７が開口され穴７に
ターゲツトホルダ１が挿通されている。また、石
英炉芯管３内には、下方から上方へ向け、Heガ
ス15／分とCl2ガス200cc／分が流動され、内径
８mmの排気孔５を経て排気されている。このとき
の石英炉芯管３内の内圧は、周辺よりも２〜３mm
H2Oで高く形成されている。このような状態に
おいて、ターゲツトホルダ１と、カーボンシート
６との接触部からのガス漏れはほとんどなく、長
時間にわたり外部よりH2Oで＋２〜３mmに対し
±0.2mmH2Oの範囲で安定化されている。
Hereinafter, the heating furnace for producing optical fiber preforms of the present invention will be explained using embodiments and FIG. 2, in which the same parts as those in the conventional art are denoted by the same reference numerals, and the explanation of the structure of the same parts will be omitted. In the figure, 6 is a self-lubricating high-purity carbon sheet with a thickness of 0.2 mm, which is stacked with multiple sheets (10 sheets) and placed on the bottom surface of the glass plate 2 together with the glass plate holding metal fitting 4 through a quartz furnace core. It is fixed to the tube 3. The carbon sheet 6 has a hole 7 having an outer diameter of 15 mm and the same diameter as the outer diameter of the target holder 1, which is made of quartz glass and has a smooth surface, and the target holder 1 is inserted into the hole 7. Furthermore, 15/min of He gas and 200 cc/min of Cl 2 gas are flowed into the quartz furnace core tube 3 from the bottom to the top, and are exhausted through the exhaust hole 5 with an inner diameter of 8 mm. At this time, the internal pressure inside the quartz furnace core tube 3 is 2 to 3 mm lower than the surrounding area.
Highly formed in H 2 O. In such a state, there is almost no gas leakage from the contact area between the target holder 1 and the carbon sheet 6, and the target is stabilized within a range of ±0.2 mm H 2 O for +2 to 3 mm by applying H 2 O from the outside for a long time. has been done.
そして、カーボンシート６の穴７に挿通された
ターゲツトホルダ１が上下動及び回動しても滑ら
かに移動及び回転が行なわれ、石英炉芯管３内の
気密性が保たれHeガスの消費量も必要最小限に
とどめることができる。また、Cl2ガスなど毒性
の強いガスがほとんど洩れないので安全性にすぐ
れている。さらに、気密性がよいため、石英炉芯
管３内のガスの流れが安定化しCl2ガスとGeO2の
反応も安定し屈折率分布の再現性もよい。 Even when the target holder 1 inserted through the hole 7 of the carbon sheet 6 moves up and down and rotates, it moves and rotates smoothly, and the airtightness inside the quartz furnace core tube 3 is maintained, reducing the amount of He gas consumed. can also be kept to the minimum necessary. In addition, it is extremely safe because highly toxic gases such as Cl 2 gas hardly leak. Furthermore, since the airtightness is good, the flow of gas in the quartz furnace core tube 3 is stabilized, the reaction between Cl 2 gas and GeO 2 is also stabilized, and the reproducibility of the refractive index distribution is also good.
このように本実施例の光フアイバ母材製造用加
熱炉は、石英炉芯管の上端のガラス板の取付部に
気密性の高いカーボンシートを配置したので石英
炉芯管の上端からのHeガスの漏洩が防止され消
費量を節約できると共にCl2ガスの漏洩を阻止し
安全性を向上できる。 In this way, the heating furnace for manufacturing optical fiber base material of this embodiment has a highly airtight carbon sheet placed at the attachment part of the glass plate at the upper end of the quartz furnace core tube, which prevents He gas from flowing from the upper end of the quartz furnace core tube. It is possible to prevent the leakage of Cl 2 gas, save consumption, and improve safety by preventing the leakage of Cl 2 gas.
以上記述した如く本考案の光フアイバ母材製造
用加熱炉は、Heガスの消費量を減少できると共
にCl2ガス漏洩を防止できる効果を有するもので
ある。
As described above, the heating furnace for producing optical fiber preforms of the present invention has the effect of reducing He gas consumption and preventing Cl 2 gas leakage.
第１図は従来の光フアイバ母材製造用加熱炉上
端部の要部断面図、第２図は本考案の光フアイバ
母材製造用加熱炉の実施例の上端部要部断面図で
ある。
１；ターゲツトホルダ、２；硝子板、３；石英
炉芯管、５；排気口、６；カーボンシート、７；
穴。
FIG. 1 is a sectional view of the main part of the upper end of a conventional heating furnace for producing optical fiber preforms, and FIG. 2 is a sectional view of the main parts of the upper end of an embodiment of the heating furnace for producing optical fiber preforms of the present invention. 1; Target holder, 2; Glass plate, 3; Quartz furnace tube, 5; Exhaust port, 6; Carbon sheet, 7;
hole.
Claims (1)
に固着されるターゲツトホルダが加熱炉石英炉芯
管上端に取り付けられたガラス板を上下方向に貫
通して取り付けられ、塩素ガスなどのハロゲンガ
ス及びヘリウムガスが周辺圧力よりやや高圧で下
方から流動され上記ガラス板下部の上記石英炉芯
管に開口された排気口から排出され上記ターゲツ
トホルダが回転されながら上下方向に移動されて
上記多孔質母材が透明化されるものにおいて、自
己潤滑性を有し複数枚積層され上記ターゲツトホ
ルダの外径と同径の穴が形成されたカーボンシー
トの該穴に挿通される上記ターゲツトホルダと、
上記ガラス板と共に上記石英炉芯管に固定された
上記カーボンシートとを設けたことを特徴とする
光フアイバ母材製造用加熱炉。 A target holder, to which a porous base material manufactured by the vapor phase mounting method is fixed at the lower end, is attached by vertically penetrating the glass plate attached to the upper end of the quartz furnace core tube of the heating furnace. Gas and helium gas are flowed from below at a pressure slightly higher than the ambient pressure, and are discharged from an exhaust port opened in the quartz furnace core tube at the bottom of the glass plate, and the target holder is rotated and moved up and down to form the porous structure. In the case where the base material is made transparent, the target holder is inserted into the hole of a self-lubricating carbon sheet, which is laminated with a plurality of carbon sheets and has a hole with the same diameter as the outer diameter of the target holder;
A heating furnace for producing an optical fiber base material, characterized in that the carbon sheet fixed to the quartz furnace core tube is provided together with the glass plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3512084U JPS60147636U (en) | 1984-03-12 | 1984-03-12 | Heating furnace for manufacturing optical fiber base material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3512084U JPS60147636U (en) | 1984-03-12 | 1984-03-12 | Heating furnace for manufacturing optical fiber base material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60147636U JPS60147636U (en) | 1985-10-01 |
| JPH0133627Y2 true JPH0133627Y2 (en) | 1989-10-12 |
Family
ID=30539109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3512084U Granted JPS60147636U (en) | 1984-03-12 | 1984-03-12 | Heating furnace for manufacturing optical fiber base material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60147636U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR0140210B1 (en) * | 1989-03-30 | 1998-06-01 | 추네오 나카하라 | Sintering furnace for producing quartz base material |
-
1984
- 1984-03-12 JP JP3512084U patent/JPS60147636U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60147636U (en) | 1985-10-01 |
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