JPS6168859U - - Google Patents

Info

Publication number
JPS6168859U
JPS6168859U JP1984151730U JP15173084U JPS6168859U JP S6168859 U JPS6168859 U JP S6168859U JP 1984151730 U JP1984151730 U JP 1984151730U JP 15173084 U JP15173084 U JP 15173084U JP S6168859 U JPS6168859 U JP S6168859U
Authority
JP
Japan
Prior art keywords
polished
objects
heater
polishing
insertion hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984151730U
Other languages
English (en)
Other versions
JPS6331886Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984151730U priority Critical patent/JPS6331886Y2/ja
Publication of JPS6168859U publication Critical patent/JPS6168859U/ja
Application granted granted Critical
Publication of JPS6331886Y2 publication Critical patent/JPS6331886Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】
第1図はこの考案の平面加工治具の一例を示す
平面図、第2図は同A−A線に沿う断面図、第3
図はヒータの概略図、第4図はこの考案の平面加
工治具にヒータをセツトした状態を示す正面図、
第5図は同下面図である。 1:平面加工治具、3,3′:ヒータ挿入孔、
5,5′:被研摩物、6:ヒータ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 研摩盤の回転テーブルとその上に載置された被
    研摩物との間に微細な砥粒を介在せしめ被研摩物
    の研摩物の研摩を行う際に、複数個の被研摩物を
    保持するための平板状の平面加工治具において、
    各々の被研摩物取付面の反対側にヒータを挿着可
    能なヒータ挿入孔を形成したことを特徴とする平
    面加工治具。
JP1984151730U 1984-10-09 1984-10-09 Expired JPS6331886Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984151730U JPS6331886Y2 (ja) 1984-10-09 1984-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984151730U JPS6331886Y2 (ja) 1984-10-09 1984-10-09

Publications (2)

Publication Number Publication Date
JPS6168859U true JPS6168859U (ja) 1986-05-12
JPS6331886Y2 JPS6331886Y2 (ja) 1988-08-25

Family

ID=30709828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984151730U Expired JPS6331886Y2 (ja) 1984-10-09 1984-10-09

Country Status (1)

Country Link
JP (1) JPS6331886Y2 (ja)

Also Published As

Publication number Publication date
JPS6331886Y2 (ja) 1988-08-25

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