JPS6168305A - オゾン発生装置 - Google Patents
オゾン発生装置Info
- Publication number
- JPS6168305A JPS6168305A JP19035384A JP19035384A JPS6168305A JP S6168305 A JPS6168305 A JP S6168305A JP 19035384 A JP19035384 A JP 19035384A JP 19035384 A JP19035384 A JP 19035384A JP S6168305 A JPS6168305 A JP S6168305A
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- plates
- resistor
- base plates
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 239000000919 ceramic Substances 0.000 claims abstract description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 5
- 239000000956 alloy Substances 0.000 claims abstract description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 5
- 239000001301 oxygen Substances 0.000 claims abstract description 5
- 125000006850 spacer group Chemical group 0.000 claims abstract description 5
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 4
- 229910052742 iron Inorganic materials 0.000 claims abstract description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 4
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 101100111861 Schizosaccharomyces pombe (strain 972 / ATCC 24843) but1 gene Proteins 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- -1 tanksten Chemical compound 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19035384A JPS6168305A (ja) | 1984-09-11 | 1984-09-11 | オゾン発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19035384A JPS6168305A (ja) | 1984-09-11 | 1984-09-11 | オゾン発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6168305A true JPS6168305A (ja) | 1986-04-08 |
| JPH0121082B2 JPH0121082B2 (enrdf_load_stackoverflow) | 1989-04-19 |
Family
ID=16256777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19035384A Granted JPS6168305A (ja) | 1984-09-11 | 1984-09-11 | オゾン発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6168305A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8507854B2 (en) | 2009-07-15 | 2013-08-13 | Carl Zeiss Microscopy Gmbh | Particle beam microscopy system and method for operating the same |
| JP2014186900A (ja) * | 2013-03-25 | 2014-10-02 | Murata Mfg Co Ltd | 放電素子およびその製造方法 |
-
1984
- 1984-09-11 JP JP19035384A patent/JPS6168305A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8507854B2 (en) | 2009-07-15 | 2013-08-13 | Carl Zeiss Microscopy Gmbh | Particle beam microscopy system and method for operating the same |
| JP2014186900A (ja) * | 2013-03-25 | 2014-10-02 | Murata Mfg Co Ltd | 放電素子およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0121082B2 (enrdf_load_stackoverflow) | 1989-04-19 |
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