JPS6167818A - Semiconductor laser light scanner - Google Patents

Semiconductor laser light scanner

Info

Publication number
JPS6167818A
JPS6167818A JP59191024A JP19102484A JPS6167818A JP S6167818 A JPS6167818 A JP S6167818A JP 59191024 A JP59191024 A JP 59191024A JP 19102484 A JP19102484 A JP 19102484A JP S6167818 A JPS6167818 A JP S6167818A
Authority
JP
Japan
Prior art keywords
semiconductor laser
laser beam
scanning
variation
photosensitive body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59191024A
Other languages
Japanese (ja)
Inventor
Osamu Ito
修 伊藤
Masaichiro Tachikawa
雅一郎 立川
Hiroshi Wakahara
廣 若原
Yasuhiro Ozawa
小沢 康宏
Hironori Ono
小野 広則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59191024A priority Critical patent/JPS6167818A/en
Publication of JPS6167818A publication Critical patent/JPS6167818A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To attain highly accurate scanning by forming a means for detecting the variation of movement of a photosensitive body in the 1st direction, a laser light scanning means for operating the 2nd direction and an optical system moving means. CONSTITUTION:In a constitution consisting of a semiconductor laser 8, a rotary polyhedral mirror 10 and the photosensitive body 12, the variation of the turning speed of the photosensitive body 12 in the narrow F direction is detected by a detector 15, the variation of the turning speed in each fixed scanning and the positional shift of the scanning line in the G direction are found out by a synchronization detector 13 and a collimator lens 9 is moved in the J direction by a moving device 16 in accordance with the shifted value to compensate the positional shift. Therefore, the uneven pitches of the scanning line which may be generated due to the variation of the moving speed of the photosensitive body is compensated only by displacing the lens 9 slightly to execute highly accurate scanning an the relative movement of the laser 8 and the collimator lens 9 can be attained highly accurately with a simple constitution. By using the moving means 16 having an electric distortion effect as an optical system moving means.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は半導体レーザプリンタ等に用いられる半導体レ
ーザビーム走査装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a semiconductor laser beam scanning device used in semiconductor laser printers and the like.

従来例の構成とその問題点 近年、半導体技術の進歩に伴ない半導体レーザは年々信
頼性が向上し、かつ価格も安くなっている。これに加え
て、半導体レーザは小型°でかっ直接変調が可能である
という特徴を持つため、その利用分野が急速に広がって
おり、半導体レーザビーム走査装置にも、一層の高精度
化が要求されている。
Conventional Structures and Their Problems In recent years, as semiconductor technology has progressed, semiconductor lasers have become more reliable and cheaper year by year. In addition, semiconductor lasers are compact and can be directly modulated, so their field of use is rapidly expanding, and semiconductor laser beam scanning devices are also required to have even higher precision. ing.

以下、半導体レーザビーム走査装置を利用した典型的な
例として、半導体レーザビームプリンタを取シあげ、説
明を行なう。
Hereinafter, a semiconductor laser beam printer will be explained as a typical example using a semiconductor laser beam scanning device.

以下、図面を参照しながら従来の半導体レーザビームプ
リンタについて説明する。第1図は従来の半導体レーザ
ビームプリンタの斜視図であり、1は半導体レーザ、2
はコリメートレンズ、3は回転多面鏡、4はfθレンズ
、5は感光体、6は同期検出装置、7は半導体レーザ駆
動装置である。
A conventional semiconductor laser beam printer will be described below with reference to the drawings. FIG. 1 is a perspective view of a conventional semiconductor laser beam printer, in which 1 is a semiconductor laser, 2
3 is a collimating lens, 3 is a rotating polygon mirror, 4 is an fθ lens, 5 is a photoreceptor, 6 is a synchronization detection device, and 7 is a semiconductor laser drive device.

以上の様に構成された半導体レーザビームプリンタにつ
いて、その動作を以下に説明する。半導体レーザ1から
発せられたレーザ光は、コリメートレンズ2によって平
行レーザ光となり、回転多面鏡3に入射する。回転多面
鏡3の図中矢印入方向の回転により、平行レーザ光は図
中矢印B方向に走査され、さらにfθレンズ4によって
感光体6上に結像され、感光体S上を図中矢印C方向に
等速走査する。さらに感光体6が図中矢印り方向に回転
することによって感光体6上に平面走査が行なわれる。
The operation of the semiconductor laser beam printer configured as above will be described below. A laser beam emitted from a semiconductor laser 1 is converted into a parallel laser beam by a collimating lens 2, and is incident on a rotating polygon mirror 3. By rotating the rotating polygon mirror 3 in the direction indicated by the arrow in the figure, the parallel laser beam is scanned in the direction indicated by the arrow B in the figure, and is further imaged onto the photoreceptor 6 by the fθ lens 4, and then scans on the photoreceptor S in the direction indicated by the arrow C in the figure. Scan at a constant speed in the direction. Further, by rotating the photoreceptor 6 in the direction indicated by the arrow in the figure, a plane scan is performed on the photoreceptor 6.

レーザ光の一部は同期検出装置6の受光面に結像する。A portion of the laser beam forms an image on the light receiving surface of the synchronization detection device 6.

同期検出装置6は、半導体レーザ駆動装置7に、−走査
線毎の書き込み開始信号を与え感光体6の回転方向に関
して走査の同期をとる。
The synchronization detection device 6 provides a write start signal for each -scanning line to the semiconductor laser drive device 7, and synchronizes the scanning with respect to the rotational direction of the photoreceptor 6.

しかしながら、上記のような構成においては、感光体6
の図中矢印り方向の回転速度変動によって、感光体6上
に記録されるレーザ光走査線が図中矢印に方向に対して
ピッチむらを生じて、その結果、画質が低下するという
問題点を有していた。
However, in the above configuration, the photoreceptor 6
Due to rotational speed fluctuations in the direction of the arrow in the figure, the laser beam scanning line recorded on the photoconductor 6 causes pitch unevenness in the direction of the arrow in the figure, resulting in a problem that the image quality deteriorates. had.

発明の目的 本発明の目的は高精度の走査を可能とする半導体レーザ
ビーム走査装置を提供する事である。
OBJECTS OF THE INVENTION An object of the present invention is to provide a semiconductor laser beam scanning device that enables highly accurate scanning.

発明の構成 本発明の半導体レーザビーム走査装置は、光源となる半
導体レーザと、前記半導体レーザが発するレーザ光を平
行レーザ光とするコリメートレンズと、第1の方向に移
動しながら、前記レーザ光を照射されるレーザ光被照射
部材と、前記レーザ光被照射部材の前記第1の方向の移
動の速度変動を検出する速度変動検出手段と、前記レー
ザ光被照射部材の前記第1の方向と平行でない第2の方
向に対して前記レーザ光の走査を行なうレーザ光走査手
段と、前記速度変動検出手段によって検出される前記速
度変動に応じて、前記半導体レーザと前記コリメートレ
ンズを前記第1の方向に対応する方向に相対的に移動さ
せる光学系移動手段とを具備するように構成したもので
あり、これにより、レーザ光被照射部材上のレーザ光走
査線のピッチむらを補正し、高精度の走査を行なうもの
である。
Structure of the Invention A semiconductor laser beam scanning device of the present invention includes a semiconductor laser serving as a light source, a collimating lens that converts laser light emitted by the semiconductor laser into parallel laser light, and a collimator lens that converts the laser light emitted by the semiconductor laser into parallel laser light while moving in a first direction. a member to be irradiated with a laser beam; a speed fluctuation detection means for detecting a speed fluctuation of the movement of the member to be irradiated with the laser beam in the first direction; a laser beam scanning means for scanning the laser beam in a second direction in which the semiconductor laser and the collimating lens are moved in the first direction according to the speed fluctuation detected by the speed fluctuation detection means; and an optical system moving means for moving the optical system relatively in a direction corresponding to the direction corresponding to the laser beam. It performs scanning.

実施例の説明 以下本発明の一実施例について、図面を参照しながら説
明する。
DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

第2図は、本発明の一実施例における半導体レーザビー
ムプリンタの斜視図であり、8は半導体レーザ、9はコ
リメートレンズ、1oは回転多面鏡、11はfθレンズ
、12は感光体、13は同期検出装置、14は半導体レ
ーザ駆動装置、15は感光体回転速度変動検出装置、1
6はコリメートレンズ移動装置である。
FIG. 2 is a perspective view of a semiconductor laser beam printer according to an embodiment of the present invention, in which 8 is a semiconductor laser, 9 is a collimating lens, 1o is a rotating polygon mirror, 11 is an fθ lens, 12 is a photoreceptor, and 13 is a A synchronization detection device, 14 a semiconductor laser drive device, 15 a photoreceptor rotational speed fluctuation detection device, 1
6 is a collimating lens moving device.

以上の様に構成された本実施例の半導体レーザビームプ
リンタについて、以下その動作を説明する。但し、8〜
140基本的な動作については第1図の1〜7の動作と
同様であるので説明を省略する。
The operation of the semiconductor laser beam printer of this embodiment configured as described above will be described below. However, 8~
140 The basic operations are the same as the operations 1 to 7 in FIG. 1, so the explanation will be omitted.

感光体回転速度変動検出装置15は、感光体12の図中
矢印F方向の回転速度変動を検出する。
The photoreceptor rotational speed fluctuation detection device 15 detects rotational speed fluctuations of the photoreceptor 12 in the direction of arrow F in the figure.

検出された回転速度変動から同期検出装置13が出力す
る同期信号を用いて、−走査線ごとの平均回転速度変動
が求められ、さらに、走査線の図中矢印G方向の位置ず
れ量が求められる。コリメートレンズ移動装置16は、
検出された位置ずれ量に応じて、コリメートレンズ9を
図中矢印J方向に移動させ、位置ずれを補正する。
Using the synchronization signal output by the synchronization detection device 13 from the detected rotational speed fluctuation, the average rotational speed fluctuation for each -scanning line is determined, and furthermore, the amount of positional deviation of the scanning line in the direction of arrow G in the figure is determined. . The collimating lens moving device 16 is
According to the detected amount of positional deviation, the collimating lens 9 is moved in the direction of arrow J in the figure to correct the positional deviation.

コリメートレンズの移動によって、走査線のずれtどの
程度補正できるかを、第3図を用いて説明する。第3図
は、本発明の一実施例における半1lIBレーザビーム
プリンタの正面図であり、17は半導体レーザ、18は
コリメートレンズ、19はfθし/ズ、20はレーザ光
結像線、21はfθレンズ19の光軸である。また、半
導体レーザ17の発光点は、fθレンズ19の光軸上に
位置する。さらに、第3図において、aはコリメートレ
ンズ18の光軸とfθレンズ19の光軸21とのずれ量
、θはコリメートレンズ18通過後のレーザ光と光軸2
1との傾き、bは結像点と光軸21のずれ量、f、 、
 f2はそれぞれコリメートレンズ18、fθレンズ1
9の焦点距離、図中矢印には第2図中の矢印G、Jに対
応する方向を示す矢印である。第3図より、θは下式に
て求められる。
The extent to which the scanning line shift t can be corrected by moving the collimating lens will be explained with reference to FIG. FIG. 3 is a front view of a half-11IB laser beam printer according to an embodiment of the present invention, in which 17 is a semiconductor laser, 18 is a collimating lens, 19 is an fθ lens, 20 is a laser beam imaging line, and 21 is a This is the optical axis of the fθ lens 19. Further, the light emitting point of the semiconductor laser 17 is located on the optical axis of the fθ lens 19. Furthermore, in FIG. 3, a is the amount of deviation between the optical axis of the collimating lens 18 and the optical axis 21 of the fθ lens 19, and θ is the amount of deviation between the laser beam after passing through the collimating lens 18 and the optical axis 21.
1, b is the amount of deviation between the imaging point and the optical axis 21, f,
f2 is collimating lens 18 and fθ lens 1, respectively.
9, the arrows in the figure indicate directions corresponding to arrows G and J in FIG. From FIG. 3, θ can be determined by the following formula.

θ=八へ fI       ・・・曲・・(1)fθ
レンズの特性から、 b : f2θ         ・・・・・・・・・
 (2)(1) P (2)式より 走査線のずれ量は、通常、 5525μm         、、、、、、、、、 
 (4)程度であり、また光学系としては、 r、=1otnt        ・・・・川・・ (
に)f2=250羽       ・・・・・・山 (
6)程度に設計される。
Go to θ=8 fI...Song...(1) fθ
From the characteristics of the lens, b: f2θ...
(2) (1) P From formula (2), the amount of deviation of the scanning line is usually 5525 μm.
(4), and as an optical system, r, = 1otnt... river... (
) f2 = 250 birds...Mountain (
6) Designed to a degree.

(4)〜(6)式を(3)式に代入して、461μm 
       ・・・・・・山 (7)が得られ、コリ
メートレンズ18をわずかに変位させるだけで、レーザ
光走査線のずれ量の補正が可能である事がわかる。
Substituting equations (4) to (6) into equation (3), 461 μm
. . . Mountain (7) is obtained, and it can be seen that the amount of deviation of the laser beam scanning line can be corrected by only slightly displacing the collimating lens 18.

また、第2図のコリメートレンズ移動装置16は電歪効
果を持つ材料を用いて構成しているため、簡易な構成で
(7)式で表わされるような微小な変位を精度良く実現
している。
In addition, since the collimating lens moving device 16 shown in FIG. 2 is constructed using a material that has an electrostrictive effect, it is possible to accurately realize minute displacements as expressed by equation (7) with a simple configuration. .

発明の効果 以上の説明から明らかなように本発明の半導体レーザビ
ーム走査装置は、光源となる半導体レーザと、前記半導
体レーザが発するレーザ光を平行レーザ光とするコリメ
ートレンズと、第1の方向に移動しながら、前記レーザ
光を照射されるレーザ光被照射部材と、前記レーザ光被
照射部材の前記第1の方向の移動の速度変動を検出する
速度変動検出手段と、前記レーザ光被照射部材の前記第
1の方向と平行でない第2の方向に対して前記レーザ光
の走査を行なうレーザ光走査手段と、前記速度変動検出
手段によって検出される前記速度変動に応じて、前記半
導体レーザと前記コリメートレンズを前記第1の方向に
対応する方向に相対的に移動させる光学系移動手段とを
具備するように構成したものであシ、これにより、レー
ザ光被照射部材の移動速度変動が原因で起こるレーザ光
走査線のピッチむらを補正し、高精度の走査を行なえる
という浸れた効果が得られる。
Effects of the Invention As is clear from the above description, the semiconductor laser beam scanning device of the present invention includes a semiconductor laser serving as a light source, a collimating lens that converts the laser light emitted by the semiconductor laser into parallel laser light, and a laser beam irradiated member that is irradiated with the laser beam while moving; a speed fluctuation detection means for detecting a speed fluctuation of the movement of the laser beam irradiated member in the first direction; a laser beam scanning means for scanning the laser beam in a second direction that is not parallel to the first direction; and a laser beam scanning means for scanning the laser beam in a second direction that is not parallel to the first direction; and an optical system moving means for moving the collimating lens relatively in a direction corresponding to the first direction, whereby the movement of the member to be irradiated with the laser beam is caused by fluctuations in the moving speed of the laser beam irradiated member. It is possible to correct the pitch unevenness of the laser beam scanning line that occurs, and to achieve the unique effect of being able to perform highly accurate scanning.

さらに、光学系移動手段に電歪効果を持つ部材を利用す
ることにより、簡易な構成で、半導体レーザとコリメー
トレンズの相対的移動を精度良く実現できるという効果
が得られる。
Further, by using a member having an electrostrictive effect in the optical system moving means, it is possible to achieve the effect that relative movement between the semiconductor laser and the collimating lens can be realized with high accuracy with a simple configuration.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の半導体レーザビームプリンタの斜視図、
第2図は本発明の一実施例における半導体レーザ光走査
装置の斜視図、第3図は同正面図である。 8.17・°°・・・半4体レーザ、9,18・川・・
コリメートレンズ、10山・・・回転多面鏡、15・川
・・感光体回転速度変動検出装置、16・・・・・・コ
リメートレンズ移動装置。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第3
図 IK
Figure 1 is a perspective view of a conventional semiconductor laser beam printer.
FIG. 2 is a perspective view of a semiconductor laser beam scanning device according to an embodiment of the present invention, and FIG. 3 is a front view thereof. 8.17・°°・・・Half-four-body laser, 9,18・River...
Collimating lens, 10...Rotating polygon mirror, 15...Photoconductor rotational speed fluctuation detection device, 16...Collimating lens moving device. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 3
Figure IK

Claims (2)

【特許請求の範囲】[Claims] (1)光源となる半導体レーザと、前記半導体レーザが
発するレーザ光を平行レーザ光とするコリメートレンズ
と、第1の方向に移動しながら、前記レーザ光を照射さ
れるレーザ光被照射部材と、前記レーザ光被照射部材の
前記第1の方向の移動の速度変動を検出する速度変動検
出手段と、前記レーザ光被照射部材の前記第1の方向と
平行でない第2の方向に対して前記レーザ光の走査を行
なうレーザ光走査手段と、前記速度変動検出手段によっ
て検出される前記速度変動に応じて、前記半導体レーザ
と前記コリメートレンズを前記第1の方向に対応する方
向に相対的に移動させる光学系移動手段とを具備する事
を特徴とする半導体レーザ光走査装置。
(1) a semiconductor laser serving as a light source; a collimating lens that converts laser light emitted by the semiconductor laser into parallel laser light; and a member to be irradiated with laser light that is irradiated with the laser light while moving in a first direction; speed fluctuation detection means for detecting speed fluctuations in the movement of the member to be irradiated with the laser beam in the first direction; The semiconductor laser and the collimating lens are relatively moved in a direction corresponding to the first direction according to the speed fluctuation detected by the laser beam scanning means for scanning light and the speed fluctuation detection means. 1. A semiconductor laser beam scanning device characterized by comprising an optical system moving means.
(2)光学系移動手段に電歪効果を持つ部材を利用した
事を特徴とする特許請求の範囲第1項記載の半導体レー
ザ光走査装置。
(2) A semiconductor laser beam scanning device according to claim 1, wherein a member having an electrostrictive effect is used for the optical system moving means.
JP59191024A 1984-09-12 1984-09-12 Semiconductor laser light scanner Pending JPS6167818A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59191024A JPS6167818A (en) 1984-09-12 1984-09-12 Semiconductor laser light scanner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59191024A JPS6167818A (en) 1984-09-12 1984-09-12 Semiconductor laser light scanner

Publications (1)

Publication Number Publication Date
JPS6167818A true JPS6167818A (en) 1986-04-08

Family

ID=16267622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59191024A Pending JPS6167818A (en) 1984-09-12 1984-09-12 Semiconductor laser light scanner

Country Status (1)

Country Link
JP (1) JPS6167818A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5504613A (en) * 1992-10-09 1996-04-02 Ricoh Company, Ltd. Optical scanner
WO2011009374A1 (en) * 2009-07-20 2011-01-27 吴伟佳 Image scanning device with speed compensation unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5504613A (en) * 1992-10-09 1996-04-02 Ricoh Company, Ltd. Optical scanner
WO2011009374A1 (en) * 2009-07-20 2011-01-27 吴伟佳 Image scanning device with speed compensation unit

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