JPS6167513U - - Google Patents

Info

Publication number
JPS6167513U
JPS6167513U JP15273984U JP15273984U JPS6167513U JP S6167513 U JPS6167513 U JP S6167513U JP 15273984 U JP15273984 U JP 15273984U JP 15273984 U JP15273984 U JP 15273984U JP S6167513 U JPS6167513 U JP S6167513U
Authority
JP
Japan
Prior art keywords
light source
origin position
light
scale
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15273984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15273984U priority Critical patent/JPS6167513U/ja
Publication of JPS6167513U publication Critical patent/JPS6167513U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP15273984U 1984-10-09 1984-10-09 Pending JPS6167513U (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15273984U JPS6167513U (enEXAMPLES) 1984-10-09 1984-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15273984U JPS6167513U (enEXAMPLES) 1984-10-09 1984-10-09

Publications (1)

Publication Number Publication Date
JPS6167513U true JPS6167513U (enEXAMPLES) 1986-05-09

Family

ID=30710791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15273984U Pending JPS6167513U (enEXAMPLES) 1984-10-09 1984-10-09

Country Status (1)

Country Link
JP (1) JPS6167513U (enEXAMPLES)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926553B1 (enEXAMPLES) * 1970-03-24 1974-07-10
JPS5099357A (enEXAMPLES) * 1973-12-28 1975-08-07
JPS59164914A (ja) * 1983-03-10 1984-09-18 Yokogawa Hokushin Electric Corp 光学式スケ−ル読取装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926553B1 (enEXAMPLES) * 1970-03-24 1974-07-10
JPS5099357A (enEXAMPLES) * 1973-12-28 1975-08-07
JPS59164914A (ja) * 1983-03-10 1984-09-18 Yokogawa Hokushin Electric Corp 光学式スケ−ル読取装置

Similar Documents

Publication Publication Date Title
CA2007619A1 (en) Optical pickup apparatus utilizing a diffraction device
US5026985A (en) Method and apparatus for detecting a reference position of a rotating scale with two sensors
DE58904369D1 (de) Positionsmesseinrichtung.
EP0397202A3 (en) Encoder
US4998798A (en) Encoder having long length measuring stroke
JPS6167513U (enEXAMPLES)
JPS6167512U (enEXAMPLES)
JPS6167514U (enEXAMPLES)
JPH03115920A (ja) 零点位置検出装置
JPS645108U (enEXAMPLES)
JPS61105805U (enEXAMPLES)
JPS63195217U (enEXAMPLES)
JPH049525Y2 (enEXAMPLES)
SU1693369A1 (ru) Устройство дл определени нулевого положени объекта
JPS6079110U (ja) 距離測定装置
JPH0317210Y2 (enEXAMPLES)
JPS63124675U (enEXAMPLES)
JPH0265115U (enEXAMPLES)
JPS611183U (ja) 距離測定装置
JPS6048104U (ja) 光学式表面変位検出装置
JPS6246358U (enEXAMPLES)
JPS6313414U (enEXAMPLES)
JPS6475985A (en) Method of measuring distance by hologram light scanning
JPS62228905A (ja) 距離測定装置
JPS6138507U (ja) 光学的パタ−ン自動検査装置