JPS6164980U - - Google Patents
Info
- Publication number
- JPS6164980U JPS6164980U JP14968084U JP14968084U JPS6164980U JP S6164980 U JPS6164980 U JP S6164980U JP 14968084 U JP14968084 U JP 14968084U JP 14968084 U JP14968084 U JP 14968084U JP S6164980 U JPS6164980 U JP S6164980U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- main body
- casing
- tip
- working means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149680U JPH0347834Y2 (fr) | 1984-10-02 | 1984-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149680U JPH0347834Y2 (fr) | 1984-10-02 | 1984-10-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6164980U true JPS6164980U (fr) | 1986-05-02 |
| JPH0347834Y2 JPH0347834Y2 (fr) | 1991-10-11 |
Family
ID=30707849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984149680U Expired JPH0347834Y2 (fr) | 1984-10-02 | 1984-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0347834Y2 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011082532A (ja) * | 2001-07-13 | 2011-04-21 | Brooks Automation Inc | 独立多エンドエフェクタを備えた基板移送装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5590290A (en) * | 1978-12-07 | 1980-07-08 | Reis Walter Gmbh & Co | Handling device |
| JPS5890481A (ja) * | 1981-11-18 | 1983-05-30 | 株式会社日立製作所 | 産業用ロボツト |
| JPS5924292U (ja) * | 1982-08-05 | 1984-02-15 | 東京エレクトロン株式会社 | 腕状機構 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924292B2 (ja) * | 1976-10-15 | 1984-06-08 | カヤバ工業株式会社 | 車高調整式シヨツクアブソ−バ |
-
1984
- 1984-10-02 JP JP1984149680U patent/JPH0347834Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5590290A (en) * | 1978-12-07 | 1980-07-08 | Reis Walter Gmbh & Co | Handling device |
| JPS5890481A (ja) * | 1981-11-18 | 1983-05-30 | 株式会社日立製作所 | 産業用ロボツト |
| JPS5924292U (ja) * | 1982-08-05 | 1984-02-15 | 東京エレクトロン株式会社 | 腕状機構 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011082532A (ja) * | 2001-07-13 | 2011-04-21 | Brooks Automation Inc | 独立多エンドエフェクタを備えた基板移送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0347834Y2 (fr) | 1991-10-11 |