JPS6164980U - - Google Patents
Info
- Publication number
- JPS6164980U JPS6164980U JP14968084U JP14968084U JPS6164980U JP S6164980 U JPS6164980 U JP S6164980U JP 14968084 U JP14968084 U JP 14968084U JP 14968084 U JP14968084 U JP 14968084U JP S6164980 U JPS6164980 U JP S6164980U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- main body
- casing
- tip
- working means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案のクリーンロボツトの断面図、
第２図は作業手段としてのホルダーの平面図、第
３図は伝達系のスケルトン図である。
１……クリーンロボツト、２……本体、３……
多関節アーム、４……第１のアーム、５……第２
のアーム、６……先端アーム、７，８，９……軸
、１２，１３，１４……ギヤモータ、１５，１７
……タイミングベルト、１６，１８……タイミン
グプーリ、２０……真空ポンプ、２３……排気チ
ユーブ、２４……吸引チユーブ。
Figure 1 is a cross-sectional view of the clean robot of the present invention.
FIG. 2 is a plan view of the holder as a working means, and FIG. 3 is a skeleton diagram of the transmission system. 1...Clean robot, 2...Main body, 3...
Multi-jointed arm, 4...first arm, 5...second
Arm, 6... Tip arm, 7, 8, 9... Shaft, 12, 13, 14... Gear motor, 15, 17
...Timing belt, 16, 18...Timing pulley, 20...Vacuum pump, 23...Exhaust tube, 24...Suction tube.
Claims (1)
ームを構成し、先端アームには作業手段を支持し
、本体、各アームがそれぞれ内部に駆動源、伝達
手段等を有してケーシングで囲まれ、かつそれぞ
れのケーシング内には、排気手段を設け、先端ア
ームに設けた作業手段をアーム、本体よりも上方
に位置させてなることを特徴とするクリーンロボ
ツト。 A multi-jointed arm is constructed by connecting the arms from the main body in a joint-like manner, the tip arm supports a working means, and the main body and each arm each have a drive source, transmission means, etc. inside and are surrounded by a casing. , and each casing is provided with an exhaust means, and the working means provided on the tip arm is positioned above the arm and the main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149680U JPH0347834Y2 (en) | 1984-10-02 | 1984-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149680U JPH0347834Y2 (en) | 1984-10-02 | 1984-10-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6164980U true JPS6164980U (en) | 1986-05-02 |
| JPH0347834Y2 JPH0347834Y2 (en) | 1991-10-11 |
Family
ID=30707849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984149680U Expired JPH0347834Y2 (en) | 1984-10-02 | 1984-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0347834Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011082532A (en) * | 2001-07-13 | 2011-04-21 | Brooks Automation Inc | Substrate transport apparatus with multiple independent end effectors |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5590290A (en) * | 1978-12-07 | 1980-07-08 | Reis Walter Gmbh & Co | Handling device |
| JPS5890481A (en) * | 1981-11-18 | 1983-05-30 | 株式会社日立製作所 | Industrial robot |
| JPS5924292U (en) * | 1982-08-05 | 1984-02-15 | 東京エレクトロン株式会社 | arm mechanism |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924292B2 (en) * | 1976-10-15 | 1984-06-08 | カヤバ工業株式会社 | Vehicle height adjustable shock absorber |
-
1984
- 1984-10-02 JP JP1984149680U patent/JPH0347834Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5590290A (en) * | 1978-12-07 | 1980-07-08 | Reis Walter Gmbh & Co | Handling device |
| JPS5890481A (en) * | 1981-11-18 | 1983-05-30 | 株式会社日立製作所 | Industrial robot |
| JPS5924292U (en) * | 1982-08-05 | 1984-02-15 | 東京エレクトロン株式会社 | arm mechanism |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011082532A (en) * | 2001-07-13 | 2011-04-21 | Brooks Automation Inc | Substrate transport apparatus with multiple independent end effectors |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0347834Y2 (en) | 1991-10-11 |