JPS6164980U - - Google Patents

Info

Publication number
JPS6164980U
JPS6164980U JP14968084U JP14968084U JPS6164980U JP S6164980 U JPS6164980 U JP S6164980U JP 14968084 U JP14968084 U JP 14968084U JP 14968084 U JP14968084 U JP 14968084U JP S6164980 U JPS6164980 U JP S6164980U
Authority
JP
Japan
Prior art keywords
arm
main body
casing
tip
working means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14968084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0347834Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149680U priority Critical patent/JPH0347834Y2/ja
Publication of JPS6164980U publication Critical patent/JPS6164980U/ja
Application granted granted Critical
Publication of JPH0347834Y2 publication Critical patent/JPH0347834Y2/ja
Expired legal-status Critical Current

Links

JP1984149680U 1984-10-02 1984-10-02 Expired JPH0347834Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149680U JPH0347834Y2 (enrdf_load_stackoverflow) 1984-10-02 1984-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149680U JPH0347834Y2 (enrdf_load_stackoverflow) 1984-10-02 1984-10-02

Publications (2)

Publication Number Publication Date
JPS6164980U true JPS6164980U (enrdf_load_stackoverflow) 1986-05-02
JPH0347834Y2 JPH0347834Y2 (enrdf_load_stackoverflow) 1991-10-11

Family

ID=30707849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149680U Expired JPH0347834Y2 (enrdf_load_stackoverflow) 1984-10-02 1984-10-02

Country Status (1)

Country Link
JP (1) JPH0347834Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011082532A (ja) * 2001-07-13 2011-04-21 Brooks Automation Inc 独立多エンドエフェクタを備えた基板移送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5590290A (en) * 1978-12-07 1980-07-08 Reis Walter Gmbh & Co Handling device
JPS5890481A (ja) * 1981-11-18 1983-05-30 株式会社日立製作所 産業用ロボツト
JPS5924292U (ja) * 1982-08-05 1984-02-15 東京エレクトロン株式会社 腕状機構

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5590290A (en) * 1978-12-07 1980-07-08 Reis Walter Gmbh & Co Handling device
JPS5890481A (ja) * 1981-11-18 1983-05-30 株式会社日立製作所 産業用ロボツト
JPS5924292U (ja) * 1982-08-05 1984-02-15 東京エレクトロン株式会社 腕状機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011082532A (ja) * 2001-07-13 2011-04-21 Brooks Automation Inc 独立多エンドエフェクタを備えた基板移送装置

Also Published As

Publication number Publication date
JPH0347834Y2 (enrdf_load_stackoverflow) 1991-10-11

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