JPS6164888A - エツチング液管理方法 - Google Patents

エツチング液管理方法

Info

Publication number
JPS6164888A
JPS6164888A JP59185862A JP18586284A JPS6164888A JP S6164888 A JPS6164888 A JP S6164888A JP 59185862 A JP59185862 A JP 59185862A JP 18586284 A JP18586284 A JP 18586284A JP S6164888 A JPS6164888 A JP S6164888A
Authority
JP
Japan
Prior art keywords
soln
anode
hydrochloric acid
etching
mentioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59185862A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0533315B2 (enExample
Inventor
Hirohiko Haniyu
博彦 羽生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59185862A priority Critical patent/JPS6164888A/ja
Publication of JPS6164888A publication Critical patent/JPS6164888A/ja
Publication of JPH0533315B2 publication Critical patent/JPH0533315B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/46Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Weting (AREA)
JP59185862A 1984-09-05 1984-09-05 エツチング液管理方法 Granted JPS6164888A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59185862A JPS6164888A (ja) 1984-09-05 1984-09-05 エツチング液管理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59185862A JPS6164888A (ja) 1984-09-05 1984-09-05 エツチング液管理方法

Publications (2)

Publication Number Publication Date
JPS6164888A true JPS6164888A (ja) 1986-04-03
JPH0533315B2 JPH0533315B2 (enExample) 1993-05-19

Family

ID=16178180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59185862A Granted JPS6164888A (ja) 1984-09-05 1984-09-05 エツチング液管理方法

Country Status (1)

Country Link
JP (1) JPS6164888A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02153101A (ja) * 1988-12-02 1990-06-12 Sanyo Mokuzai Boufu Kk 木レンガユニット

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02153101A (ja) * 1988-12-02 1990-06-12 Sanyo Mokuzai Boufu Kk 木レンガユニット

Also Published As

Publication number Publication date
JPH0533315B2 (enExample) 1993-05-19

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term