JPS6161685A - 機械部品等の洗浄方法 - Google Patents
機械部品等の洗浄方法Info
- Publication number
- JPS6161685A JPS6161685A JP18331984A JP18331984A JPS6161685A JP S6161685 A JPS6161685 A JP S6161685A JP 18331984 A JP18331984 A JP 18331984A JP 18331984 A JP18331984 A JP 18331984A JP S6161685 A JPS6161685 A JP S6161685A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- liquid
- cleaned
- supply port
- liquid supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005406 washing Methods 0.000 title description 3
- 238000004140 cleaning Methods 0.000 claims description 67
- 239000007788 liquid Substances 0.000 claims description 63
- 238000000034 method Methods 0.000 claims description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- 230000008929 regeneration Effects 0.000 description 5
- 238000011069 regeneration method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18331984A JPS6161685A (ja) | 1984-08-31 | 1984-08-31 | 機械部品等の洗浄方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18331984A JPS6161685A (ja) | 1984-08-31 | 1984-08-31 | 機械部品等の洗浄方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6161685A true JPS6161685A (ja) | 1986-03-29 |
JPS6353872B2 JPS6353872B2 (enrdf_load_stackoverflow) | 1988-10-25 |
Family
ID=16133618
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18331984A Granted JPS6161685A (ja) | 1984-08-31 | 1984-08-31 | 機械部品等の洗浄方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6161685A (enrdf_load_stackoverflow) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59195654A (ja) * | 1983-04-21 | 1984-11-06 | Nec Corp | ホトマスクの洗浄方法および洗浄装置 |
-
1984
- 1984-08-31 JP JP18331984A patent/JPS6161685A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59195654A (ja) * | 1983-04-21 | 1984-11-06 | Nec Corp | ホトマスクの洗浄方法および洗浄装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6353872B2 (enrdf_load_stackoverflow) | 1988-10-25 |
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