JPS6161415A - Parts retrieval and delivery device - Google Patents

Abstract

PURPOSE:To enable to reduce the manhour for mask retrieval and to smoothly produce materials to be processed by a method wherein the production is controlled by the computer, which is connected on-line mutually with the automatic storage store, the transferring units and the conveying units, and the terminal units. CONSTITUTION:This device consists of a computer CPU, which is connected on-line mutually with an automatic storage store ST, transferring units R1, R2... and conveying units C1, C2..., terminal units T1, T2..., the automatic storage store ST, the transferring units R1, R2..., and the conveying units C1, C2.... The terminal units detect the passage of materials to be processed to every manufacturing facility and the passage of parts to the automatic storage store ST and transmit signal to the computer CPU. The computer CPU retrieves a parts in a process, wherein the parts is needed for the material to be processed, at the same time as when the process starts a processing to the material to be processed on the basis of the processing order of the material to be processed, which is set in advance, and data from the terminal units and transmits information on the name of the parts and its delivery destination to the automatic storage store ST, the transferring units and the conveying units through the terminal units. The automatic storage store, the transferring units and the conveying units deliver the parts to the facility, where the processing is being performed on the material to be processed, on the basis of the information transmitted and after the processing to the material to be processed is completed, the automatic storage store, the transferring units and the conveying units put the material to be processed the the parts together and deliver the material to be processed and the parts to the following manufacturing facility, where the following processing is performed on the material to be processed.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is directed to the search and arrangement of masks, which are important components in process-oriented production lines that produce a variety of finished products from a single material, particularly in semiconductor device production lines. This relates to a device for carrying out this process.

[Prior art]

The semiconductor device manufacturing line processes silicon single crystal substrates (hereinafter referred to as wafers J'%) and finishes them into products. Usually, dozens to hundreds of products are made on one production line, but these products are produced in the same production equipment, and their classification as a product depends on how the masks on which the patterns are printed are combined. It depends on how you use it.

[Problem that the invention seeks to solve]

The mask, which is the only component in semiconductor device manufacturing, is required to produce dozens of products, and photosensitive IIt1 resin is used in the process of baking the entire pattern onto the wafer using the mask. Since a photo-etching method is used, there is a limit to the time allowed from applying the photosensitive sphere resin to setting the mask, and delays in mask placement result in unnecessary re-sealing work. Furthermore, searching and managing dozens of masks requires a large amount of man-hours.

The present invention solves these problems and provides an apparatus for smooth production.

[Failure to solve the problem]

The present invention utilizes computers connected online in a production line that finishes a variety of finished products from a single material.
PU and the terminal device T1. It consists of T2, automatic storage ST, transfer devices R4, R2, and conveyance devices C2, C2,
The terminal device has a function of detecting the passage of the workpiece in each manufacturing equipment and the passage of the parts to the automatic storage, and transmitting a signal to the computer, and the computer performs the processing of the workpiece set in advance. Based on the order and data from the terminal device, the workpiece searches for the part at the start of the previous process that requires the part, and sends the part name and delivery destination information through the terminal device to automatically store and move the part. The automatic storage, transfer device, and transfer device have a function of transmitting the information to the loading device and the conveyance device, and the automatic storage, transfer device, and conveyance device distribute the parts to the equipment processing the workpiece based on the transmitted information, and The parts searching and serving apparatus is characterized in that it has a function of combining the workpiece and the part after processing of the object and distributing them to manufacturing equipment for the next processing.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a block diagram illustrating the present invention.

MTI, MT2, . . . are equipment groups for previous processes that require masks, and MMI, MMZ, . . . are equipment groups that require masks. TI, T2... are terminal devices, which are composed of a keyboard section, a card read section, a display section, and a communication control section, and detect the start and completion of processing in each manufacturing facility using the card attached to the product lot. Send data to computer. Furthermore, the card attached to the mask detects when the mask is placed in or taken out of the automatic storage, and the data is sent to the computer.

The automatic storage ST has a function of receiving information about mask salt storage or removal, and automatically takes out the corresponding number of masks stored.

The transfer devices R1, R2... and the conveyance devices C1, C2... have the function of moving the objects so that they arrive at the predetermined destinations by receiving information on the names and destinations of the objects. ing.

The processing order of product lots, processing time, and required masks are set in advance in the computer CPU, and processing is performed based on the product lot and mask data sent from the terminal device and the preset data. However, regarding this process, first, search for missing masks based on the product lot data sent from each facility and the mask storage status in the automatic storage.1. The information is displayed on the display section of the terminal device.

Based on this information, administrators can efficiently arrange for masks that are in short supply.

According to this embodiment, when an attempt is made to start work on the equipment MTI in the process before the equipment that requires a mask mask, the computer CPU instantly searches for the required mask based on the information from the terminal device T2, and selects the corresponding mask. If not, terminal device T2
A warning is displayed on the display to prevent unnecessary work.

If the existence of a mask is confirmed as a result of the mask search, the name of the corresponding mask and information on the equipment MTI to which the mask is to be served are output to the terminal device T1. The terminal device T1 outputs the sent information to the automatic storage ST, the transfer device R1°R2, and the transport device CI, and delivers the mask to the equipment MTI. When the processing of the product loft is completed at the MTI facility, the product lot and the mask are put together and delivered to the MMI and MMZ facilities for the pattern baking process.

This embodiment has a transfer device and a conveyance device, but even if these devices are not available, the information from the computer can be displayed on the display of the terminal device, and the automatic storage will automatically transfer the corresponding masks. By extracting the information, there is no waste in the work and there is no need to search.

〔Effect of the invention〕

As explained above, according to the present invention, it is possible to efficiently and accurately arrange masks, prevent wasteful work, and reduce the number of man-hours for searching for masks.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing one embodiment of the present invention. MTI, MT2...Pre-process equipment for equipment that requires a mask, MMI, MM2...Equipment that requires a mask, CPU...Conbeater, ST...Automatic storage, Tl, T2...・Terminal device, R1, R2...
Transfer device, C1, C2...conveyance device.

Claims (1)

[Claims] (1) In a manufacturing line that finishes a variety of finished products from a single material, computers connected online,
It consists of a terminal device, an automatic storage, a transfer device, and a conveyance device, and the terminal device detects the passage of workpieces and parts to the automatic storage for each manufacturing equipment, and sends a signal to the computer. Based on the preset processing order of the workpiece and data from the terminal device, the computer searches for the part at the same time as the start of the previous process that requires the workpiece. It has a function to send the part name and delivery destination information to the automatic storage, transfer device, and conveyance device through the terminal device, and the automatic storage, transfer device, and conveyance device select parts based on the transmitted information. It is characterized by having a function of distributing the workpiece to equipment processing the workpiece, combining the workpiece and the parts after completion of processing the workpiece, and distributing the workpiece to the manufacturing equipment that performs the next processing. Parts search and serving device.