JPS6161316U - - Google Patents

Info

Publication number
JPS6161316U
JPS6161316U JP14587284U JP14587284U JPS6161316U JP S6161316 U JPS6161316 U JP S6161316U JP 14587284 U JP14587284 U JP 14587284U JP 14587284 U JP14587284 U JP 14587284U JP S6161316 U JPS6161316 U JP S6161316U
Authority
JP
Japan
Prior art keywords
hole
cap
outer ring
fit
peripheral wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14587284U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332973Y2 (US20030199744A1-20031023-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984145872U priority Critical patent/JPS6332973Y2/ja
Publication of JPS6161316U publication Critical patent/JPS6161316U/ja
Application granted granted Critical
Publication of JPS6332973Y2 publication Critical patent/JPS6332973Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Burglar Alarm Systems (AREA)
  • Hand Tools For Fitting Together And Separating, Or Other Hand Tools (AREA)
JP1984145872U 1984-09-28 1984-09-28 Expired JPS6332973Y2 (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984145872U JPS6332973Y2 (US20030199744A1-20031023-C00003.png) 1984-09-28 1984-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984145872U JPS6332973Y2 (US20030199744A1-20031023-C00003.png) 1984-09-28 1984-09-28

Publications (2)

Publication Number Publication Date
JPS6161316U true JPS6161316U (US20030199744A1-20031023-C00003.png) 1986-04-25
JPS6332973Y2 JPS6332973Y2 (US20030199744A1-20031023-C00003.png) 1988-09-02

Family

ID=30704123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984145872U Expired JPS6332973Y2 (US20030199744A1-20031023-C00003.png) 1984-09-28 1984-09-28

Country Status (1)

Country Link
JP (1) JPS6332973Y2 (US20030199744A1-20031023-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120104112A (ko) * 2011-03-11 2012-09-20 가부시키가이샤 후지킨 볼트 풀림 방지 장치, 그 부착 방법과 부착 지그, 유체 제어 장치 및 기판 처리 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619493A (en) * 1979-07-27 1981-02-24 Tokyo Shibaura Electric Co Rotary plug seal

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619493A (en) * 1979-07-27 1981-02-24 Tokyo Shibaura Electric Co Rotary plug seal

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120104112A (ko) * 2011-03-11 2012-09-20 가부시키가이샤 후지킨 볼트 풀림 방지 장치, 그 부착 방법과 부착 지그, 유체 제어 장치 및 기판 처리 장치
JP2012189160A (ja) * 2011-03-11 2012-10-04 Tokyo Electron Ltd ボルトの緩み防止装置ならびにその取付方法および取付治具
TWI558922B (zh) * 2011-03-11 2016-11-21 東京威力科創股份有限公司 螺栓鬆弛防止裝置及其安裝方法、第1、第2安裝治具、流體控制裝置及基板處理裝置

Also Published As

Publication number Publication date
JPS6332973Y2 (US20030199744A1-20031023-C00003.png) 1988-09-02

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