JPS6161133U - - Google Patents

Info

Publication number
JPS6161133U
JPS6161133U JP14427684U JP14427684U JPS6161133U JP S6161133 U JPS6161133 U JP S6161133U JP 14427684 U JP14427684 U JP 14427684U JP 14427684 U JP14427684 U JP 14427684U JP S6161133 U JPS6161133 U JP S6161133U
Authority
JP
Japan
Prior art keywords
vacuum chuck
negative pressure
opening area
pressure hole
adapter plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14427684U
Other languages
English (en)
Other versions
JPH0137871Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984144276U priority Critical patent/JPH0137871Y2/ja
Publication of JPS6161133U publication Critical patent/JPS6161133U/ja
Application granted granted Critical
Publication of JPH0137871Y2 publication Critical patent/JPH0137871Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係るアダプタプレートの真空
チヤツクへの適用状態を部分的に破断して示す平
面図であり、第２図は第１図に示した−に沿
つて得られた断面図である。 １０：アダプタプレート、１２：真空チヤツク
、１４：面板、１４ａ：支持面、２０：負圧孔、
２８：貫通孔。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空チヤツクの面板上に配置されるアダプター
    プレートであつて、前記面板に形成された負圧孔
    の開口領域に対応する部分に、前記負圧孔の開口
    面積よりも小さな横断面を有する小径の貫通孔が
    形成されていることを特徴とする、真空チヤツク
    のためのアダプタープレート。
JP1984144276U 1984-09-26 1984-09-26 Expired JPH0137871Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984144276U JPH0137871Y2 (ja) 1984-09-26 1984-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984144276U JPH0137871Y2 (ja) 1984-09-26 1984-09-26

Publications (2)

Publication Number Publication Date
JPS6161133U true JPS6161133U (ja) 1986-04-24
JPH0137871Y2 JPH0137871Y2 (ja) 1989-11-14

Family

ID=30702561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984144276U Expired JPH0137871Y2 (ja) 1984-09-26 1984-09-26

Country Status (1)

Country Link
JP (1) JPH0137871Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012206247A (ja) * 2011-03-16 2012-10-25 Tdk Corp シート吸着装置およびシート積層装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840337U (ja) * 1981-09-11 1983-03-16 日立精工株式会社 ウエハ研削盤における真空吸着装置
JPS59109140U (ja) * 1983-01-11 1984-07-23 株式会社デイスコ ウエ−ハバキユ−ムチヤツクテ−ブル

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840337B2 (ja) * 1976-03-31 1983-09-05 株式会社日立製作所 半導体集積回路の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840337U (ja) * 1981-09-11 1983-03-16 日立精工株式会社 ウエハ研削盤における真空吸着装置
JPS59109140U (ja) * 1983-01-11 1984-07-23 株式会社デイスコ ウエ−ハバキユ−ムチヤツクテ−ブル

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012206247A (ja) * 2011-03-16 2012-10-25 Tdk Corp シート吸着装置およびシート積層装置

Also Published As

Publication number Publication date
JPH0137871Y2 (ja) 1989-11-14

Similar Documents

Publication Publication Date Title
JPS6161133U (ja)
JPS6175870U (ja)
JPS6161131U (ja)
JPS6327314U (ja)
JPH0278225U (ja)
JPS63104346U (ja)
JPS6292023U (ja)
JPS61152364U (ja)
JPS61112648U (ja)
JPS6386937U (ja)
JPS61102473U (ja)
JPS6197327U (ja)
JPS61198002U (ja)
JPH01156832U (ja)
JPS6129115U (ja) 汎用ボルト
JPH0329638U (ja)
JPS61140858U (ja)
JPS6240326U (ja)
JPS6187288U (ja)
JPS6191631U (ja)
JPH0246191U (ja)
JPS61186264U (ja)
JPS60186183U (ja) セラミツク定盤
JPH0294192U (ja)
JPS62124782U (ja)