JPS6161053B2 - - Google Patents

Info

Publication number
JPS6161053B2
JPS6161053B2 JP14396178A JP14396178A JPS6161053B2 JP S6161053 B2 JPS6161053 B2 JP S6161053B2 JP 14396178 A JP14396178 A JP 14396178A JP 14396178 A JP14396178 A JP 14396178A JP S6161053 B2 JPS6161053 B2 JP S6161053B2
Authority
JP
Japan
Prior art keywords
external force
force
signal
moving body
detection signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14396178A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5569010A (en
Inventor
Kyokazu Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP14396178A priority Critical patent/JPS5569010A/ja
Publication of JPS5569010A publication Critical patent/JPS5569010A/ja
Publication of JPS6161053B2 publication Critical patent/JPS6161053B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Machine Tool Copy Controls (AREA)
JP14396178A 1978-11-21 1978-11-21 Converting unit for external force into displacement Granted JPS5569010A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14396178A JPS5569010A (en) 1978-11-21 1978-11-21 Converting unit for external force into displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14396178A JPS5569010A (en) 1978-11-21 1978-11-21 Converting unit for external force into displacement

Publications (2)

Publication Number Publication Date
JPS5569010A JPS5569010A (en) 1980-05-24
JPS6161053B2 true JPS6161053B2 (fr) 1986-12-24

Family

ID=15351070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14396178A Granted JPS5569010A (en) 1978-11-21 1978-11-21 Converting unit for external force into displacement

Country Status (1)

Country Link
JP (1) JPS5569010A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2422935B1 (fr) 2010-08-31 2015-02-25 Kabushiki Kaisha Yaskawa Denki Robot, système robotisé, dispositif de commande de robot et procédé de détermination d'état
JP5418491B2 (ja) * 2010-12-28 2014-02-19 株式会社安川電機 ロボット
JP5565756B2 (ja) * 2010-12-28 2014-08-06 株式会社安川電機 ロボットシステム
JP5522403B2 (ja) * 2010-12-28 2014-06-18 株式会社安川電機 ロボットシステム及びロボットの状態判定方法

Also Published As

Publication number Publication date
JPS5569010A (en) 1980-05-24

Similar Documents

Publication Publication Date Title
US6616031B2 (en) Apparatus and method for bond force control
US4843293A (en) Apparatus for controlling servo system employing piezo-electric actuator
US4975643A (en) Measurement and control of magnetostrictive transducer motion using strain sensors
US4228591A (en) Measurement sensing devices
JPH0335055B2 (fr)
JPS6161053B2 (fr)
US3693066A (en) Natural feeling common drive plotter-digitizer
US2679622A (en) Curve follower
US2466691A (en) Electromagnetic oscillograph
US3693417A (en) Microhardness tester regulated by a magnetostrictive control arrangement
JP2000222845A (ja) 偏揺れ修正を備えた磁気ヘッド及びディスクテスタ―
US4420123A (en) Force rate sensor assembly
US2651015A (en) Electric aircraft control apparatus
US3059236A (en) Control system
US3167667A (en) Piezoelectric force controller
JP2821837B2 (ja) 加速度フィードバック付き微動位置決め装置
JPS63216110A (ja) 高速移動テ−ブル
JPS6174901A (ja) ノズル・フラツパ機構の変位調整機構
JP2853794B2 (ja) 表面形状測定機の測定力調整手段
US3088059A (en) Massa
US3141339A (en) Control device using gyroscope precession for measurement of displacement
US3503251A (en) Vibrating structure displacement measuring instrument
US2882864A (en) Automatic machine control systems
US20070267580A1 (en) Drive stage for scanning probe apparatus, and scanning probe apparatus
JPH01136582A (ja) 速度制御装置