JPS6159345U - - Google Patents

Info

Publication number
JPS6159345U
JPS6159345U JP14464084U JP14464084U JPS6159345U JP S6159345 U JPS6159345 U JP S6159345U JP 14464084 U JP14464084 U JP 14464084U JP 14464084 U JP14464084 U JP 14464084U JP S6159345 U JPS6159345 U JP S6159345U
Authority
JP
Japan
Prior art keywords
carrier
wafer
rotary table
container
stores
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14464084U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14464084U priority Critical patent/JPS6159345U/ja
Publication of JPS6159345U publication Critical patent/JPS6159345U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container Filling Or Packaging Operations (AREA)
  • Control And Other Processes For Unpacking Of Materials (AREA)
  • Warehouses Or Storage Devices (AREA)
JP14464084U 1984-09-25 1984-09-25 Pending JPS6159345U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14464084U JPS6159345U (zh) 1984-09-25 1984-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14464084U JPS6159345U (zh) 1984-09-25 1984-09-25

Publications (1)

Publication Number Publication Date
JPS6159345U true JPS6159345U (zh) 1986-04-21

Family

ID=30702908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14464084U Pending JPS6159345U (zh) 1984-09-25 1984-09-25

Country Status (1)

Country Link
JP (1) JPS6159345U (zh)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5986240A (ja) * 1982-11-09 1984-05-18 Nec Kyushu Ltd フオトマスク収納箱

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5986240A (ja) * 1982-11-09 1984-05-18 Nec Kyushu Ltd フオトマスク収納箱

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