JPS6158969B2 - - Google Patents

Info

Publication number
JPS6158969B2
JPS6158969B2 JP56130866A JP13086681A JPS6158969B2 JP S6158969 B2 JPS6158969 B2 JP S6158969B2 JP 56130866 A JP56130866 A JP 56130866A JP 13086681 A JP13086681 A JP 13086681A JP S6158969 B2 JPS6158969 B2 JP S6158969B2
Authority
JP
Japan
Prior art keywords
substrate
chamber
molecular beam
phosphorus
beam source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56130866A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5833823A (ja
Inventor
Hideo Sugiura
Akinori Katsui
Zeio Kamimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56130866A priority Critical patent/JPS5833823A/ja
Publication of JPS5833823A publication Critical patent/JPS5833823A/ja
Publication of JPS6158969B2 publication Critical patent/JPS6158969B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/22—

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP56130866A 1981-08-22 1981-08-22 分子線エピタキシヤル成長装置 Granted JPS5833823A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56130866A JPS5833823A (ja) 1981-08-22 1981-08-22 分子線エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56130866A JPS5833823A (ja) 1981-08-22 1981-08-22 分子線エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS5833823A JPS5833823A (ja) 1983-02-28
JPS6158969B2 true JPS6158969B2 (OSRAM) 1986-12-13

Family

ID=15044525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56130866A Granted JPS5833823A (ja) 1981-08-22 1981-08-22 分子線エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS5833823A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016046444A (ja) * 2014-08-25 2016-04-04 シャープ株式会社 成膜・分析複合装置、成膜・分析複合装置の制御方法、および真空チャンバ

Also Published As

Publication number Publication date
JPS5833823A (ja) 1983-02-28

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