JPS6157875U - - Google Patents
Info
- Publication number
- JPS6157875U JPS6157875U JP14247984U JP14247984U JPS6157875U JP S6157875 U JPS6157875 U JP S6157875U JP 14247984 U JP14247984 U JP 14247984U JP 14247984 U JP14247984 U JP 14247984U JP S6157875 U JPS6157875 U JP S6157875U
- Authority
- JP
- Japan
- Prior art keywords
- airtight chamber
- air
- partition wall
- ventilation path
- ventilation passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009423 ventilation Methods 0.000 claims description 11
- 238000005192 partition Methods 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims 5
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984142479U JPH0127106Y2 (en, 2012) | 1984-09-20 | 1984-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984142479U JPH0127106Y2 (en, 2012) | 1984-09-20 | 1984-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6157875U true JPS6157875U (en, 2012) | 1986-04-18 |
| JPH0127106Y2 JPH0127106Y2 (en, 2012) | 1989-08-14 |
Family
ID=30700802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984142479U Expired JPH0127106Y2 (en, 2012) | 1984-09-20 | 1984-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0127106Y2 (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0310272U (en, 2012) * | 1989-06-16 | 1991-01-31 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5928347A (ja) * | 1982-08-09 | 1984-02-15 | Nec Corp | 半導体装置のスクリ−ニング装置 |
-
1984
- 1984-09-20 JP JP1984142479U patent/JPH0127106Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5928347A (ja) * | 1982-08-09 | 1984-02-15 | Nec Corp | 半導体装置のスクリ−ニング装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0310272U (en, 2012) * | 1989-06-16 | 1991-01-31 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0127106Y2 (en, 2012) | 1989-08-14 |
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