JPS6157464U - - Google Patents

Info

Publication number
JPS6157464U
JPS6157464U JP14251084U JP14251084U JPS6157464U JP S6157464 U JPS6157464 U JP S6157464U JP 14251084 U JP14251084 U JP 14251084U JP 14251084 U JP14251084 U JP 14251084U JP S6157464 U JPS6157464 U JP S6157464U
Authority
JP
Japan
Prior art keywords
cylindrical body
metal bellows
vacuum
mirror body
sealing member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14251084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0451415Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14251084U priority Critical patent/JPH0451415Y2/ja
Publication of JPS6157464U publication Critical patent/JPS6157464U/ja
Application granted granted Critical
Publication of JPH0451415Y2 publication Critical patent/JPH0451415Y2/ja
Expired legal-status Critical Current

Links

JP14251084U 1984-09-20 1984-09-20 Expired JPH0451415Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14251084U JPH0451415Y2 (cs) 1984-09-20 1984-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14251084U JPH0451415Y2 (cs) 1984-09-20 1984-09-20

Publications (2)

Publication Number Publication Date
JPS6157464U true JPS6157464U (cs) 1986-04-17
JPH0451415Y2 JPH0451415Y2 (cs) 1992-12-03

Family

ID=30700831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14251084U Expired JPH0451415Y2 (cs) 1984-09-20 1984-09-20

Country Status (1)

Country Link
JP (1) JPH0451415Y2 (cs)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008217832A (ja) * 2008-06-12 2008-09-18 Neuron:Kk バーコードリーダ
JP2016024900A (ja) * 2014-07-17 2016-02-08 日本電子株式会社 放射線分析装置
JP2019091561A (ja) * 2017-11-13 2019-06-13 日本電子株式会社 荷電粒子線装置
WO2021099105A1 (en) * 2019-11-19 2021-05-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle imaging system

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008217832A (ja) * 2008-06-12 2008-09-18 Neuron:Kk バーコードリーダ
JP2016024900A (ja) * 2014-07-17 2016-02-08 日本電子株式会社 放射線分析装置
JP2019091561A (ja) * 2017-11-13 2019-06-13 日本電子株式会社 荷電粒子線装置
WO2021099105A1 (en) * 2019-11-19 2021-05-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle imaging system
US11094501B2 (en) 2019-11-19 2021-08-17 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Secondary charged particle imaging system
CN114730683A (zh) * 2019-11-19 2022-07-08 Ict半导体集成电路测试有限公司 带电粒子成像系统
TWI771795B (zh) * 2019-11-19 2022-07-21 德商Ｉｃｔ積體電路測試股份有限公司 次級帶電粒子成像系統
CN114730683B (zh) * 2019-11-19 2025-04-25 Ict半导体集成电路测试有限公司 次级带电粒子成像系统

Also Published As

Publication number Publication date
JPH0451415Y2 (cs) 1992-12-03

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