JPS6157025A - Manufacture of magnetic head core - Google Patents

Abstract

PURPOSE:To manufacture a head core having the specified truck width excellent in high frequency characteristic by weighing segment core material consisting of iron, aluminium, and arsenic for the specified ratio, melting it in vacuum during an electron beam vapor depositing process, and forming a film on a board. CONSTITUTION:A heater 2 to heat and hold a vapor depositing substrate at an evaporating temperature and non-magnetic board 3 on which a vapor deposited film are placed in the upper corner of the vacuum bell jar 1. The vapor depositing source position of lower side is an electron beam generating filament 5 and crucible 7 installed in the direction of radiation of the electron beam 6 generated in the filament. In the crucible 7 is a tablet 8 consisting iron 9, aluminium 10, and arsenic 11 which are vapor depositing source material. When the electron beam 6 is radiated to the tablet 8, the elements in that part are spattered for steam current, adhered to the non-magnetic board 3 through a vapor depositing current control shutter 4, forming a vapor deposited film.

Description

[Detailed Description of the Invention] :Technical Field> ``□The invention relates to a method of manufacturing a magnetic helad core using vapor deposition technology such as electron beam vapor deposition, and particularly relates to a method for manufacturing magnetic helad cores using vapor deposition techniques such as electron beam vapor deposition. , aluminum (A7)
, relates to a film forming technology for a core containing silicon (Si 2 ) or the like as a main component.

<Prior art> In recent years, in the field of magnetic recording and technology, with the diversification of information, there has been a strong demand for increased recording density. It has become necessary to produce magnetic heads with high magnetic permeability and high saturation magnetization.・、.

In manufacturing the core of a conventional magnetic head, when a bulk member is cut into blocks and a track width of 30 μm or less is formed using a dicing blade, etc., chipping and tracks due to impact from the dicing blade occur. Width accuracy is an issue. Furthermore, when a ribbon made by an ultra-quenching method such as sendust or amorphous is used as the head core, the core material is sandwiched between nonmagnetic substrates by resin adhesion. With resin adhesives, it is difficult to control the adhesive layer, and the adhesive layer generally tends to be thick.

However, in consideration of the effects of abrasion during sliding, weather resistance, etc., the adhesive layer must be formed thin. Furthermore, when the track width is formed by cutting from a ribbon or a bulk member, the narrower the track, the more difficult it becomes to control the track width.

On the other hand, when producing a magnetic rad core by electron beam evaporation, a multi-component evaporation material is set in the evaporation source, but this multi-component evaporation material is uniformly melted using a vacuum melting method, etc., and then formed into a predetermined shape. The solidified product is used as a vapor deposition tablet.

In this case, since a vacuum melting process is performed, there is a possibility that impurities may be mixed in from a crucible or the like, which reduces the purity of the core member formed by vapor deposition and increases the cost.

<Object of the invention> The present invention provides a segment core material consisting of iron, aluminum and silicon having different melting points and vapor pressures;
Fixed "we1 @"r Weighing/Electricity +'""-4 Steam "I, fu
It is an object of the present invention to provide a method for manufacturing a magnetic head core that solves the problems of the conventional method described above by forming a film on a substrate after vacuum melting. The objective is to fabricate a rad core with high magnetic permeability.

<Example> FIG. 1Kl ([31 is a schematic configuration diagram of an electron beam evaporation apparatus for explaining an example of the present invention.

Arranged above the vacuum belljar 1 are a heater 2 for heating and maintaining a deposition substrate at a deposition temperature, and a nonmagnetic substrate 3 made of crystallized glass, ceramic, etc. on which a deposition film is to be formed. A shutter 4 is interposed between the non-magnetic substrate 3 and the vapor deposition source to control passage of the KH vapor deposition airflow. Further, at the lower evaporation source position, there is an electron beam generating filament 5 and a crucible (hearth) 7 arranged in the irradiation direction of the electron beam 6 generated by the filament 5. , a tablet 8 made of aluminum and silicon is placed. When the electron beam 6 is irradiated onto the tablet 8, the 11 elements in that area fly off as a vapor flow, pass through the shutter 4 during the opening period of the shutter 4, and are deposited on the nonmagnetic substrate 3, forming a vapor deposited film. be done.

The tablet 8 placed in the crucible 7 is constructed as shown in FIG. 1 β). That is, iron 9. is the main component of Tablet 8. Aluminum 10. The silicon 11 is formed into layers, and consists of a total of five layers, with the silicon 11 in the center, aluminum 10 laminated on both sides, and further sandwiched by iron 9 from the outside.

By configuring the tablet in this way, aluminum □Nium 1 has a lower melting point and higher vapor pressure than Iron 9 and Silicon 11.
The phenomenon that 0 evaporates before becoming solid solution in iron 9 during the melting process described later does not occur, and iron 9. Aluminum 10. silicon 1
It becomes possible to uniformly melt the three elements of 1. Tablet...8 ternary acid: Iron 60-70wt%
, 3 to 6 wt % of aluminum, and 20 to 30 wt 1 of silicon, and the weight is set so that the total weight is about 80 to 110 gr. The alloy containing these three elements is known as Sendust core material and is therefore a high magnetic permeability alloy.In the wooden example, a high magnetic permeability of Sendust composition or a composition close to this was obtained by electron beam evaporation using a dovetail tablet 8. Fabricate a magnetic film.

During electron beam evaporation, iron 9. Aluminum 10. Prevents bumping of silicon 11,
To maintain a uniform melt state.

According to the energization curve shown in FIG. 2, the tablet 8 is held at 0.5 to IKW for 14 minutes and subjected to electron beam vacuum melting. After that, 0.1-0.5KW per minute until aKW
The pressure was increased for 23 minutes at a rate of .

As a result, iron 9. Aluminum 10° Silicon 1
The melted state of No. 1 is uniformly adjusted. 2 to 1 minute after that
Boost the voltage to 10KW at a rate of 4KW. After the electron beam power reaches 10 KW, it is held for a certain period of time and the non-magnetic substrate 3 is taken out to form a deposited film thereon. The obtained vapor-deposited film was divided into 1.3 μm thick pieces corresponding to various holding times from 1 minute 10 seconds to 17 minutes 20 seconds, and changes in film composition were sequentially investigated by chemical analysis. Fig. 3 shows an example of the composition distribution at the time. Figure 3 shows experimental data for setting the opening time of the shutter 4, which shows the holding time after reaching the electron beam power of 10 KW, from 1 minute 10 seconds to 3 minutes 20 seconds, 3 minutes 20 seconds.
seconds to 5 minutes 50 seconds, 5 minutes 50 seconds to 8 minutes 50 seconds, 8 minutes 50 seconds to 11 minutes 50 seconds, 11 minutes 50 seconds to 14 minutes 20 seconds, and 14 minutes 20 seconds to 17 minutes 20 seconds. Set each area to I
, n, 1, rv, v, vt.
However, due to differences in the plow point and vapor pressure of each element, a compositional distribution occurs in the film thickness direction during film formation. For this A; □ Do not do this for 15 minutes 4 from 3 minutes 40 seconds after the time when the aluminum evaporation rate reaches the maximum after reaching the electronic vinyl power of 10KW.
Shutter 4 is opened only until 0 seconds later, and 51Ltn
A thick sendust film was formed on a non-magnetic substrate '3 soil. During the opening period of shutter 4 14 hours “Electricity + 1-” Electricity”°■
The period is defined as the period from which it opens after 924 minutes and closes after 5 to 15 minutes.The composition of the 5 μm thick film was determined by chemical analysis to be 85.7 wt % Fe and 9.8 w Si.
t % and Al 4.5 wt %. This film is 600
By heat treatment in vacuum for 2 hours at ℃, the electrical resistivity decreased to 72.
μΩ, coercive force 0.60e, saturation magnetic flux density 11.400
A magnetic head having very excellent magnetic properties with G was able to be manufactured. When the particle size was calculated from the X-ray diffraction pattern using the Debye-Scherrer equation, it was found that the particle size was composed of fine particles of 30 OA''.

As a result, domain rotation becomes easy. FIG. 4 shows the frequency characteristics of the effective magnetic permeability of the head core thick-film material produced by Kimio's method. Effective permeability at 5MHz I″1280
It can be seen that the effective magnetic permeability at 0.10 MHz is 1400, making it an excellent head core material in a high frequency band. Furthermore, if Kinio's manufacturing method is used, an insulating layer (for example, SjO□'', AJt203
) as an intermediate layer, and it is also possible to produce a head core having a predetermined track width with excellent high frequency characteristics.

<Effects of the Invention> As explained in detail above, the present invention has abundant resources,
A head core with excellent magnetic properties was created by weighing inexpensive iron, aluminum, and silicon, and using electron beam vacuum melting technology in which there is almost no contamination of impurities in a vacuum, and electron beam vacuum evaporation technology that has a high deposition rate. This method facilitates the production of heads with narrow gaps and narrow trunks, and is extremely effective in the production of digital audio heads and high-quality VTR heads, whose recording densities are increasing. Furthermore, the manufacturing method of the present invention is suitable for mass production and can produce a large amount of inexpensive magnetic heads.

can be produced.　　　　　　,

[Brief explanation of drawings]

FIG. 1 (Al (Bl) is a schematic configuration diagram of an electron beam evaporation apparatus used to explain an embodiment of the present invention. FIG. 2 is an explanatory diagram showing a power operation curve in electron beam evaporation. The figure is a composition distribution diagram in the film thickness direction corresponding to the deposition time of the deposited film. Figure 4 is a characteristic diagram showing the frequency characteristics of the effective magnetic permeability of Radcore to magnetism obtained by the uninvented method. Yes. 1... Mayu Belljar 3... Non-magnetic substrate 4... Shutter 5... Filament 6... Electron beam 7... Crucible 8... Tablet agent Patent attorney Aihiko Fukushi (2 others) (JIXI
q−multiv−,1(:@shun

Claims (1)

[Claims] 1. A evaporation source material in which a laminate of silicon and aluminum is sandwiched between iron layers from both sides is placed at the evaporation source position, and the evaporation source material is melted in the process of increasing the power for electron beam evaporation. rear,
A method of manufacturing a magnetic head core, comprising subsequently forming a magnetic head core film containing the deposition source material by electron beam evaporation. 2. Evaporation source material: iron 60-70wt%, aluminum 3
The method for manufacturing a magnetic head core according to claim 1, wherein the silicon content is 6 wt% and 20 to 30% silicon.