Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KKfiledCriticalNippon Kogaku KK
Priority to JP16117678ApriorityCriticalpatent/JPS5589825A/ja
Publication of JPS5589825ApublicationCriticalpatent/JPS5589825A/ja
Publication of JPS6156901B2publicationCriticalpatent/JPS6156901B2/ja
