JPS6156613B2 - - Google Patents
Info
- Publication number
- JPS6156613B2 JPS6156613B2 JP4051377A JP4051377A JPS6156613B2 JP S6156613 B2 JPS6156613 B2 JP S6156613B2 JP 4051377 A JP4051377 A JP 4051377A JP 4051377 A JP4051377 A JP 4051377A JP S6156613 B2 JPS6156613 B2 JP S6156613B2
- Authority
- JP
- Japan
- Prior art keywords
- electronic device
- oxide layer
- mask
- mesa
- gaas wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 12
- 230000003647 oxidation Effects 0.000 claims description 9
- 238000007254 oxidation reaction Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 15
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 239000008151 electrolyte solution Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4051377A JPS53125768A (en) | 1977-04-08 | 1977-04-08 | Forning method of step type mesa construction in electronic device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4051377A JPS53125768A (en) | 1977-04-08 | 1977-04-08 | Forning method of step type mesa construction in electronic device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53125768A JPS53125768A (en) | 1978-11-02 |
| JPS6156613B2 true JPS6156613B2 (de) | 1986-12-03 |
Family
ID=12582609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4051377A Granted JPS53125768A (en) | 1977-04-08 | 1977-04-08 | Forning method of step type mesa construction in electronic device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53125768A (de) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63155114U (de) * | 1987-03-30 | 1988-10-12 | ||
| JPH0224834U (de) * | 1988-08-02 | 1990-02-19 | ||
| JPH02132321U (de) * | 1989-03-31 | 1990-11-02 | ||
| WO2019194201A1 (ja) | 2018-04-02 | 2019-10-10 | 日本製鉄株式会社 | 金属板、金属板の製造方法、金属板の成形品の製造方法および金属板の成形品 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4698128A (en) * | 1986-11-17 | 1987-10-06 | Motorola, Inc. | Sloped contact etch process |
-
1977
- 1977-04-08 JP JP4051377A patent/JPS53125768A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63155114U (de) * | 1987-03-30 | 1988-10-12 | ||
| JPH0224834U (de) * | 1988-08-02 | 1990-02-19 | ||
| JPH02132321U (de) * | 1989-03-31 | 1990-11-02 | ||
| WO2019194201A1 (ja) | 2018-04-02 | 2019-10-10 | 日本製鉄株式会社 | 金属板、金属板の製造方法、金属板の成形品の製造方法および金属板の成形品 |
| KR20200124309A (ko) | 2018-04-02 | 2020-11-02 | 닛폰세이테츠 가부시키가이샤 | 금속판, 금속판의 제조 방법, 금속판의 성형품의 제조 방법, 및 금속판의 성형품 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53125768A (en) | 1978-11-02 |
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