JPS6155709A - Contactless positioning device - Google Patents

Abstract

PURPOSE:To attain high accuracy positioning with wide range by constituting a unit positioning means with a floating body, a stator supporting it with a magnetic force and a floating body position adjusting means adjusting the position of the floating body so as to avoid the lowering of a load capacity from being incurred. CONSTITUTION:The single and simultaneous progressing of a floating body 4 in the X and Z axes and the turning movement in the beta direction are attained with the combination of the magnetic forces of magnets 26a,b-31a,b between an intermediate floating body 3 and the floating body 4. Since the position control is set with ultraminute gap among the magnets 26a-31b and magnetic plates 6a,b-11a,b, the bodies are supported magnetically stably even under high magnetic rigidity. On the other hand, the quantity of the magnetomotive force of the magnets 52a,b-57a,b is combined between the stator 2 and the intermediate floating body 3, the single and parallel movement of the intermediate floating body 3 toward the Y and Z directions and the turning movement toward the direction beta are attained and the body is supported stably even under a high magnetic rigidity. Thus, as a whole, the moving control of the floating body 4 in the X, Y,Z axes and the moving control of the alpha and beta are attained under a high magnetic rigidity.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a non-contact positioning device that can determine the position of an object over a wide range with high accuracy.

[Technical background of the invention and its problems] Conventionally, one method of determining the two-dimensional or three-dimensional position of an object with relatively high accuracy is to move a plate mounted on a smooth guide using a ball screw. There are known ways to do this. However, with this method of visual positioning, the parts must be machined with extremely high purity, and even if it is possible to machine the parts with high accuracy, it is impossible to completely eliminate the so-called backlash of the ball screw. cannot be avoided. For this reason, the conventional positioning device for the infraction has not been able to perform positioning with high accuracy. In addition, when performing three-dimensional positioning with such a device, 6f, which is the same number as the number of degrees of freedom of the space,
The positioning device 17a had to be used in conjunction with the device, making the entire device large and sophisticated.

Therefore, as a positioning device that can overcome these drawbacks, for example, as proposed in U5P4088018, the object to be positioned is magnetically supported in a non-contact manner, and the magnetic force applied to the object is changed. A non-contact positioning device has been proposed that determines the position of the target object. According to this device, there is almost no need to consider mechanical errors, so positioning can be performed at an extremely high degree of 72R.

However, this conventional positioning device levitates a floating body, which is a positioning logarithm, in a space surrounded by the magnetic poles of a fixed body, so the floating body is only moved by the distance between the floating body and the fixed body. I couldn't move it. Therefore, it is difficult to secure a large amount of movement of the floating body, and in order to achieve high-intensity positioning over a wide range, it is necessary to widen the air gap between the magnetic pole and the floating body. However, as a result, there is a problem in that the rigidity and load required for the magnetic bearing are reduced. In order to prevent this, a strong magnetic force may be supplied to the floating body, but in this case, it is impossible to avoid a large increase in the amount of power consumed and an increase in the size of the entire device.

[Purpose of the invention]

The present invention was made in view of these problems, and its purpose is to provide a non-contact positioning device with less mechanical error, and to reduce the deterioration of machinability and loads during magnetic bearing. It is an object of the present invention to provide a non-contact positioning device that can perform positioning with a high degree of rust over a wide range without causing damage.

[Summary of the invention]

First of all, the first invention includes a floating body, a fixed body that magnetically supports the floating body, and a method for controlling the magnetic force between the fixed body and the floating body to at least support the fixed body and the floating body. The present invention is characterized by comprising a floating body position adjusting means for adjusting the position of the floating body in a direction in which a surface facing the magnetic path and forming a magnetic path for magnetic support spreads.

Further, in a second invention, the floating body, the fixed body, and the position adjustment means as described above constitute a unit positioning means, and the floating body at the front stage is integrated with the fixed body at the rear stage. The device is characterized in that the unit positioning means are provided in multiple stages.

〔Effect of the invention〕

According to the first invention, at least on the opposing surfaces of the fixed body and the floating body and in the direction in which the surface forming the [u path for magnetic support spreads, that is, the direction in which the surface of the surface forming the U path for magnetic support spreads, that is, the direction in which the magnetic bearing is not affected by any shadow. I am trying to control the position of the nine bodies by floating in the direction. For this reason, the moving distance of the floating body can be greatly expanded compared to the conventional method while keeping the magnetic gap between the floating body and the fixed body extremely small. Therefore, highly accurate positioning can be performed over a wide range without causing a decrease in rigidity or load capacity during magnetic support.

Further, according to the second invention, the floating body, the fixed body, and the floating body position adjustment means constitute a unit positioning means, and these are provided in multiple stages, and the floating body in the previous stage is integrated with the fixed body in the latter stage. With this configuration, it becomes possible to move the fixed body itself forming the 4Z unit positioning means. Therefore, when focusing on one unit positioning means, the degree of freedom of movement of the fixed body and the degree of freedom of movement of the floating body are added, and the degree of freedom and movement distance of the floating body are greatly expanded. I can do it.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

FIGS. 1 to 4 show an example in which a device is constructed by combining two stages of unit positioning means, and this device has the following features:
It is roughly divided into a positioning device main body A and a control device B that controls the positioning device main body A.

To simplify the explanation, the positioning device main body A will be explained based on each axis of the orthogonal coordinates shown in FIG.
A base 1 provided parallel to the Y-axis plane, a fixed body 2 fixed to this base 1, an intermediate floating body 3 magnetically supported by this fixed body 2 in a non-contact state, and further this intermediate floating body The floating body 4 is supported by the body 3 in a non-contact manner with f1 air support.

The floating body 4 is provided parallel to the X and Z axis planes, and the second
As shown in the figure, there is a U-shaped floating body 5 with a notch P extending from the center of the approximately square plate to the lower end in the figure, and these 9 are attached to both sides of the four corners of the floating body 5. magnetic plates 6a and 6b of the same size.

7a, 7b, 8a, 8b, 9a, 9b (however, 8b is not shown), and magnetic plates 1 of the same size mounted on both sides of the central part of both side edges of the floating body body 5 perpendicular to the X axis.
0a, 10b.

11a and 11b. A positioning object such as an antenna (not shown) is attached to the floating body 4, for example, on the H-axis at the center of its upper end.

The intermediate floating body 3 is constructed as follows. Namely, 16 in the figure N1 is an intermediate floating body body, and this intermediate floating body body 1G has a cross-shaped cross section as a whole. A first plate-shaped portion 17.18 and a first root-shaped portion 17.1 are arranged opposite to each other with the floating body 4 in between so as to exhibit
The second plate-like portions 19 and 20 extending outward from the surface opposite to the opposing surface of FIG.
As shown in the figure, the first plate-like portions 17, 18 are integrally connected by a connecting member 21 provided by penetrating the notch P of the floating body 4 in a non-contact manner. The first plate-like portions 17 and 18 have opposing surfaces Q1 on both side edges in the X-axis direction.
゜Q2, Q3, and Q4 are bent into a crank shape so that they are spaced apart from each other compared to other opposing surfaces. The floating bodies 4 are provided on these opposing surfaces Q1 to Q4.
Magnetic plates 6a, 6b, 7a, . . . attached to the magnetic plates 6a, 6b, 7a, .

8b, 9a, 9b, magnets 26a, 26b, 27a for magnetically supporting the floating body 4 and adjusting the position in the ZIi1!1 direction,
27b, 28a, 28b.

29a and 29b (however, 28a and 28b are not shown) are fixed. Further, on the opposing surfaces Q1 to Q4, magnetic plates 10a and 10 attached to the floating body 4 are provided.
b, 11a.

Magnets 30a, 30b, 31a for adjusting the position of the floating body 4 in the X-axis direction are located at positions facing 11b.
.

31b is fixed.

The magnets 26a, 26t), 29a,
29b is the magnet 26a, 2Gb, 2 in FIG.
7a and 27b, a mouth-shaped yoke F made of a magnetic material and disposed opposite to the floating body 4 with its magnetic pole surfaces at both ends located vertically (in the Z-axis direction) in the figure; It is composed of a coil C wound around these yoke F. Each yoke F is such that the distance between the upper edge of the magnetic pole surface located on the upper side and the lower edge of the magnetic pole surface located on the lower side is the upper and lower edges of the magnetic plate facing these yokes F. It is formed to be longer than the rough melt in between. On the other hand, the f1i stone 30
a, 301+, 31a, and 31b are made of magnetic material, as shown in FIG.
One yoke is made up of yoke-shaped yokes G that are placed opposite to the floating body 4 with their surfaces located on the left and right sides (X-axis direction) in the figure, and coils C that are wound around these yokes G. . In each group aG, the rough melting between the left edge of the magnetic pole face located on the left side and the right edge of the magnetic pole face located on the right side is the same as that between the left and right side edges of the magnetic plates facing these I GI G. It is formed in a dimension that is longer than the distance. Therefore, a magnetic path is formed by each iron F and magnetic plates 6a, 6b, . . . 9a, 9b, and each yoke G and magnetic plate 10a.

It is perpendicular to the bottleneck formed by 10b, 11a, and 11b. And magnets 213a, 26b,
・, 29a, 29b and magnets 30a, 3
The wire ends of each coil C of 0b, 31a, and 31b are connected to the filtration system UB via a cable 32.

In addition, the magnetic plate Ga,
A non-contact position detector 33a that detects the 2@force direction position and the gap direction position (Y-axis direction position) of the floating body 4 so as to face the upper end edge of the floating body 9a.

・3゛3b is fixed. In the same work, the opposite side Q1゜Q
2, at the side end of the 419 body 4 and the FIt sex plate 6a,
7a and the portion between the magnetic plate 10a and the magnetic plate 8a,
The position of the floating body 4 in the X-axis direction and the gear direction image f are respectively
Non-contact position detector 34 that detects f1 (position in the Y-axis direction)
a, 34b, 34c, and 34d are installed.

Thus, magnetic plates 35a, 35b, 36a, 36b are provided on both sides of the Y-axis direction side edges of the second plate-shaped portion 19.20 for supporting and positioning the intermediate floating body 3.
, 37a.

37b, 38a, 38b (however, 38a,
38b (not shown) is attached. Furthermore, magnetic plates 39a, 39b, 40a for controlling the position of the intermediate floating body 3 in the Y-axis direction are provided on both sides of the side edge portion of the second plate-shaped portion 19.20 and at an intermediate position in the ZII11 direction.
, 40b (however, 40a and 40b are not shown)
is installed.

On the other hand, the fixed body 2 is configured as follows. That is, fixed body bodies 46a, 46b, and 47a are disposed on the upper surface of the base 1 so as to face each other with the side edges of the second plate-shaped portion 19.20 of the intermediate floating body 3 interposed therebetween.
, 47b is fixed. This fixed body body 4Ga
, 46b, 47a, 47b C, overall D2
Opposing plate portions 48a and 48b formed into two-long plate shapes
, 49a.

49b and the opposing plate portions 48a, 48b, 49
Support portions 50a, 5 for supporting a, 49b
0b, 51a, and 51b.

Opposing plate parts 48a, 48b, 49a.

49b's surfaces R1 and R2 facing the intermediate floating body 3;

R3 and R+ are the magnetic plates 35a of the intermediate floating body 3.

Magnets 52a, 52b, 53a, for magnetically supporting the intermediate floating body 3 and adjusting the position thereof, at positions facing the intermediate floating bodies 3, 35b, . . . , 38a, 38b.
53b, 54a, 54b.

55a, 551) (however, 55a, 55b are not shown) are fixed. In addition, opposing surfaces R1 to R4
includes a magnetic plate 39a installed on the intermediate floating body 3;
, 39b.

A magnet 56a for controlling the position of the intermediate floating body 3 in the Y-axis direction is located at a position facing 40a and 40b.

5Gb, 57a, 57b (However, 57a,
57b (not shown) is fixed. The magnet 52
a, 52b,...

55a, 55b and the above magnets 56a, 56
b, 57a.

57b are the magnets 2f3a and 261 described above, respectively.
),...

t'aa, 291) and magnets 30a, 30b
, 31a, and 31b, and the m end of each coil C is connected to the control device B via a cable 32. Further, the facing surface Rt,
Ra is a position detector 61a that detects the biaxial position and gap direction position (X-axis direction position) of the intermediate floating body 3 so as to face the upper end edges of the magnetic plates 35a and 37a.

61b is installed. Similarly, the facing surface is rounded.

R3 includes a portion at the side end of the second plate-like portion 19.20 of the intermediate floating body 3 and between the magnetic plates 35a, 36a and the magnetic plate 39a, and the magnetic plates 37a, 38a and the magnetic plate 4.
0b, position detectors 62a and 62b detect the Y-axis direction position and the gear gear direction image ff1 (X-axis direction position) of the intermediate floating body 3, respectively.
.

62c and 62cl are installed.

The non-contact positioning device configured in this way has a fixed body 2
and the intermediate floating Jε body 3 form the first stage unit positioning means (j
4, and furthermore, the intermediate floating body 3 and the floating body 4 form a second floating body.
It constitutes a stage unit positioning means.

Next, the operation of the non-contact positioning device according to this embodiment configured as described above will be explained.

To simplify the explanation, a case will be described here in which control of the floating body 4 is performed on the intermediate floating body 3 side.

Now, the magnets 2Ga, 26b of the intermediate floating body 3,
29a.

When a current is supplied from the control device B to each coil C of 2911, as shown in FIG. A magnetic flux M1 is generated in the magnetic circuit formed by. Due to this magnetic flux M1, the floating body 4 is magnetically supported by the intermediate floating body 3 in a non-contact state. The inner position n of the floating body 4 in the Y-axis direction, that is, the gear direction image is determined by the 6th position U.Detector 33a
, 33b, 34a to 34d. This monitoring result is fed back to the control wave US, and the control wave ff2B controls the energizing current of the coil C of each magnet in accordance with the monitoring result.

Therefore, the floating body 4 is always stably supported in a non-contact manner with respect to the intermediate floating body 3.

Therefore, when positioning the floating body 4 in the two-axis direction and the X-axis direction, the following control is performed. That is,
Taking the case of performing Z@force direction positioning as an example, first, the center of the floating body 4 in the Z-axis direction and the Z of the first plate-like portion 17.18 are
When aligning the centers in the axial direction, the magnet 26a is positioned above the center of the first plate portion 17.18 in the Z-axis direction.

2 (each coil C of 3b, 29a, 29b and the magnets 27a, 27o, 28a, located on the lower side)
Each coil C of 28b is uniformly energized. When energized in this way, as shown in FIG. 3, the magnetic flux Mtl generated by the upper magnet causes the magnetic plates 6a, (ib,
The magnetic plates 7a, 7b are caused by the downward magnetic attraction force in the Z-axis direction applied to the magnetic plates 9a, 9b and the magnetic flux M12 generated by the magnet located below.

The floating body 4 moves to a position where the upward magnetic attraction force in the Z-axis direction applied to the floating bodies 8a and 8b is balanced and becomes stable.

As mentioned above, the upper magnetic plate C>a, 6b,
9a.

9b and the magnetic plates 7a, 71), 8a, located below.
8b are provided symmetrically with respect to the center of the floating body 4 in the Z-axis direction, and magnets 26a, 2Gb,
29a, 29b and magnets 27a, 27b, 2
8a and 28b are provided symmetrically with respect to the centers of the first plate-shaped portions 17 and 18 in the biaxial directions, and the length of each magnetic plate in the 2@ direction is equal to the yoke of each magnet. It is formed shorter than the length of F in the 2@ direction. Therefore, floating body 4
The position where the floating body 4 is stationary and stable is the position where the center of the floating body 4 in the 2@ direction and the center of the first plate-shaped portion 17° 18 in the 2@ direction coincide. At this time, the position of the floating body 4 in the X-axis direction is as follows. That is, the magnetic plates Ga on one side are provided on both sides with the center of the floating body 4 in the X-axis direction as a border.

6b, 7a, 7b and the other side (7) Iil sex plate 8a
, 8b, 9a, and 9b are provided symmetrically with respect to the center, and the X of the first plate-like portion 17.18
! ! 'One side magnets 26a and 26b are provided on both sides of the center in the I11 direction.

27a, 27b and the other side magnets 28a, 28b
, 29a, and 29b are provided symmetrically with respect to the center. Konotame, each magnet 26a, 2
6b-29a, 29b T: generated magnetic flux fvl
Each magnetic plate 6a, 6b...9a depending on the construction.

The magnetic attraction forces applied to 9b in the X-axis direction cancel each other out. Therefore, the position of the floating body 4 in the X@force direction is determined by the magnetic flux M21 generated by the magnets 30a and 30b on one side, which are provided symmetrically with respect to the center of the first plate-like portion 17.18 in the X@force direction. and the magnetic flux M22 generated by the magnets 31a, 31t) on the other side.

When the floating body 4 is moved in the Z@force direction and upward in FIG. 3 and positioned at a certain position, the following control is performed. That is, in this case, each coil C
2@ of the first plate-shaped portion 17.18 by controlling the current flowing through the first plate-shaped portion 17.18.
Magnet 26a located on the upper side in the figure with the center of the direction as the border
, 2 (magnetic flux Mst generated in 3b, 29a, 29b and magnets 27a, 27b located on the lower side)
, 28a, and the magnetic flux M12 generated in 2811,
The relationship is set as Mr 1 < Mt 2. With this setting, the magnetic plates 7a, 7b, aa located on the lower side.

The upward magnetic attraction force acting on the upper end surface of the magnetic plates 8b is larger than the downward magnetic attraction force acting on the lower end surfaces of the magnetic plates 6a, Gb, 9a, and rib, and as a result, )♀
The mobile body 4 moves upward. The floating body 4 has a balance between the downward attractive force acting on the lower end surfaces of the magnetic plates Ga, Gb, Ria, and 9b and the upward attractive force acting on the upper end surfaces of the magnetic plates 7a, 7b, 8a, and 8b. stop at the desired position. Similarly, by setting the relationship Mxt>Mtz, the floating body 4 can be moved downward in FIG. 3. Therefore, each position detector 33a.

By controlling the flux m to 11 and the magnetic flux M12 while monitoring the position of the floating body 4 with 33b, the position of the floating body 4 in the X-axis direction can be determined with high precision. In addition, the magnet 30a controls the same (co 1).

30b, 31a, and 31b, the position of the floating body 4 in the X-axis direction can be determined with high precision.

In this way, between the intermediate floating body 3 and the floating body 4, the X of the floating body 4 is
Single and translational movements in the axial and X-axis directions, or rotational movements in the β direction can be realized.

In this case, each magnet 2Ga, 2Gb, -,
31a.

311) and each magnetic plate 6a, Gb, ., Ila
, 11b, the above-mentioned position control can be performed with an extremely small gap set between the floating body 4 and the floating body 4, so that the floating body 4 can be stably magnetically supported with high magnetic rigidity.

On the other hand, each magnet 52 also exists between the fixed body 2 and the intermediate floating body 3.
a, 521), −, 57a, and 57b, the intermediate floating body 3 can be moved to Y
Single and translational movements in the axial and X-axis directions, or rotational movements in the α direction can be performed. In this case as well, stable support is possible with high magnetic rigidity. Therefore, the (hyperactivity control of the intermediate floating body 3 with respect to the fixed body 2 and the floating body 4 with respect to the intermediate floating body 3)
By combining the movement control of the floating body 4 with the movement control of the X-axis, Y-axis, Z! ¥I11 direction and α,
Eight motion control in each direction of β can be made possible under high magnetic stiffness.

It goes without saying that rotational movement in the γ direction is possible within the range allowed by the magnetic gap between the fixed body 2, the intermediate floating body 3, and the floating body 4.

In this way, according to this embodiment, the object to be positioned can be moved and positioned three-dimensionally over an extremely wide range while maintaining high magnetic rigidity and high load capacity. Moreover, in this 4% ratio, the intermediate floating body 3 and the floating body 4 have non-contact position detectors 33a, 33b,
34a to 34d, 61a, 61b.

Since it is constantly monitored by 62a-G2d and feedback-controlled by control device B, the accuracy and resolution of the positioning device are determined by the accuracy and resolution of the non-contact position detector. Generally, the accuracy of this type of position detector is superior to that of a mechanical device such as a ball screw, so that high positioning accuracy can be ensured after all.

Note that the present invention is not limited to the embodiments described above. For example, if the floating body 4 is required to have more rigidity, as shown in FIG. The necessary rigidity may be ensured by providing thick wall portions 71 and 72 extending vertically in the figure at the connecting portions 20 to 20, and by making the connecting member 21 a thick wall structure. Further, in this case, if the material is removed as necessary, there will be no difficulty in manufacturing.

Further, as shown in FIG. 6, a hollow cylindrical portion 81 is formed at the upper end of the floating body 4, and a coil 82 is mounted on the inner surface of the hollow cylindrical portion 81. If the cylindrical body 83 made of magnetic material is installed inside the upper part 81 in a non-contact state, the cylindrical body 83 can
Movement in the @ direction can be added, roughly vcff
It is possible to increase the overall degree of freedom of i.

In addition, each magnet can be used as a single permanent magnet or as a permanent magnet and ffl
In the above-described embodiment, the first plate-shaped portion 1 of the intermediate floating body 3 may be configured in combination with a magnet.
7.18 and the second plate-like portion 19.20 are connected at right angles, but it goes without saying that they can be set at any angle depending on the desired driving direction.

Furthermore, 1, the position of the floating body is controlled at least in the direction in which a surface that faces the fixed body and the floating body and that forms a magnetic path for magnetic support spreads, without having to be combined in multiple stages. Good too.

[Brief explanation of the drawing]

1 to 4 are diagrams showing a non-contact positioning device according to an embodiment of the present invention, FIG. 1 is a perspective view showing the overall configuration of the device, and FIG. 2 is a partially cutaway view of the device. 3 is a side view of the same device as shown in FIG. 1 (as seen from the direction of arrow E), and FIG. 5 and 6.
Each figure is a partially cutaway perspective view of a non-contact positioning device according to another embodiment. A... Positioning device 2 main body, B... m control port, 1...
・Base, 2... Fixed body, 3... Intermediate floating body, 4.
... Floating body, 5... Floating body body, 6a, eb, 7
a, γb, 8a, 8b, 9a. 9b-Pi magnetic plates 10a, 10b, 11a,
11b...Magnetic plate, 16-...Intermediate floating body body,
2Ga, 2Gb, 27a, 27b. 28a, 28b, 29a, 29b...
Magnets, 30a, 30b. 31a, 31b-PJ stone, 33a, 33b,
34a to 34d ---Non-contact position detector, 35a
, 35b, 36a, 36b, 37a
. 37b, 38a, 38b-magnetic plate, 39a,
39b, 40a. 40b-Efi magnetic 52a, 52b, 53a
, 53b, 54a. 54b, 55a, 55b--magnet, 56a
, 56b, 57a. 57b... magnet, 61a, 61b, 62a
~62d--Non-contact position detector, 71.72...
Thick wall part, 81... Hollow cylindrical part, 82... Coil, 8
3...Cylindrical body, F, G...Yoke, C...Coil. Figure 2 HM 4 Figure 5 Figure 6

Claims (8)

[Claims] (1) A floating body, a fixed body that magnetically supports the floating body in a non-contact manner, and at least the fixed body and the floating body are opposed to each other by controlling the magnetic force between the fixed body and the floating body. A non-contact positioning device comprising floating body position adjusting means for adjusting the position of the floating body in a direction in which a surface forming a magnetic path for magnetic support spreads. (2) The non-contact positioning device according to claim 1, wherein the floating body position adjustment means moves the floating body two-dimensionally with respect to the fixed body. (3) The floating body partially includes a magnetic member, and the fixed body has a supporting magnet that generates a magnetic flux in the magnetic member at a position that fits the magnetic member in a non-contact manner,
The floating body position adjusting means includes a driving magnet that is fixed at a position where the magnetic member of the stationary body is fitted in a non-contact manner and selectively changes the number of magnetic fluxes generated in the magnetic member. A non-contact positioning device according to claim 1, characterized in that: (4) The non-contact positioning device according to claim 3, wherein the support magnet is also used as the drive magnet. (5) A floating body, a fixed body that magnetically supports the floating body in a non-contact manner, and a magnetic force between the fixed body and the floating body is controlled so that at least the fixed body and the floating body face each other. and a floating body position adjustment means for adjusting the position of the floating body in the direction in which the surface forming a magnetic path for magnetic support spreads. A non-contact positioning device characterized in that the unit positioning means are provided in multiple stages so as to be integrated with the body. (6) The non-contact positioning device according to claim 5, wherein the floating body position adjustment means moves the floating body two-dimensionally with respect to the fixed body. (7) The floating body partially includes a magnetic member, and the fixed body has a supporting magnet that generates a magnetic flux in the magnetic member at a position that fits with the magnetic member in a non-contact manner,
The floating body position adjusting means includes a driving magnet that is fixed at a position where the magnetic member of the stationary body is fitted in a non-contact manner and selectively changes the number of magnetic fluxes generated in the magnetic member. A non-contact positioning device according to claim 5, characterized in that: (8) The non-contact positioning device according to claim 7, wherein the support magnet is also used as the drive magnet.