JP2001238427A - Linear motor drive device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a linear motor drive device which enables reduction of a holding current, with which dead loads of a moving object and a coil are held at a target position, and power savings. SOLUTION: Two magnetism-generating means 3 (3a and 3b) which have a closed-loop magnetic circuit, by which flux from one magnetism generating means are returned to the other magnetism generating means through a back yoke 1 and a front yoke 4, and an annular coil 2 are provided between the back yoke 1 and the front yoke 4, which are arranged so as to face each other. If a current is applied to the annular coil 2, a moving object connected to the annular coil 2 is driven across the closed-loop magnetic circuit. The annular coil 2 comprises a drive coil 2a, with which the moving object is driven to a target position, and a holding coil 2b, by which the dead loads of the coil and the moving object are held. The number of turns of the holding coil 2b is larger than the number of turns of the drive coil 2a.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear motor driving device used for an optical device such as a video camera.

[0002]

2. Description of the Related Art Conventionally, a camera shake correcting mechanism for correcting a camera shake of an optical device such as a video camera has been shown in FIGS.
5 is used.

[0003] Between a back yoke 1 and a front yoke 4 which are arranged opposite to each other, a first magnetic pole 3a and a second magnetic pole 3b are arranged as magnetic generating means such that their magnetic poles face in opposite directions. A permanent magnet 3 is provided, and an annular coil 2 is interposed between the permanent magnet 3 and the front yoke 4. The magnetic flux from the first magnetic pole 3a is applied to the front yoke 4
And returns to the second magnetic pole 3b through the front yoke 4 to form a closed magnetic circuit.

When a current is supplied to the coil 2, a correction lens (not shown) as a moving object connected to the coil 2 moves in the direction of arrow D, and the lens portion moves with the movement of the coil 2. It moves and the camera shake is corrected.

[0005]

In the linear motor driving device constructed as described above, it is necessary to increase the number of turns of the coil 2 in order to reduce the current consumption. Since the transient response characteristic is deteriorated due to an increase in the inductance, the design is made at the optimum point of the power consumption and the response.

However, since the number of turns of the coil 2 cannot be increased in the coil specification in consideration of the responsiveness of the linear motor, when the linear motor is used in the vertical direction, a force is applied in the direction of arrow E due to the weight of the lens and the coil 2, There is a problem that a current must be continuously supplied in order to adjust the focus of the lens, thereby increasing current consumption.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a linear motor driving apparatus which solves the above-mentioned problems and reduces power consumption by reducing a holding current for holding the weight of a moving object or a coil at a target position. I do.

[0008]

A linear motor driving device according to the present invention is characterized in that a coil of a magnetic circuit is divided into a holding coil and a driving coil.

According to the present invention, it is possible to provide a linear motor driving device capable of reducing current consumption without sacrificing the response of the linear motor.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In a linear motor driving device according to a first aspect of the present invention, a magnetic flux from one passes through the yoke to the other magnetic generating means between a pair of opposed yokes. A magnet generating means having a returning magnetic circuit and an annular coil are interposed, and when a current is supplied to the annular coil, a moving object connected to the annular coil crosses the closing magnetic circuit. A linear motor driving device provided with a magnetic circuit for driving the annular coil, a coil for holding the weight of the coil and the moving object and a driving coil for driving the moving object to a target position. And a driving coil, wherein the number of turns of the holding coil is larger than the number of turns of the driving coil.

According to this configuration, the number of turns of the coil can be increased without sacrificing the response in driving the moving object, the holding thrust can be generated with a small current, and the current consumption can be reduced.

According to a second aspect of the present invention, there is provided a linear motor driving apparatus, wherein a coil is wound around an annular yoke, and a magnetic pole is disposed at a location on the inner peripheral surface of the yoke facing the coil, the magnetic pole facing the yoke. To form a closed magnetic circuit such that the magnetic flux from the magnetic generating means returns to the magnetic generating means through the yoke, and when a current is supplied to the coil, a moving object connected to the coil is formed. A linear motor drive device provided with a magnetic circuit that moves in a direction traversing the closed magnetic circuit, wherein the coil is a coil and a holding coil for holding the weight of the moving object and a moving object. And a driving coil for driving to a position, wherein the number of turns of the holding coil is larger than the number of turns of the driving coil.

According to this configuration, the number of turns of the coil can be increased without sacrificing the response in driving the moving object, the holding thrust can be generated with a small current, and the current consumption can be reduced.

According to a third aspect of the present invention, in the linear motor driving device according to the first or second aspect, the ratio of the cross-sectional area of the holding coil to the driving coil is in a range of 1: 3 to 1: 5. It is characterized by the following.

According to this configuration, the dimensions of the coil and the linear motor can be reduced. According to a fourth aspect of the present invention, there is provided a holder for holding a moving object, wherein each thrust direction provided on the holder has an angle of 90 ° in a horizontal plane.
And a drive means, and any one of the linear motors described above is used as the drive.

According to a fifth aspect of the present invention, there is provided a linear motor drive device comprising: a first guide slidably supporting a holder on which an object to be moved is mounted; and a reciprocating movement of the holder along the first guide. First driving means for moving, a second guide slidably supporting a table on which the first guide is mounted, and second driving means for reciprocating the table along the second guide And any one of the linear motors described above is used as the first and second driving means.

According to a sixth aspect of the present invention, there is provided a linear motor driving device according to the fifth aspect, further comprising a rotational position detecting device for measuring a rotational position of the moving object in a moving plane, and detecting the rotational position based on the detected rotational position. And the current flowing through the holding coils of the first driving means and the second driving means is changed.

According to this configuration, even when the apparatus is tilted, it is possible to generate a thrust for holding the moving object with a small amount of current by controlling the current value flowing through each holding coil to an optimum state, thereby reducing the current consumption. Can be reduced.

According to a seventh aspect of the present invention, there is provided a linear motor driving device according to the seventh aspect, wherein a magnetic flux from one returns to the other magnetic generating means through the yoke between the pair of yokes arranged opposite to each other. And a ring-shaped coil is interposed, and when a current is supplied to the ring-shaped coil, a moving object connected to the coil moves along the magnetic poles of the magnetism-generating means. A linear motor driving device provided with a circuit, wherein the annular coil includes a coil for generating an offset thrust and a driving coil for driving a moving object to a target position, When the difference between the target position and the current position is large, the respective coil thrust directions are set to the same direction.When the difference between the target position and the current position is small, the coil for generating the offset thrust is opposite to the driving coil. Wherein the thrust is configured to generate.

According to this configuration, even if the difference between the target position and the current position is small, the position of the drive coil can be controlled by constantly increasing or decreasing the current in one direction, so that the magnetic noise caused by the inductance of the coil when switching the current direction is reduced. It is possible to increase the control cycle by reducing the number and improve the positioning accuracy.

In the linear motor driving device according to the present invention, a coil is wound around an annular yoke, and a magnetic generating means whose magnetic pole faces the yoke at a location on the inner peripheral surface of the yoke facing the coil. To form a closed magnetic circuit in which the magnetic flux from the magnetic generating means returns to the magnetic generating means through the yoke, and when a current is supplied to the coil, the moving object connected to the coil moves the moving object. A linear motor drive device provided with a magnetic circuit that moves in a direction traversing a closed magnetic circuit, wherein the coil includes:
Consists of a coil for generating offset thrust and a drive coil for driving the moving object to the target position. When the difference between the target position and the current position of the moving object is large, the direction of each coil thrust is the same. When the difference between the target position and the current position is small, the coil for generating the offset thrust generates a thrust in a direction opposite to that of the driving coil.

According to this structure, even if the difference between the target position and the current position is small, the position of the drive coil can be controlled by constantly increasing or decreasing the current in one direction, so that the magnetic noise caused by the inductance of the coil when switching the current direction is reduced. Control cycle can be increased to improve the positioning accuracy.

According to a ninth aspect of the present invention, there is provided a linear motor driving device according to the present invention, wherein a magnetic flux from one returns to the other magnetism generating means through the yoke between a pair of yokes arranged opposite to each other. A magnetic circuit in which a magnetic generating means having a coil and an annular coil are interposed, and when a current is supplied to the annular coil, a moving object connected to the coil moves along the magnetic poles of the magnetic generating means. Wherein the annular coil comprises a coil for generating an offset thrust and a drive coil for driving a moving object to a target position. The number of turns is larger than the number of turns of the driving coil. When the difference between the target position and the current position of the moving object is large, the respective coil thrust directions are the same, and the difference between the target position and the current position is small. There time is characterized in that the thrust of the driving coil in the opposite direction to the coil for offset thrust generation is configured to generate.

According to this structure, even if the difference between the target position and the current position is small, the position of the driving coil can be controlled by constantly increasing or decreasing the current in one direction, so that the magnetic noise caused by the inductance of the coil when switching the current direction can be reduced. Thus, the control cycle can be increased to improve the positioning accuracy, and the current of the offset coil can be reduced.

According to a tenth aspect of the present invention, in the linear motor driving device, a coil is wound around an annular yoke, and a magnetic generating means whose magnetic pole faces the yoke at a location on the inner peripheral surface of the yoke facing the coil. To form a closed magnetic circuit in which the magnetic flux from the magnetic generating means returns to the magnetic generating means through the yoke, and when a current is supplied to the coil, the moving object connected to the coil moves the moving object. A linear motor driving device provided with a magnetic circuit that moves in a direction traversing a closed magnetic circuit, wherein the coil includes a coil for generating an offset thrust and a driving coil for driving a moving object to a target position. In order to generate the offset thrust, the number of windings of the coil is made larger than the number of windings of the driving coil. The coil thrust direction is the same direction,
When the difference between the target position and the current position is small, the coil for generating the offset thrust generates a thrust in the direction opposite to that of the driving coil.

According to this configuration, even if the difference between the target position and the current position is small, the position of the driving coil can be controlled by increasing or decreasing the current in one direction, so that magnetic noise caused by the inductance of the coil when switching the current direction can be reduced. The control cycle can be increased to improve the positioning accuracy, and the current of the offset coil can be reduced.

[0027] According to the eleventh aspect of the present invention, there is provided a linear motor driving device according to any one of the first to tenth aspects.
A large number of coils made using windings of the same diameter are connected in parallel to form coils having different winding diameter specifications.

According to this configuration, coils having different winding diameter specifications can be formed with one kind of winding diameter, so that an improvement in working efficiency can be realized. According to a twelfth aspect of the present invention, in the linear motor driving device according to the twelfth aspect, the plurality of coils are two
As a set of coils, a large number of coils are connected in parallel by using a coil having a small winding diameter specification among the two sets of coils to form a coil having a large winding diameter specification.

According to this configuration, coils having different winding diameter specifications can be formed with one kind of winding diameter, so that work efficiency can be improved. (Embodiment 1) FIGS. 1 to 3 show (Embodiment 1) of the present invention.

In this (Embodiment 1), the coil 2 is divided in order to reduce the holding current and save power.
This is different from the above conventional example. Specifically, as shown in FIGS. 1 and 2, the linear motor driving device includes a permanent magnet 3 as a magnetic generating means and an annular coil 2 between a back yoke 1 and a front yoke 4 which are arranged to face each other. And are interposed.

The permanent magnet 3 provided on the side of the back yoke 1 comprises a first magnetic pole 3a and a second magnetic pole 3b arranged such that their magnetic poles face in opposite directions.
The magnetic flux from the magnetic flux reaches the front yoke 4 and returns to the second magnetic pole 3b through the front yoke 4, thereby forming a closed magnetic circuit.

A moving object (not shown) is connected to an annular coil 2 interposed between the permanent magnet 3 and the front yoke 4, and the annular coil 2 drives the moving object to a target position. And a holding coil 2b for holding the weight of the coil and the moving object.

When an electric current is supplied to the coil 2, the moving object connected to the coil 2 is driven in a direction (arrow D direction) crossing the closed magnetic circuit. At this time, the coil current is controlled so that a force corresponding to the own weight of the coil and the moving object is generated in the holding coil 2b, and the current is controlled in the driving coil 2a in a direction to correct a deviation from a target value. I have.

Since it is not necessary to consider the responsiveness of the holding coil 2b, the number of turns of the holding coil 2b is larger than the number of turns of the driving coil 2a. The driving coil 2
a and the holding coil 2b have the same sectional area of the coil along the direction of the magnetic field generated by the permanent magnet 3.

By configuring the coil 2 with the driving coil 2a and the holding coil 2b in this manner, the holding coil 2b can be used without sacrificing the response in driving the moving object.
Can be increased, the holding thrust can be generated even with a small current, the self-weight can be held, and the current consumption can be reduced.

The holding coil 2b and the driving coil 2
By setting the ratio of the cross-sectional area along the direction of the magnetic field generated by the permanent magnet 3a to 1: 3 to 1: 5, the holding coil 2b
Can be reduced to 1/3 to 1/5 of the driving coil 2a, so that the dimensions of the coil 2 and the linear motor can be reduced.

Since the driving coil 2a requires responsiveness, it requires a thrust three to five times its own weight.
On the other hand, a thrust corresponding to its own weight may be generated in the holding coil 2b, and the thrust of the driving coil 2a is 1/3 to 1/5.
Only thrust. Therefore, since the coil thrust is substantially proportional to the coil cross-sectional area, the cross-sectional area of the holding coil 2b is reduced to 1/3 to 1/3.
By making it 1/5, the size of the coil 2 can be reduced.

In the above description, the driving coil 2a and the holding coil 2b are stacked in the direction of the magnetic field generated by the yoke with the same winding direction. However, as shown in FIG. They may be stacked outside the coil 2a.

(Embodiment 2) FIGS. 4 to 7 show (Embodiment 2) of the present invention. This (Embodiment 2) is different in that an annular yoke 6 is used, but the other basic configuration is the same as the above (Embodiment 1).

More specifically, as shown in FIGS. 4 and 5, the linear motor driving device comprises a front yoke 6 having an annular yoke 6 in which a back yoke 1 and a front yoke 4 arranged opposite to each other are connected by a side yoke 5. The coil 2 is wound around the yoke 4, and a permanent magnet 3 is disposed on the inner peripheral surface of the back yoke 1 as magnetism generating means. When a current is supplied to the coil 2, the coil 2 and the moving object move in the direction of arrow D. It is configured to move.

The magnetic flux from the permanent magnet 3 is applied to the front yoke 4
To form a closed magnetic circuit that returns to the permanent magnet 3 through the yoke 6. An object to be moved is connected to the coil 2 wound around the front yoke 4, and the coil 2 has a drive coil 2a for driving the object to be moved to a target position, and the weight of the coil and the object to be moved. And a holding coil 2b for holding.

When a current is supplied to the coil 2, the moving object connected to the coil 2 is driven in a direction crossing the closed magnetic circuit. At this time, the coil current is controlled so that a force corresponding to the weight of the coil 2 and the moving object is generated in the holding coil 2b, and the current is controlled in the driving coil 2a in a direction to correct the deviation from the target value. ing.

Since it is not necessary to consider the responsiveness of the holding coil 2b, the number of turns of the holding coil 2b is larger than that of the driving coil 2a. The driving coil 2
a and the holding coil 2b have the same sectional area of the coil along the direction of the magnetic field generated by the permanent magnet 3.

By configuring the coil 2 with the driving coil 2a and the holding coil 2b in this manner, the holding coil 2b can be used without sacrificing the response in driving the moving object.
Can be increased, the holding thrust can be generated even with a small current, the self-weight can be held, and the current consumption can be reduced.

The holding coil 2b and the driving coil 2
By setting the ratio of the cross-sectional area along the direction of the magnetic field generated by the permanent magnet 3a to 1: 3 to 1: 5, the holding coil 2b
Can be reduced to 1/3 to 1/5 of the driving coil 2a, so that the dimensions of the coil 2 and the linear motor can be reduced.

Since the driving coil 2a requires responsiveness, it requires a thrust 3 to 5 times the own weight.
On the other hand, a thrust corresponding to its own weight may be generated in the holding coil 2b, and the thrust of the driving coil 2a is 1/3 to 1/5.
Only thrust. Therefore, since the coil thrust is substantially proportional to the coil cross-sectional area, the cross-sectional area of the holding coil 2b is reduced to 1/3 to 1/3.
By making it 1/5, the size of the coil 2 can be reduced.

In the above description, the holding coil 2b is stacked outside the driving coil 2a with the same winding direction of the driving coil 2a and the holding coil 2b.
As shown in (1), they may be stacked in the direction of the magnetic field generated by the yoke.

As shown in FIG. 7, two permanent magnets 3a and 3b may be used as the permanent magnet 3. (Embodiment 3) FIG. 8 shows (Embodiment 3) of the present invention.

In this (Embodiment 3), a specific example of a camera 21 using the linear motor described in each of the above embodiments as a driving source will be described. The camera 21 includes a holder 10 for holding the lens 9 as a moving object, and the holder 10
Are provided with a first driving means 7 and a second driving means 8 each having a thrust direction at an angle of 90 ° in a horizontal plane.

First drive means 7 and second drive means 8
Is provided at an angle of 90 ° for correction of camera shake in the X and Y directions, and two linear motors are arranged so as to be integrated with the lens.

The holder 10 is slidably supported by the first guide 11, and the first driving means 7 reciprocates along the first guide 11. Also, the first guide 1
The table 12 on which 1 is mounted is slidably supported by a second guide 13, and the second driving means 8 reciprocates along the second guide 13.

First drive means 7 and second drive means 8
The linear motor described in each of the above embodiments, that is, the linear motor using the coil 2 in which the driving coil 2a and the holding coil 2b are separately provided is used.

The camera 21 configured as described above rotates in the direction of arrow C. This rotation changes the direction in which the gravity Mg is applied, so that it is necessary to adjust the value of the current flowing through the holding coil 2b. .

The adjustment of the current flowing through the holding coil 2b is based on the rotational position detected by a rotational position detector (not shown) for measuring the rotational position of the camera 21 in the direction of arrow C in the plane of the base 14. Done.

As the rotational position detecting device, an angular velocity sensor for detecting camera shake is used, the position of the camera is calculated based on the signal of the angle sensor, and a current corresponding to the calculated position is supplied to each holding coil 2b. .

As a result, even when the camera 21 rotates in the direction of the arrow C, the thrust for holding the weight of the lens 9 is reduced by the holding coil 2b of the first driving means 7 and the second driving means 8 with power saving. Canceled.

Further, since the linear motor drive device described in each of the above embodiments is used as a drive source, the holding coil 2 can be used without sacrificing the response of the drive coil 2a.
The number of turns of b can be increased, and its own weight can be held with a small current.
Power saving can be realized.

(Embodiment 4) FIGS. 9 to 12 show (Embodiment 4) of the present invention. This (Embodiment 4) shows a linear motor used for lens position control.

As shown in FIGS. 9 and 10, the linear motor device includes a permanent magnet 3 as a magnetic generating means and an annular coil 2 between a back yoke 1 and a front yoke 4 which are arranged opposite to each other. Is interposed.

The permanent magnet 3 provided on the side of the back yoke 1 comprises a first magnetic pole 3a and a second magnetic pole 3b arranged such that their magnetic poles face in opposite directions.
The magnetic flux from the first magnetic field reaches the front yoke 4 and returns to the second magnetic pole 3b through the front yoke 4 to form a closed magnetic circuit.

When a current is supplied to the annular coil 2 interposed between the permanent magnet 3 and the front yoke 4, a moving object integrated with the coil 2 moves along the magnetic poles of the permanent magnet 3. A magnetic circuit is provided so as to move.

The annular coil 2 interposed between the permanent magnet 3 and the front yoke 4 includes a driving coil 2a for driving a moving object to a target position and an offset coil 2c for generating an offset thrust. It is configured.

The linear motor configured as described above is used for controlling the position of the lens. The linear motor is required to quickly reach the target position, and after reaching the target position, maintain high positional accuracy at that position. Required. In order to increase the position accuracy, it is important how quickly the deviation from the target value is corrected, and it is required to increase the control cycle.

The details will be described below with reference to FIG. In the current characteristic diagram, the horizontal axis represents the elapsed time t, and the vertical axis represents the current value. It is assumed that the position control from the current position to the target position is started at t = 0. At first, the distance from the current position to the target position is long, and the difference between the target position of the moving object and the current position is large. Therefore, it is necessary to drive the target to the target position quickly with a large thrust. This is the drive area α.

In the driving area α, the driving coil 2a and the offset coil 2c are used to generate a large thrust.
The thrust direction generated at the same time is the same direction. Next, when the moving object approaches the vicinity of the target position, the difference between the target position and the current position becomes smaller, so that it is necessary to perform positioning with high precision, and a very large thrust is not required. This is the holding area β.

In the holding region β, the position is constantly shifted in the normal and reverse directions with respect to the target position due to external force such as vibration.
Conventionally, a current and a required power (required thrust) m in the forward and reverse directions are constantly supplied so that thrust is generated in the coil 2 in the forward and reverse directions.

However, in order to apply a current in the forward and reverse directions, it is necessary to open the circuit once and change the power supply direction. Driving is not possible and control cycle cannot be shortened.

Therefore, in the holding region β, when the thrust generating direction q of the offset coil 2c is set to be opposite to the thrust generating direction p of the driving coil 2a,
A reverse direct current can flow through c, and a current only in the forward direction can flow through the drive coil 2a. As a result, there is no need to open the circuit, and the control cycle can be shortened and the positioning accuracy can be increased.

By separately providing the driving coil 2a and the offset coil 2c in this manner, even if the difference between the target position and the current position is small, the position of the driving coil 1a can be constantly controlled by increasing or decreasing the current in one direction. Therefore, when switching the current direction, the magnetic noise caused by the inductance of the coil is reduced, the control cycle is increased, and the positioning accuracy can be improved.

The coil 2 is wound around an annular yoke 6 as shown in FIG. 12 in addition to the linear motor, and a permanent magnet as a magnetic generating means is provided between the inner peripheral surface of the yoke 6 and the coil 2. In the linear motor provided with 3,
The coil 2 is composed of a driving coil 2a and an offset coil 2c.
With this configuration, the same effect as described above can be obtained.

Further, in the above linear motor,
Coil 2 includes drive coil 2a and offset coil 2c
Since it is not necessary to consider the responsiveness of the offset coil 2c, the number of turns of the offset coil 2c can be larger than the number of turns of the drive coil 2a.
Power saving can be achieved.

The driving coil 2a and the offset coil 2c have the same cross-sectional area along the direction of the magnetic field generated by the permanent magnet 3. (Embodiment 5) FIG. 13 shows Embodiment 5 of the present invention.
Is shown.

In the coil 2 in each of the above embodiments, in this (Embodiment 5), a large number of coils formed using windings having the same size and diameter are connected in parallel to form coils having different winding diameter specifications. It is characterized in that it is created.

That is, a coil group 20 including the first coil 2a and the second coil 2b having different winding diameter specifications is formed by connecting coils formed by using windings having the same diameter in parallel.

Since the first coil 2a and the second coil 2b have different winding diameter specifications, it is necessary to change the wire diameter of the winding so that winding cannot be performed. The same winding diameter can be created as when two or three times the wire diameter is used by connecting two or three parallel wires, so that there is no need to change the winding diameter, and work efficiency can be increased.

It should be noted that the plurality of coils are made into two sets of coils,
The same effect as described above can be obtained even if a large number of coils are connected in parallel by using a coil having a small winding diameter specification among the two sets of coils to form a coil having a large winding diameter specification.

[0077]

As described above, according to the present invention, the coil of the linear motor is constituted by the holding coil and the driving coil for driving the moving object to the target position, and the number of turns of the holding coil is changed by the driving coil. By increasing the number of turns, the number of turns of the holding coil can be increased without sacrificing responsiveness in driving the moving object, and holding thrust can be generated with a small current, so that the current consumption of the linear motor can be reduced. .

Further, the camera using this linear motor driving device can increase the number of turns of the holding coil without considering the response in driving the moving object, and can move the moving object in a plane to reduce the current. However, a holding thrust can be generated.

Further, the coil of the linear motor is composed of an offset coil for generating an offset thrust and a drive coil for driving a moving object to a target position, and the number of turns of the offset coil is determined by the number of turns of the drive coil. When the difference between the target position and the current position is large, the thrust direction of each coil is set to the same direction, and when the difference between the target position and the current position is small, the thrust direction of the offset coil and the drive coil is set to the opposite direction. Is generated, the control cycle can be increased without switching the current direction, the positioning accuracy can be improved, and the electromagnetic noise can be reduced.

[Brief description of the drawings]

FIG. 1 is a perspective view of a linear motor driving device according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view of a linear motor driving device according to the first embodiment of the present invention.

FIG. 3 is a cross-sectional view of another example according to the first embodiment of the present invention.

FIG. 4 is a perspective view of a linear motor driving device according to a second embodiment of the present invention.

FIG. 5 is a cross-sectional view of a linear motor driving device according to a second embodiment of the present invention.

FIG. 6 is a cross-sectional view of another example according to the second embodiment of the present invention.

FIG. 7 is a cross-sectional view of another example according to the second embodiment of the present invention.

FIG. 8 is a perspective view of a linear motor driving device according to a third embodiment of the present invention.

FIG. 9 is a perspective view of a linear motor driving device according to a fourth embodiment of the present invention.

FIG. 10 is a sectional view of a linear motor driving device according to a fourth embodiment of the present invention.

FIG. 11 is a current characteristic diagram of a coil according to (Embodiment 4) of the present invention.

FIG. 12 is a cross-sectional view of another example of (Embodiment 4) of the present invention.

FIG. 13 is a partial coil diagram of a linear motor driving device according to a fifth embodiment of the present invention.

FIG. 14 is a perspective view of a conventional linear motor driving device.

FIG. 15 is a sectional view of a conventional linear motor driving device.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 back yoke 2 coil 2 a drive coil 2 b holding coil 2 c offset coil 3 permanent magnet 4 front yoke 6 yoke 7 first drive means 8 second drive means 9 lens

Claims (12)

[Claims] 1. A method according to claim 1, further comprising: a pair of yokes arranged opposite to each other.
A magnetic generating means having a closed magnetic circuit for returning magnetic flux from one side to the other magnetic generating means through the yoke and an annular coil are interposed, and when current is supplied to the annular coil, the annular coil A linear motor driving device provided with a magnetic circuit that drives a moving object connected to the closed magnetic circuit in a direction traversing the closed magnetic circuit, wherein the annular coil is used to hold the weight of the coil and the moving object. And a driving coil for driving the moving object to a target position, wherein the number of turns of the holding coil is larger than the number of turns of the driving coil. 2. A coil is wound around an annular yoke, and a magnetic generating means whose magnetic pole faces the yoke is disposed at a location on the inner peripheral surface of the yoke facing the coil, and a magnetic flux from the magnetic generating means is provided. A magnetic circuit that forms a closed magnetic circuit that returns to the magnetic generating means through the yoke, and moves a moving object connected to the coil in a direction crossing the closed magnetic circuit when current is supplied to the coil. Wherein the coil comprises a coil for holding the coil and a self-weight of the moving object, and a driving coil for driving the moving object to a target position. A linear motor driving device wherein the number of turns of the holding coil is larger than the number of turns of the driving coil. 3. The method according to claim 1, wherein the ratio of the sectional area of the holding coil to that of the driving coil is in the range of 1: 3 to 1: 5.
The linear motor drive as described. 4. A holder for holding a moving object, and a thrust direction provided on the holder is 90 ° in a horizontal plane.
4. A linear motor driving device using the linear motor according to claim 1, comprising: two driving units having an angle of: 5. A first guide for slidably supporting a holder on which a moving object is placed, a first driving means for reciprocating the holder along the first guide, and
Slidably supports a table on which a guide is mounted
And a second driving means for reciprocating the table along the second guide, wherein the first and second driving means are linear. Linear motor drive using a motor. 6. A rotating position detecting device for measuring a rotating position of a moving object in a moving plane, wherein the holding coils of the first driving means and the second driving means are provided on the basis of the detected rotating positions. 6. The linear motor driving device according to claim 5, wherein the current flowing is changed. 7. A pair of yokes arranged opposite to each other,
Magnetic generating means having a closed magnetic circuit through which magnetic flux from one side returns to the other magnetic generating means through the yoke and an annular coil are interposed, and are connected to this coil when a current is supplied to the annular coil. A linear motor driving device provided with a magnetic circuit for moving a moving object along the magnetic poles of the magnetism generating means, wherein the annular coil is formed by a coil for generating an offset thrust and a moving object. And a drive coil for driving the target position.When the difference between the target position and the current position of the moving object is large, the respective coil thrust directions are set to the same direction, and the difference between the target position and the current position is small. A linear motor driving device configured to generate a thrust in a coil for generating an offset thrust in a direction opposite to that of the driving coil at the time. 8. A coil is wound around an annular yoke, and a magnetic generating means whose magnetic pole faces the yoke is disposed at a position on the inner peripheral surface of the yoke which faces the coil, and a magnetic flux from the magnetic generating means is provided. A magnetic circuit that forms a closed magnetic circuit that returns to the magnetism generating means through the yoke, and when a current is supplied to the coil, a moving object connected to the coil moves in a direction crossing the closed magnetic circuit. A linear motor driving device provided, wherein the coil comprises a coil for generating an offset thrust and a driving coil for driving a moving object to a target position, wherein the target position of the moving object is When the position difference is large, the respective coil thrust directions are set to the same direction, and when the difference between the target position and the current position is small, the coil for generating the offset thrust is the driving coil. A linear motor drive device configured to generate a thrust in the opposite direction. 9. Between a pair of yokes arranged opposite to each other,
Magnetic generating means having a closed magnetic circuit through which magnetic flux from one side returns to the other magnetic generating means through the yoke and an annular coil are interposed, and are connected to this coil when a current is supplied to the annular coil. A linear motor driving device provided with a magnetic circuit that moves the moved object along the magnetic poles of the magnetism generating means, wherein the annular coil includes a coil for generating an offset thrust and the object to be moved. A drive coil for driving to a target position, the number of turns of the coil for generating the offset thrust is larger than the number of turns of the drive coil, and when the difference between the target position and the current position of the moving object is large, each coil The thrust direction is set to the same direction, and when the difference between the target position and the current position is small, the coil for generating the offset thrust generates a thrust in a direction opposite to that of the driving coil. Near motor drive. 10. A coil is wound around an annular yoke, and a magnetic generating means whose magnetic pole faces the yoke is disposed on the inner peripheral surface of the yoke at a position facing the coil, and a magnetic flux from the magnetic generating means is provided. A magnetic circuit that forms a closed magnetic circuit that returns to the magnetism generating means through the yoke, and when a current is supplied to the coil, a moving object connected to the coil moves in a direction crossing the closed magnetic circuit. A linear motor drive device provided, wherein the coil comprises a coil for generating an offset thrust and a drive coil for driving a moving object to a target position,
In order to generate the offset thrust, the number of turns of the coil is made larger than the number of turns of the driving coil. When the difference between the target position and the current position of the moving object is large, the respective coil thrust directions are set to the same direction, and the target position and the current position are set. A linear motor driving device configured to generate a thrust in a direction opposite to that of the driving coil in a coil for generating an offset thrust when a difference between the driving coils is small. 11. A linear motor according to claim 1, wherein a large number of coils formed using windings having the same diameter are connected in parallel to form coils having different winding diameter specifications. Drive. 12. A coil having a large winding diameter specification, wherein a plurality of coils are two sets of coils, and a large number of said coils are connected in parallel using windings having a small winding diameter specification among the two sets of coils. The linear motor driving device according to claim 11, which is created.