JPS6155336U - - Google Patents
Info
- Publication number
- JPS6155336U JPS6155336U JP14140684U JP14140684U JPS6155336U JP S6155336 U JPS6155336 U JP S6155336U JP 14140684 U JP14140684 U JP 14140684U JP 14140684 U JP14140684 U JP 14140684U JP S6155336 U JPS6155336 U JP S6155336U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- masking
- jig
- resist
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 230000000873 masking effect Effects 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14140684U JPS6155336U (el) | 1984-09-17 | 1984-09-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14140684U JPS6155336U (el) | 1984-09-17 | 1984-09-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6155336U true JPS6155336U (el) | 1986-04-14 |
Family
ID=30699748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14140684U Pending JPS6155336U (el) | 1984-09-17 | 1984-09-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6155336U (el) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0356678U (el) * | 1989-09-27 | 1991-05-30 | ||
JP2001162207A (ja) * | 1999-10-01 | 2001-06-19 | Tokyo Electron Ltd | 塗布装置 |
-
1984
- 1984-09-17 JP JP14140684U patent/JPS6155336U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0356678U (el) * | 1989-09-27 | 1991-05-30 | ||
JP2001162207A (ja) * | 1999-10-01 | 2001-06-19 | Tokyo Electron Ltd | 塗布装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6155336U (el) | ||
JPS6112653U (ja) | バキユ−ムチヤツク | |
JPH03128943U (el) | ||
JPH0371310U (el) | ||
JPH0440538U (el) | ||
JPH025754U (el) | ||
JPH03110850U (el) | ||
JPS61173941U (el) | ||
JPS60116236U (ja) | 半導体製造装置 | |
JPS62180947U (el) | ||
JPH024234U (el) | ||
JPS62162265U (el) | ||
JPH03106745U (el) | ||
JPH0325239U (el) | ||
JPS6379635U (el) | ||
JPH042018U (el) | ||
JPS62186970U (el) | ||
JPS6249232U (el) | ||
JPS60151580U (ja) | 回転塗布装置の基板ホルダ− | |
JPS62182541U (el) | ||
JPS5845534U (ja) | ホトマスク | |
JPH0252327U (el) | ||
JPS637400U (el) | ||
JPS59103771U (ja) | 薄膜気相成長装置 | |
JPH0398447U (el) |