JPS6155335U - - Google Patents

Info

Publication number
JPS6155335U
JPS6155335U JP14076584U JP14076584U JPS6155335U JP S6155335 U JPS6155335 U JP S6155335U JP 14076584 U JP14076584 U JP 14076584U JP 14076584 U JP14076584 U JP 14076584U JP S6155335 U JPS6155335 U JP S6155335U
Authority
JP
Japan
Prior art keywords
heat treatment
semiconductor substrates
treatment boat
position detection
handle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14076584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0636575Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14076584U priority Critical patent/JPH0636575Y2/ja
Publication of JPS6155335U publication Critical patent/JPS6155335U/ja
Application granted granted Critical
Publication of JPH0636575Y2 publication Critical patent/JPH0636575Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14076584U 1984-09-17 1984-09-17 熱処理装置 Expired - Lifetime JPH0636575Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14076584U JPH0636575Y2 (ja) 1984-09-17 1984-09-17 熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14076584U JPH0636575Y2 (ja) 1984-09-17 1984-09-17 熱処理装置

Publications (2)

Publication Number Publication Date
JPS6155335U true JPS6155335U (enrdf_load_stackoverflow) 1986-04-14
JPH0636575Y2 JPH0636575Y2 (ja) 1994-09-21

Family

ID=30699114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14076584U Expired - Lifetime JPH0636575Y2 (ja) 1984-09-17 1984-09-17 熱処理装置

Country Status (1)

Country Link
JP (1) JPH0636575Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01230246A (ja) * 1987-11-06 1989-09-13 Tel Sagami Ltd 半導体ウェハの移し換え方法及び半導体ウェハの移し換え装置並びに半導体ウェハの熱処理ボート
JPH03159233A (ja) * 1989-11-17 1991-07-09 Tokyo Electron Ltd 熱処理炉装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01230246A (ja) * 1987-11-06 1989-09-13 Tel Sagami Ltd 半導体ウェハの移し換え方法及び半導体ウェハの移し換え装置並びに半導体ウェハの熱処理ボート
JPH03159233A (ja) * 1989-11-17 1991-07-09 Tokyo Electron Ltd 熱処理炉装置

Also Published As

Publication number Publication date
JPH0636575Y2 (ja) 1994-09-21

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