JPS6155267B2 - - Google Patents

Info

Publication number
JPS6155267B2
JPS6155267B2 JP56017419A JP1741981A JPS6155267B2 JP S6155267 B2 JPS6155267 B2 JP S6155267B2 JP 56017419 A JP56017419 A JP 56017419A JP 1741981 A JP1741981 A JP 1741981A JP S6155267 B2 JPS6155267 B2 JP S6155267B2
Authority
JP
Japan
Prior art keywords
ion
solar cell
manufacturing
magnetic field
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56017419A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57132373A (en
Inventor
Haruo Ito
Mitsunori Ketsusako
Tadashi Saito
Katsumi Tokikuchi
Takashi Tokuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP56017419A priority Critical patent/JPS57132373A/ja
Publication of JPS57132373A publication Critical patent/JPS57132373A/ja
Publication of JPS6155267B2 publication Critical patent/JPS6155267B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/121The active layers comprising only Group IV materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)
JP56017419A 1981-02-10 1981-02-10 Manufacture of solar battery Granted JPS57132373A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56017419A JPS57132373A (en) 1981-02-10 1981-02-10 Manufacture of solar battery

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56017419A JPS57132373A (en) 1981-02-10 1981-02-10 Manufacture of solar battery

Publications (2)

Publication Number Publication Date
JPS57132373A JPS57132373A (en) 1982-08-16
JPS6155267B2 true JPS6155267B2 (enrdf_load_stackoverflow) 1986-11-27

Family

ID=11943483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56017419A Granted JPS57132373A (en) 1981-02-10 1981-02-10 Manufacture of solar battery

Country Status (1)

Country Link
JP (1) JPS57132373A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8697553B2 (en) * 2008-06-11 2014-04-15 Intevac, Inc Solar cell fabrication with faceting and ion implantation
US8749053B2 (en) 2009-06-23 2014-06-10 Intevac, Inc. Plasma grid implant system for use in solar cell fabrications
SG10201508582WA (en) 2011-11-08 2015-11-27 Intevac Inc Substrate processing system and method
TWI570745B (zh) 2012-12-19 2017-02-11 因特瓦克公司 用於電漿離子植入之柵極
WO2018220447A2 (en) * 2017-06-01 2018-12-06 Segton Advanced Technologie Sas Improved process for manufacturing a crystalline metamaterial within a silicon light-to-electricity converter
FR3067168A1 (fr) * 2017-06-01 2018-12-07 Segton Advanced Technology Procede de fabrication d'un convertisseur lumiere-electricite tout en silicium pour une photoconversion geante
FR3067169B1 (fr) * 2017-06-01 2021-09-24 Segton Advanced Tech Procede ameliore de fabrication d'un metamateriau a l'interieur d'un convertisseur lumiere-electricite en silinium
FR3081081B1 (fr) * 2018-05-14 2020-10-09 Segton Advanced Tech Procede d'amorphisation pour creer industriellement un metamateriau a photoconversion geante dans un convertisseur lumiere-electricite tout en silicium

Also Published As

Publication number Publication date
JPS57132373A (en) 1982-08-16

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