JPS6154597B2 - - Google Patents

Info

Publication number
JPS6154597B2
JPS6154597B2 JP57039336A JP3933682A JPS6154597B2 JP S6154597 B2 JPS6154597 B2 JP S6154597B2 JP 57039336 A JP57039336 A JP 57039336A JP 3933682 A JP3933682 A JP 3933682A JP S6154597 B2 JPS6154597 B2 JP S6154597B2
Authority
JP
Japan
Prior art keywords
thin film
workpiece
monitoring
evaporation source
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57039336A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58158254A (ja
Inventor
Akihiko Toku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP57039336A priority Critical patent/JPS58158254A/ja
Publication of JPS58158254A publication Critical patent/JPS58158254A/ja
Publication of JPS6154597B2 publication Critical patent/JPS6154597B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
JP57039336A 1982-03-15 1982-03-15 多層薄膜形成装置における膜厚監視装置 Granted JPS58158254A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57039336A JPS58158254A (ja) 1982-03-15 1982-03-15 多層薄膜形成装置における膜厚監視装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57039336A JPS58158254A (ja) 1982-03-15 1982-03-15 多層薄膜形成装置における膜厚監視装置

Publications (2)

Publication Number Publication Date
JPS58158254A JPS58158254A (ja) 1983-09-20
JPS6154597B2 true JPS6154597B2 (en:Method) 1986-11-22

Family

ID=12550246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57039336A Granted JPS58158254A (ja) 1982-03-15 1982-03-15 多層薄膜形成装置における膜厚監視装置

Country Status (1)

Country Link
JP (1) JPS58158254A (en:Method)

Also Published As

Publication number Publication date
JPS58158254A (ja) 1983-09-20

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