JPS6154431A - Instrument for measuring optically surface physical properties - Google Patents

Abstract

PURPOSE:To facilitate position adjustment on the surface to be detected by forming by incorporating fiber for detecting reflected radiant flux with fiber for monitoring. CONSTITUTION:Image fiber 43 is provided to the end flank of fibers 9, 15 and incorporated, and also, connected with a television camera 44 and a television monitor 45. An enlarged image of the surface to be detected is image-formed on a face 43-2 by an objective 43-1, transmitted by image fiber flux 43-5 and again image-formed on a face 43-3. This enlarged image is displayed on the television monitor 45 by a television camera lens 43-4 via the television camera 44 and the adjustment of measuring position on the surface to be detected can be made simply with high precision.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optical image surface physical property device for measuring the reflectance of a substance.

[Prior Art] The basic form of the reflectance measuring device in the present invention is described in the reference document rJournal of Chemical Phys.
ics J7918, 15・0ctober・1
983. P, 3701-3709. The basic concept of this measuring device will be explained below with reference to FIG.

The radiant flux 3-1, 3-2 from the radiant source 1 is converted into a parallel radiant flux 3-3 by the elliptical reflector 2, and is converted into a parallel radiant flux 3-3 by the monochromator.
4. The output radiation flux from the monochromator 4 passes through the input section 5 of the Y-shaped fiber 50 to the fiber 6.
．． 7 respectively. The radiation flux is transmitted alternately by the chopper 8 located between the fibers 6 and 9 and between the fibers 7 and 10, the radiation flux from the fiber 9 is transmitted from its end face 11 to the test surface 28, and the radiation flux from the fiber 10 is transmitted from its end face 12. The reference surface 30 is alternately irradiated from each other. The reflected radiation flux 13 from the test surface 28 is transmitted from the end face 11 to the fiber 15, and the reflected radiation flux 14 from the reference surface 30 is transmitted from the end face 12 to the fiber 16, and is incident on a monochromator 17.

The emitted radiant flux 34 from the monochromator 17 is inputted to the photomultiplier 19 via a light-shielding tube 35, etc.
After that, log amblifier 20, bypass filter 21, amblifier 22, phase synchronization circuit 23,
Microcomputer 2 via A-D converter 25
7 as a digital signal.

The monochromators 4 and 17 are synchronously wavelength-scanned via step motors 1B-1 and 18-2 using a signal 33 previously stored in the microcomputer 27. In addition, the scanning signal 24 of the chigoppa 8
is input to the microcomputer 27 via the phase synchronization circuit.

Next, the signals input to the microcomputer 27 will be explained.

In FIG. 3, if the signals reflected from the test surface 29 and the reference surface 30 and entering the microcomputer 27 via the electrical amplification system are rl+ and r2, respectively, rl+r2 is expressed as follows.

r I= I o X t l×'RIr2 = I(,
Xt2 XR2 However, each symbol represents the following items.

■. : Light source intensity (the amplification rate by the amplification system is also included in this term) tI : Transmittance of the optical system on the detection side of the test surface L2 : Transmittance of the optical system on the detection side of the reference surface RI = Reflectance of the test surface R2: Reference surface reflectance The reflectance R1 of the test surface 29 is the theoretical reflectance of the same material as the reference surface. It is obtained by multiplying by Rr. This can be expressed as follows.

・・・・・・・・・(1) In equation (1), R2 is expressed as RT. As for As, when the same substance as the reference surface is placed on the test surface, it is reflected from there and the amplification system The signal value (X t + XR2) that enters the microcomputer-27 through the
The electrically amplified signal rl+r2 of the radiant flux reflected from the test surface 2θ and the reference surface 30 divided by the signal entering the input signal 7 (E ◇X t 2 X R2) is the period of the chopper 8. The signals are transmitted alternately at intervals of the period T in synchronization with T.

FIG. 2 shows the relationship between rl and rl and the period T. Therefore, the average value of the sum of several rl's can be taken as the value of r, or the average value of the sum of several rl's can be taken as the value of rl.

In this way, the relationship between the reflectance R1 from the test surface obtained by using r1+r2 and equation (1) with respect to the wavelength variable by the monochromator, and also the relative difference in reflectance from the two types of test surfaces. The relationship to the wavelength variable by the monochromator is displayed on the plotter 28 or the cathode ray tube 3B, or recorded on the disk 37.

Note that the fiber in the above text is not limited to a normal fiber, and may be a selfoc, a relay for image formation using a lens, or a waveguide exhibiting internal reflection.

[Problems to be Solved by the Invention] In the conventional Ju11 constant device, it took time to adjust the measurement position on the southward side of the test object, resulting in a decrease in work efficiency.

The present invention was made to solve these conventional problems, and by integrating a fiber for detecting reflected radiation flux with a fiber for monitoring, it is possible to adjust the position on the surface to be inspected. The purpose is to provide a measuring device that can be easily used.

[Means for solving the problem] Figure 1 shows the basic concept of the present invention.
5 is a fiber, 43 is an image fiber, 44 is a television camera, and 45 is a television monitor. As shown in FIG. ．． A TV monitor 45 is connected.

[Function] Figure t52 shows a cross-sectional view of the image fiber 43 in Figure 1, and the function in the figure will be explained as follows.

An enlarged image of the surface to be inspected is formed on the face surface 43-2 by the objective lens 43-1, and then sent to the image filer as a bundle 4.
3-5, and is again imaged on the face surface 43-3. This enlarged image is transmitted to the TV monitor 4 via the TV camera lens 44 by the TV camera lens 43-4.
Display it on 5.

[Example] In this example, in the apparatus diagram shown in FIG. 4, the irradiation section for the test surface was changed based on the configuration shown in FIG. 1.

Therefore, the configuration of other devices and the flow of signals are as described in the above-mentioned [Prior Art].

By configuring the apparatus in this manner, the measurement position on the surface to be measured can be adjusted easily and with high precision while viewing the television monitor. Furthermore, in measuring the physical properties of an LB (Langmuir-Prodgett) film, etc., the state of the surface to be measured at the time of measurement can be observed simultaneously.

[Effects of the Invention] In the present invention, since the fiber for detecting reflected radiant flux and the fiber for television monitor are integrated, the measurement position on the surface to be measured can be adjusted easily and with high precision. This has a great effect on improving operability when measuring samples.

Brief explanation of the pharyngeal surface P- Fig. 1 is an explanatory diagram showing the basic concept of the present invention, Fig. 2 is an explanatory diagram showing the basic concept of the present invention.
A cross-sectional view of the image fiber 43, FIG. 3, shows the signal r1
A graph showing the relationship between +r2 and period T, and FIG. 4 is a configuration diagram showing the basic form of the reflectance measuring device according to the present invention.

l; Radiation source 2: Elliptical reflector 3-1.3-2. Radiant flux 4.17; Monochromator 5; Y-shaped fiber manual section 6.7, 9, 10, 15, 113; Fiber 8: Chopper 11.12. Fiber end face 13.14; reflected radiant flux 1B-1, 18-2; step motor 19; photomultiplier 20; log amblifier 21; bypass filter 22; amblifier 23; phase synchronization circuit 24; scanning of chopper 8 Signal 25; A-I) converter 27; microcomputer 28; plotter 28; test surface 30; reference surface 31; cooler 32; stabilized power supply 33; step motor 1B-1, 18-2 scanning signal 34
; Emitted radiation flux 35 from the monochromator 17; Light-shielding tube 36; Braun tube 37; Disk 43; Image fiber 43-1, objective lenses 43-2, 43-3; Face surface 43-4; Television camera lens 43-5; Image fiber bundle 44; television camera 45; television monitor rl; electrically amplified signal of the radiant flux reflected from the test surface 29 r2: electrically amplified signal of the radiant flux reflected from the reference surface 30 T: scanning period of chopper 8

Claims (1)

[Claims] In a measurement device that irradiates light from a radiation source onto a surface to be measured via a first monochromator, and makes the reflected radiation flux enter a second monochromator to electrically detect information, Optical surface physical properties characterized in that a detection fiber that guides the reflected radiation light to a second monochromator and a monitoring fiber for directly observing the surface to be inspected are integrally provided at opposing positions. measuring device.